Capacitance-Voltage-Method Carrier Concentration Depth Profiles in Liquid-Encapsulated-Czochralski-Technique Grown GaAs Wafers from Near-Stoichiometric and Extremely-Composition Melts

1993 ◽  
Vol 300 ◽  
Author(s):  
Yasuyijki Saito ◽  
Jhoji Nishio

ABSTRACTIt was observed that carrier concentration depth profiles under 200μm-diameter gold Schottky electrodes of deeply Si-implanted electrically active layers on undoped semi-insulating GaAs wafers depend on melt composition of liquid-glass encapsulation Czochralski technique (LEC) growth, Fourier-transformed infrared (FT-IR) measurement carbon content of LEC growth, and consecutive cooling thermal cycle of LEC growth. In the range of this experiment, for head position of boules and 2.5 × 10exp.12/cm2 Si dosage, peak carrier concentrations of As-rich melt LEC growth (initial: [As]/([As]+[Ga])≃0.526) were comparable to or slightly higher than those of near-stoichiometric melt LEC growth. For tail position and 3 × 10exp.12/cm2 Si dosage, a peak carrier concentration of a father As-rich melt LEC-growth was clearly higher than that of Ga-rich melt LEC-growth. LEC-grown melt composition effect depended on consecutive cooling thermal cycle. For peak carrier concentration dispersion of head position, there was anticorrelation between carbon content of FT-IR measurement and peak carrier concentration dispersion.

1986 ◽  
Vol 90 ◽  
Author(s):  
Debra L. Kaiser ◽  
Piotr Becla

ABSTRACTClose-spaced isothermal vapor phase epitaxy (VPE) was used to grow quaternary Hg1−x−yCdxZnyTe epillayers on Cd1−zZnzTe substrates. Composition, resistivity, and carrier concentration depth profiles were determined in the epilayers. p-n junctions were produced from material with appropriate properties using the Hg diffusion method. The junctions showed excellent I-V characteristics and high spectral detectivities.


2021 ◽  
Vol 55 (9) ◽  
pp. 6032-6041
Author(s):  
Win Cowger ◽  
Andrew B. Gray ◽  
James J. Guilinger ◽  
Brandon Fong ◽  
Kryss Waldschläger

2009 ◽  
Vol 615-617 ◽  
pp. 565-568 ◽  
Author(s):  
Alexander A. Lebedev ◽  
A.E. Belyaev ◽  
N.S. Boltovets ◽  
V.N. Ivanov ◽  
Raisa V. Konakova ◽  
...  

We studied the heat resistance of AuTiBx (ZrBx) barrier contacts to n-SiC 6H and n-GaN. The Schottky barrier diode (SBD) parameters, the concentration depth profiles for contact structure components and the phase composition of contact metallization were measured both before and after rapid thermal annealing (RTA) at temperatures up to 900 °С (1000 °С) for contacts to GaN (SiC 6H). It is shown that the layered structure of metallization and electrophysical properties of Schottky barriers (SBs) remain stable after RTA, thus indicating their heat resistance. The ideality factor n of the I-V characteristic of SBDs after RTA was 1.2, while the SB height φВ was ~0.9 eV (~0.8 eV) for the gallium nitride (silicon carbide) barrier structures.


2017 ◽  
Vol 24 (24) ◽  
pp. 20082-20092 ◽  
Author(s):  
Hugo Ramírez-Aldaba ◽  
Jorge Vazquez-Arenas ◽  
Fabiola S. Sosa-Rodríguez ◽  
Donato Valdez-Pérez ◽  
Estela Ruiz-Baca ◽  
...  

1992 ◽  
Vol 279 ◽  
Author(s):  
K. K. Bourdelle ◽  
D. O. Boerma

ABSTRACTNi foils and samples consisting of bilayers of Ni or Fe on Al, Ti or Si were implanted at room temperature with 15N+ ions to fluences of around 1×l017 N/cm2. The concentration depth profiles of 15N were determined with nuclear reaction analysis before and after vacuum annealing. It was found that the penetrability for N atoms of the surface and the solid/solid interface plays an important role in the N redistribution during implantation or annealing. The formation of a nitride layer or nitride clusters in Ni and Fe was deduced. Parameters for N migration determined for the metals under investigation are discussed in terms of models.


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