Non-Equilibrium Modeling and Dissipative Structures in Solid Material - Plasma Interactions
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ABSTRACTTopics discussed: (a) The dissipative structure (DS) composed of the plasma bulk (PB), near-to-surface plasma layer (PL), surface and the adjacent material layer (ML) coupled by mass, electric charge, etc. fluxes and applications to plasma deposition. (b) The transient local dissipative structure (TLDS) formed by a single plasma ion impinging on the surface and associated with sputtering, etc.
2018 ◽
Vol 43
(3)
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pp. 221-235
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2021 ◽
Vol 2064
(1)
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pp. 012018
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1991 ◽
Vol 45
(2)
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pp. 173-190
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