Dangling Bonds in Amorphous Silicon Nitride Alloys: Predictions of the Free Energy Model
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ABSTRACTThe free energy model (FEM) for bonding in a-SixNyHz alloys has been extended to include the contributions of neutral and charged Si and N defects to the free energy of mixing of the amorphous alloy. The FEM predicts that the dominant defects in N-rich alloys are N2o, N2-, and either S3+ or N2+, in contrast to the results of experimental studies that find the dominant neutral, paramagnetic defect to be Si3o. It is concluded that either the observed Si3o defects are not in thermodynamic equilibrium with the amorphous network or the N2o defects have energy levels which lie much higher in the energy gap than currently believed.
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1997 ◽
Vol 11
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pp. 93-106
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2007 ◽
Vol 44
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pp. 1196-1209
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2011 ◽
Vol 391-392
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pp. 1017-1021
2007 ◽
Vol 371
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pp. 1405-1419
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1989 ◽
Vol 44
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pp. 347-355
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2004 ◽
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pp. 16736-16737
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