Evaluation and Control of Plastic Deformation in GaAs Film on Si Substrate by Means of Crystal Plasticity Analysis
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ABSTRACTDislocation accumulation in patterned gallium-arsenide film, which is deposited on silicon substrate and cooled down from the deposition to room temperature, is numerically simulated under a continuum mechanics approximation. A new approach to suppression of dislocation accumulation is proposed where selective growth of the film and partial doping of impurities into it are combined. The results show the possibility to keep the surface region of the film almost dislocation free.
1992 ◽
Vol 7
(11)
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pp. 3032-3038
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1995 ◽
Vol 53
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pp. 224-225
1990 ◽
Vol 48
(4)
◽
pp. 574-575
1990 ◽
Vol 48
(4)
◽
pp. 1120-1120
2018 ◽
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