Determination of Eigenstresses from Curvature Data
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ABSTRACTCurvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff.
2002 ◽
Vol 29
(10)
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pp. 1141-1150
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2007 ◽
Vol 2007
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pp. 1-25
2017 ◽
Vol 354
(3)
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pp. 1421-1445
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1978 ◽
Vol 100
(3)
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pp. 442-444
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1999 ◽
Vol 15
(6)
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pp. 1121-1125
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