A Silicon-Based Shape Memory Alloy Microvalve

1992 ◽  
Vol 276 ◽  
Author(s):  
Curtis A. Ray ◽  
Charles L. Sloan ◽  
A. David Johnson ◽  
John D. Busch ◽  
Bruce R. Petty
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Low Power ◽  
Shape Memory ◽  
High Speed ◽  
Large Deflections ◽  
Silicon Based

ABSTRACTA new actuator for silicon micro-valves has been developed and tested. A thin film shape memory alloy provides for large deflections with high speed, low power, and small size. The actuator is batch fabricated with planar processes.

Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators

1992 ◽  
Vol 276 ◽  
Author(s):  
A. David Johnson ◽  
J. D. Busch ◽  
Curtis A. Ray ◽  
Charles Sloan
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Nickel Titanium ◽  
Titanium Film ◽  
Micro Electro Mechanical Systems ◽  
Actuation Mechanism ◽  
Micro Actuators ◽  
Chemical Milling ◽  
Silicon Based

ABSTRACTThin film shape memory alloy has been integrated with silicon in a new actuation mechanism for micro-electro-mechanical systems. This paper compares nickel-titanium film with other actuators, describes recent results of chemical milling processes developed to fabricate shape memory alloy micro-actuators in silicon, and describes simple actuation mechanisms which have been fabricated and tested.

scholarly journals Grain Size and Phase Transformation Behavior of TiNi Shape-Memory-Alloy Thin Film under Different Deposition Conditions

Materials ◽  
2020 ◽  
Vol 13 (14) ◽  
pp. 3229
Author(s):  
Joohyeon Bae ◽  
Hyunsuk Lee ◽  
Duckhyeon Seo ◽  
Sangdu Yun ◽  
Jeonghyeon Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Grain Size ◽  
Shape Memory Alloy ◽  
Substrate Temperature ◽  
Shape Memory ◽  
High Speed ◽  
Alloy Thin Film ◽  
Bulk Alloys ◽  
Deposition Conditions

TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing to the small size of the grain. In this study, deposition conditions (growth rate, film thickness, and substrate temperature) affecting the grain size of thin films were investigated. The grain size of the thin film alloys was found to be most responsive to the substrate temperature.

scholarly journals Active Damping of Thin Film Shape Memory Alloy Devices

PAMM ◽  
2021 ◽  
Vol 20 (1) ◽  
Author(s):  
S. Ahmadi ◽  
K. Jacob ◽  
F. Wendler ◽  
A. Padhy ◽  
M. Kohl
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Active Damping

Extremely high pitting resistance of NiTi shape memory alloy thin film in simulated body fluids

2008 ◽  
Vol 62 (17-18) ◽  
pp. 2791-2794 ◽  
Author(s):  
T. Shahrabi ◽  
S. Sanjabi ◽  
E. Saebnoori ◽  
Z.H. Barber
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Body Fluids ◽  
Niti Shape Memory Alloy ◽  
Alloy Thin Film ◽  
Simulated Body Fluids
Sign in / Sign up

Export Citation Format

Share Document