Tem Assessment of Different Mechanisms Contributing to Stress Relaxation in Strained InGaAs/InAlAs Systems
Keyword(s):
ABSTRACTA study by Transmission Electron microscopy (TEM) of strained InGaAs/InAlAs systems on InP substrates is presented. The influence of the lattice mismatch, epilayer thickness and modulation of the lattice parameter on the morphology of the system is analyzed. A discussion of the strain relaxation mechanisms occurring for each growth morphology is also presented.
1989 ◽
Vol 4
(2)
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pp. 248-256
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1992 ◽
Vol 7
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pp. 1829-1838
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2020 ◽
Vol 55
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pp. 8123-8133
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