Characterization of Rapid Thermally Nitrided Titanium Films Contacting Silicided and Non-Silicided Junctions
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ABSTRACTIn the present work we have studied rapid thermally nitrided titanium films which contact self-aligned silicided titanium disilicide (TiSi2-salicided) and non-silicided junctions. We correlate electrical contact resistance data to SIMS results.
2012 ◽
Vol 92
(14)
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pp. 1764-1776
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2018 ◽
Vol 30
(32)
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pp. 325302
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2015 ◽
Vol 3
(20)
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pp. 10942-10948
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