Diamond Deposition by a Nonequilibrium Plasma Jet

1991 ◽  
Vol 250 ◽  
Author(s):  
D. G. Keil ◽  
H. F. Calcote ◽  
W. Felder
Keyword(s):  
Substrate Surface ◽  
Supersonic Nozzle ◽  
Supersonic Jet ◽  
Plasma Jet ◽  
Nonequilibrium Plasma ◽  
Hydrogen Atoms ◽  
Raman Spectrometry ◽  
Diamond Deposition ◽  
Laser Raman ◽  
Substrate Temperatures

AbstractA nonequilibrium plasma jet has been used to deposit diamond films on a number of substrates, including silicon, silicon nitride, alumina, and molybdenum. Hydrogen is passed through a glow discharge and expanded through a supersonic nozzle to produce a highly nonequilibrium jet. Methane is added downstream of the nozzle, where it mixes and reacts with the nonequilibrium concentration of hydrogen atoms. The resulting supersonic jet strikes the substrate surface producing a high quality (determined by laser Raman spectrometry) adherent diamond film. Because of the low jet temperature, substrate cooling is unnecessary. Diamond deposition rates have exceeded 2 mg/kWh and I μm/h averaged over 16 cm2 area; good quality films prepared at substrate temperatures below 600 K. have been

Properties of carbon films deposited by pulsed laser vaporization from pyrolytic graphite

1989 ◽  
Vol 4 (5) ◽  
pp. 1238-1242 ◽  
Author(s):  
A. P. Malshe ◽  
S. M. Chaudhari ◽  
S. M. Kanetkar ◽  
S. B. Ogale ◽  
S. V. Rajarshi ◽  
...  
Keyword(s):  
Substrate Temperature ◽  
Pyrolytic Graphite ◽  
Carbon Films ◽  
Laser Vaporization ◽  
Film Properties ◽  
Amorphous Carbon Films ◽  
Resistivity Measurements ◽  
Laser Raman ◽  
Quartz Substrates ◽  
Substrate Temperatures

Amorphous carbon films have been deposited on silicon 〈111〉 and quartz substrates by pulsed ruby laser vaporization from pyrolytic graphite. Depositions have been carried out at different substrate temperatures, and the properties of the deposited carbon films have been studied using IR and UV–VIS transmission, ellipsometry, and laser-Raman spectroscopies. Chemical and electrical resistivity measurements have also been performed. It is shown that the film properties depend critically on the substrate temperature and that at the substrate temperature of 50 °C films with substantial proportion of sp3 hybridized orbitals are obtained.

Control of substrate surface temperature in millisecond annealing technique using thermal plasma jet

2007 ◽  
Vol 515 (12) ◽  
pp. 4897-4900 ◽  
Author(s):  
T. Okada ◽  
S. Higashi ◽  
H. Kaku ◽  
N. Koba ◽  
H. Murakami ◽  
...  
Keyword(s):  
Surface Temperature ◽  
Thermal Plasma ◽  
Substrate Surface ◽  
Plasma Jet ◽  
Thermal Plasma Jet

Determination of Free Silicon in Sintered Silicon Nitride by Laser Raman Spectrometry

1989 ◽  
Vol 97 (1132) ◽  
pp. 1466-1470
Author(s):  
Atsushi CHINO ◽  
Hideo IWATA ◽  
Sirou TORIZUKA ◽  
Kazuya YABUTA
Keyword(s):  
Silicon Nitride ◽  
Raman Spectrometry ◽  
Laser Raman ◽  
Free Silicon ◽  
Sintered Silicon

scholarly journals О газоструйном методе осаждения наноструктурных пленок серебра

2019 ◽  
Vol 89 (6) ◽  
pp. 830
Author(s):  
Н.Ю. Быков ◽  
А.И. Сафонов ◽  
Д.В. Лещев ◽  
С.В. Старинский ◽  
А.В. Булгаков
Keyword(s):  
Substrate Surface ◽  
Supersonic Jet ◽  
Direct Simulation Monte Carlo ◽  
Gas Jet ◽  
Silver Clusters ◽  
Silicon Substrates ◽  
Silver Nanostructures ◽  
Carrier Gas ◽  
Silver Vapor ◽  
Background Gas

AbstractThe synthesis of thin silver films by the gas-jet deposition method is experimentally and theoretically studied. When the metal is deposited onto silicon substrates from a supersonic jet of silver vapor with a helium carrier gas, nanostructured films with a 3−30 nm size of nanostructures are obtained for a 1230−1380 K range of jet source temperatures. The data on Ag–He gas-jet dynamics when it is expanded into vacuum (velocity, temperature, concentration, flux of particles onto a substrate) depending on parameters at the source (vapor temperature, flow rate of a carrier gas) are obtained by the method of direct simulation Monte Carlo. The range of optimal helium flow rates, when the efficiency of a gas-jet source is maximal, is determined. It is established that the presence of a background gas in a deposition chamber at pressure higher than 1 Pa decreases the flow of particles onto a substrate, and a simple way of its evaluation is proposed. Conditions for formation of silver clusters in the jet are determined by using the simulation. It is shown that for experimental deposition regimes there are no clusters in the jet, and the observed silver nanostructures are formed on the substrate surface.

Boundary Layer Temperature Profile in Diamond CVD System Using Laser-Induced Fluorescence

1995 ◽  
Vol 416 ◽  
Author(s):  
Qingyu Wang ◽  
Jon L. Lindsay ◽  
David L. Hofeldt
Keyword(s):  
Boundary Layer ◽  
Temperature Profile ◽  
Population Distribution ◽  
Substrate Surface ◽  
Plasma Jet ◽  
Laser Induced Fluorescence ◽  
Diamond Growth ◽  
Oh Radicals ◽  
Measured Temperature ◽  
Gas Temperature

ABSTRACTThe gas temperature of a radio-frequency thermal plasma has been measured by laser-induced fluorescence along the axis of the plasma jet near the substrate surface. The temperature was determined from the rotational population distribution of OH radicals. From the measured temperature profile, the freestream temperature was found to be about 3400 K and the boundary layer thickness was determined to be about 1 mm. A numerical model including carbonhydrogen- argon kinetics was used to predict species concentrations near the surface of the substrate. The results indicate that all CHa radical concentrations increase with freestream temperature for temperatures between 2500-4000 K. Of the C1 radicals, methyl has the highest concentration in this range in our system, which is consistent with other reports that methyl is an important diamond growth species.

Studying of Plasma- Polymerized Pyrrole at Variable Gas Flow Rates Via Plasma Jet

2021 ◽  
Vol 19 (48) ◽  
pp. 44-51
Author(s):  
Saba Jawad Kadhem
Keyword(s):  
Flow Rate ◽  
Atmospheric Pressure ◽  
Gas Flow ◽  
Flow Characteristics ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Plasma Jet ◽  
Nonequilibrium Plasma ◽  
Nano Particles ◽  
Vis Spectroscopy

     In this manuscript has investigated the synthesis of plasma-polymerized pyrrole (C4H5N) nano-particles prepared by the proposed atmospheric pressure nonequilibrium plasma jet through the parametric studies, particularly gas flow rate (0.5, 1 and 1.5 L/min). The plasma jet which used operates with alternating voltage 7.5kv and frequency 28kHz. The plasma-flow characteristics were investigated based on optical emission spectroscopy (OES). UV-Vis spectroscopy was used to characterize the  oxidization  state for polypyrrole. The major absorption appears around 464.1, 449.7 and 435.3  nm at the three flow rate of argon gas. The chemical composition and structural properties of the contained samples which synthesized at 0.5 L/min as a argon flow rate were analyzed by scanning electron microscopy (SEM), Fourier transformation infrared spectroscopy (FTIR), Raman spectroscopy and X-ray diffraction (XRD). SEM point to a uniform distribution of polypyrrole (PPY) nanoparticles matrix. XRD technique showed a semicrystalline pattern for PPY)thin film. It is expected, that the high-quality plasma polymer grown by atmospheric pressure plasma jet method contributes to serving as conducting materials.

The Use of a Supersonic Jet of Gas Activated in a Microwave Discharge in Diamond Deposition

2021 ◽  
Vol 56 (1) ◽  
pp. 106-115
Author(s):  
A. A. Emel’yanov ◽  
M. Yu. Plotnikov ◽  
A. K. Rebrov ◽  
N. I. Timoshenko ◽  
I. B. Yudin
Keyword(s):  
Microwave Discharge ◽  
Supersonic Jet ◽  
Diamond Deposition
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