Formation of Titanium Disilicide by Electron Beam Irradiation Under Non Steady State Conditions

1983 ◽  
Vol 25 ◽  
Author(s):  
E A Maydell-Ondrusz ◽  
R E Harper ◽  
A Abid ◽  
P L F Hemment ◽  
K G Stephens
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Silicon Substrates ◽  
Beam Irradiation ◽  
Titanium Disilicide ◽  
X Ray ◽  
Nominal Thickness ◽  
Power Densities ◽  
Backscattering Analysis ◽  
Scanning Electron

ABSTRACTTitanium disilicide was formed by multiply-scanned electron beam irradiation of titanium films of nominal thickness 1200Å on silicon substrates. Samples were annealed at power densities of 2 to 52.5Wcm−2 using times in the range of 1 to a few hundreds seconds. Rutherford backscattering analysis was used to study the metal redistribution and to estimate the approximate compositions and thicknesses of the films. Compounds were identified by X-ray and electron diffraction. Sheet resistance was measured by the four probe technique and surface topography inspected by scanning electron microscopy.The silicide thickness achieved depends only on annealing time for power densities in the range of 20 to 50Wcm−2 and hence is independent of heating rate and peak temperature during the heating cycle.

Concept development of X-ray mass thickness detection for irradiated items upon electron beam irradiation processing

2018 ◽  
Vol 143 ◽  
pp. 8-13
Author(s):  
Huaili Qin ◽  
Guang Yang ◽  
Shan Kuang ◽  
Qiang Wang ◽  
Jingjing Liu ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Concept Development ◽  
Beam Irradiation ◽  
X Ray ◽  
Mass Thickness

Systematic Studies of Fullerene Derivative Electron Beam Resists

1999 ◽  
Vol 584 ◽  
Author(s):  
A. P. G. Robinson ◽  
R. E. Palmer ◽  
T. Tada ◽  
T. Kanayama ◽  
E. J. Shelley ◽  
...  
Keyword(s):  
Electron Beam ◽  
Dissolution Rate ◽  
Organic Solvents ◽  
Spin Coating ◽  
Electron Beam Irradiation ◽  
Fullerene Derivative ◽  
Silicon Substrates ◽  
Beam Irradiation ◽  
Negative Tone ◽  
20 Nm

AbstractWe report systematic studies of the response of C60 derivatives to electron beam irradiation. Films of fourteen different mono, tris and tetra adduct methanofullerene C60 derivatives were produced by spin coating on hydrogen terminated silicon substrates. Exposure of the films to a 20 keV electron beam substantially altered the dissolution rate of the derivative films in organic solvents such as monochlorobenzene. All of the derivatives exhibited negative tone resist behaviour with sensitivities between ∼ 8.5 × 10-4 and ∼ 4 × 10-3 C/cm2 107, much higher than that of C60. Features with widths of ∼ 20 nm were produced using these compounds, and the etch ratios of the compounds were found to be more than twice those of a standard novolac based resist (SAL601).

Surface structure, nanocrystallite and defects in (ZrTi)CN nanocomposite irradiated by electron beam

2021 ◽  
pp. 2150111
Author(s):  
M. Yu. Tashmetov ◽  
I. I. Yuldashova ◽  
N. B. Ismatov
Keyword(s):  
Electron Beam ◽  
Surface Structure ◽  
Electron Beam Irradiation ◽  
Rietveld Method ◽  
Nanocomposite Coating ◽  
Beam Irradiation ◽  
X Ray ◽  
Nanocrystallite Size ◽  
Atomic Force ◽  
Cubic Structure

Effect of 2 MeV electron beam at the current density 0.09 nA/cm2 on surface structure, nanocrystallite size of (ZrTi)CN nanocomposite coating on steel was investigated at Scanning Electron and Atomic Force microscopes, and also X-ray diffractometer. Using the Rietveld method, two structure phases were indentified in the pristine samples: (ZrTi)(CN)-cubic (space group Fm-3m) and TiC — trigonal (sp.gr.R-3m). Electron beam irradiation to the fluency of [Formula: see text] electron/cm2 resulted in the phase transition of TiC from trigonal (sp.gr.R-3m) to cubic structure (sp.gr.Fm-3m). Besides, nanocrystallite size and shape have changed after the fluency [Formula: see text] electron/cm2. The lattice parameters have increased up to [Formula: see text] electron/cm2 fluence and the nanorcrystallite size of nanocomposite was enlarged 26%, which was attributed to generation of defects.

scholarly journals Electron Beam Irradiation Induced Multiwalled Carbon Nanotubes Fusion inside SEM

Scanning ◽  
2017 ◽  
Vol 2017 ◽  
pp. 1-8 ◽  
Author(s):  
Daming Shen ◽  
Donglei Chen ◽  
Zhan Yang ◽  
Huicong Liu ◽  
Tao Chen ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Electron Beam ◽  
Electron Microscope ◽  
Multiwalled Carbon Nanotubes ◽  
Electron Beam Irradiation ◽  
Tensile Force ◽  
Beam Irradiation ◽  
Multiwalled Carbon ◽  
Near Future ◽  
Scanning Electron

This paper reported a method of multiwalled carbon nanotubes (MWCNTs) fusion inside a scanning electron microscope (SEM). A CNT was picked up by nanorobotics manipulator system which was constructed in SEM with 21 DOFs and 1 nm resolution. The CNT was picked up and placed on two manipulators. The tensile force was 140 nN when the CNT was pulled into two parts. Then, two parts of the CNT were connected to each other by two manipulators. The adhered force between two parts was measured to be about 20 nN. When the two parts of CNT were connected again, the contact area was fused by focused electron beam irradiation for 3 minutes. The tensile force of the junction was measured to be about 100 nN. However, after fusion, the tensile force was five times larger than the tensile force connected only by van der Waals force. This force was 70 percent of the tensile force before pulling out of CNTs. The results revealed that the electron beam irradiation was a promising method for CNT fusion. We hope this technology will be applied to nanoelectronics in the near future.

Radiotherapy in the Management of Keloids Clinical Experience with Electron Beam Irradiation and Comparison with X-Ray Therapy

2002 ◽  
Vol 178 (6) ◽  
pp. 330-335 ◽  
Author(s):  
Mohammad Maarouf ◽  
Ursula Schleicher ◽  
Axel Schmachtenberg ◽  
Jürgen Ammon
Keyword(s):  
Electron Beam ◽  
Clinical Experience ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
X Ray

Comparison of the Effect of X-ray and Electron Beam Irradiation on the Microbiological Quality of Foodstuffs

LWT ◽  
1999 ◽  
Vol 32 (6) ◽  
pp. 372-376 ◽  
Author(s):  
S. Van Calenberg ◽  
O. Van Cleemput ◽  
W. Mondelaers ◽  
A. Huyghebaert
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Microbiological Quality ◽  
Beam Irradiation ◽  
X Ray

Nanoscale controlled Li-insertion reaction induced by scanning electron-beam irradiation in a Li4Ti5O12 electrode material for lithium-ion batteries

2017 ◽  
Vol 19 (18) ◽  
pp. 11581-11587 ◽  
Author(s):  
Mitsunori Kitta ◽  
Masanori Kohyama
Keyword(s):  
Electron Beam ◽  
Scanning Transmission Electron Microscopy ◽  
Electron Beam Irradiation ◽  
Lithium Ion ◽  
Insertion Reaction ◽  
Beam Irradiation ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
New Type ◽  
Scanning Electron

Electron beam of scanning transmission electron microscopy can induce nanoscale-controlled Li-insertion in Li4Ti5O12 electrode, which is significant as a new type of electron beam-assisted chemical reactions for local structural and property modifications.

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