X-ray Microanalysis and High Resolution Imaging of Ge-Au-Ni Metal Layers on Gallium Arsenide

1983 ◽  
Vol 25 ◽  
Author(s):  
D. Fathy ◽  
O. L. Krivanek ◽  
J. C. H. Spence ◽  
W. M. Paulson

ABSTRACTOhmic contacts to GaAs have been studied using a high resolution TEM, an SEM and a STEM with an energy dispersive x-ray attachment. Two different deposition sequences of the constituent Au-Ge-Ni metals yielded specific contact resistivities that varied by one order of magnitude. Crosssection images of the interface between the GaAs and the metal Au-Ge-Ni layers following alloying showed protrusions at the interface. Contacts with low specific resistivities showed deeper protrusion and also significantly more Ge and Ni in the GaAs.

Author(s):  
J.G. Bakker ◽  
P.E.S. Asselbergs

High resolution TEM imaging has been well established as superb technique for obtaining structural information about materials on an atomic scale. Trends in equipment for high resolution imaging have progressed to the stage where point resolutions below 2 Å can be obtained at 200 kV. This paper describes such a new objective lens for the Philips CM20 Transmission Electron Microscope.In designing a new objective lens, several parameters have to be taken into account. Not only should the coefficient of spherical aberration of the objective lens be minimised, the lens should also allow considerable tilting of the specimen in two directions. The lens should be compatible with X-ray analysis. And last but not least, the design of lens must ensure that the heat transfer of the lens to the specimen environment is minimised.


2012 ◽  
Vol 329 ◽  
pp. 26-31 ◽  
Author(s):  
H.M. Hertz ◽  
M. Bertilson ◽  
O. v. Hofsten ◽  
S.-C. Gleber ◽  
J. Sedlmair ◽  
...  

2012 ◽  
Vol 18 (S2) ◽  
pp. 390-391
Author(s):  
R. Gauvin ◽  
P. Michaud ◽  
N. Brodusch ◽  
M.L. Trudeau

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.


2010 ◽  
Vol 2010 ◽  
pp. 1-10 ◽  
Author(s):  
Michael J. Haugh ◽  
Richard Stewart

This paper describes the design, crystal selection, and crystal testing for a vertical Johann spectrometer operating in the 13 keV range to measure ion Doppler broadening in inertial confinement plasmas. The spectrometer is designed to use thin, curved, mica crystals to achieve a resolving power of E/ΔE>2000. A number of natural mica crystals were screened for flatness and X-ray diffraction width to find samples of sufficient perfection for use in the instrument. Procedures to select and mount high quality mica samples are discussed. A diode-type X-ray source coupled to a dual goniometer arrangement was used to measure the crystal reflectivity curve. A procedure was developed for evaluating the goniometer performance using a set of diffraction grade Si crystals. This goniometer system was invaluable for identifying the best original crystals for further use and developing the techniques to select satisfactory curved crystals for the spectrometer.


2020 ◽  
Author(s):  
Jeffrey Fein ◽  
David Ampleford ◽  
J. Vogel ◽  
B. Kozioziemski ◽  
C. Walton ◽  
...  

Author(s):  
Y. Wang ◽  
C. Jacobsen

Contact x-ray microscopy or microradiography offers a simple-to-use approach to high resolution imaging of wet, thick biological specimens. One great advantage of the technique is that it can be usedwith short pulse, incoherent x-ray sources such as laser produced plasmas, and polymer replicas or direct AFM viewing are promising new approaches to image readout. However, it has long been pointed outthat issues such as diffraction blurring over finite sample-to-resist spacing, shot noise in the exposure, and sidecutting during development must be considered in evaluating contact x-ray microradiographs.We present here the results of numerical modelling of contact x-ray microscopy using photoresists. We assume a phantom consisting of protein rods and balls of different diameters, all embedded in a water layer. We assume that the x-ray exposure is provided by a black body source with temperature kBT = 100 eV (such as in a laser-produced plasma), and that the black bodyspectrum is then modified by x-ray transmission in 0.1/μm of Al2O3, 0.1μm of Si3N4, and 5μm of water.


1976 ◽  
Vol 47 (3) ◽  
pp. 282-290 ◽  
Author(s):  
E. Kellogg ◽  
P. Henry ◽  
S. Murray ◽  
L. Van Speybroeck ◽  
P. Bjorkholm

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