GaAs Surface Passivation by InGaP Thin Film
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ABSTRACTInGaP thin films are evaluated as wide-bandgap materials for GaAs surface passivation. A 200-Å InGaP thin film increases GaAs photoluminescence intensity 25-fold and enables Schottky barrier heights of more than 0.6 eV on n-type GaAs layers with a carrier concentration of 3×1018 /cm3. These effects persist after annealing at 800 °C for 10 min. InGaP thin films are thus suitable as surface passivation films for high-performance GaAs-MESFETs.
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2018 ◽
Vol 6
(37)
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pp. 9981-9989
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2020 ◽
Vol 20
(11)
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pp. 6659-6664
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2016 ◽
Vol 4
(10)
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pp. 2072-2078
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2007 ◽
Vol 546-549
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pp. 2137-2142
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