X-Ray Reflectivity Measurements of Surface Roughness Using Energy Dispersive Detection
Keyword(s):
X Ray
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ABSTRACTWe describe a new technique for measuring X-ray reflectivity using energy dispersive X-ray detection. The benefits of this method are the use of a fixed scattering angle and parallel detection of all energies simultaneously. These advantages make the technique more compatible with growth chambers and useable with laboratory X-ray sources. We find excellent agreement between the calculated Fresnel reflectivity and the reflectivity obtained from a smooth Ge (001) surface. Reflectivities obtained during 500 eV Xe ion bombardment of Ge surfaces demonstrate the sensitivity of the technique to be better than 1 Å.
1996 ◽
Vol 52
(10)
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pp. 1401