Design and Characteristics of a Novel Close-Spaced Reactor for Organometallic Epitaxy

1990 ◽  
Vol 204 ◽  
Author(s):  
P.B. Chinoy ◽  
S.K. Ghandhi

ABSTRACTA novel, close-spaced, inverted, stagnation flow, organometallic vapor phase epitaxy (OMVPE) reactor has been designed and fabricated for achieving high deposition efficiency and good large-area uniformity for solar cell applications. A computer model for this reactor, which is based on the conservation of mass, momentum, energy and species equations, has been used for predicting its operating characteristics. Due to the close spacing between the nozzle and susceptor, extensive measurements of the nozzle temperature were carried out for different reactor conditions and compared with simulation results. The maximum nozzle temperature was about 110°C showing the feasibility of GaAs growth from trimethylgallium and arsine. GaAs epitaxial layers were grown at different susceptor-nozzle distances, gas flow rates, reactor pressures and susceptor temperatures. The morphology, electrical properties and thickness uniformity of the layers were found to be of an acceptable quality. The measured and computed deposition efficiencies were found to be independent of reactor pressure and increasing with decreasing gas flow rates. The highest gallium deposition efficiency achieved was about 42%.

2004 ◽  
Vol 831 ◽  
Author(s):  
E. Berkman ◽  
R. Collazo ◽  
R. Schlesser ◽  
Z. Sitar

ABSTRACTGallium nitride (GaN) films were grown on (0001) sapphire substrates at 1050°C by controlled evaporation of gallium (Ga) metal and reaction with ammonia (NH3) at a total reactor pressure of 800 Torr. Pure nitrogen (N2) was flowed directly above the molten Ga source to prevented direct reaction between the molten Ga and ammonia, which causes Ga spattering and GaN crust formation. At the same time, this substantially enhanced the Ga transport to the substrate. A simple mass-transport model based on total reactor pressure, gas flow rates and source temperature was developed and verified. The theoretical calculations and growth rate measurements at different ammonia flow rates and reactor pressures showed that the maximum growth rate was controlled by transport of both Ga species and reactive ammonia to the substrate surface.


Author(s):  
Derek Endres ◽  
Sandip Mazumder

Particles of aluminum nitride (AlN) have been observed to form during epitaxial growth of AlN films by metal organic chemical vapor deposition (MOCVD). Particle formation is undesirable because particles do not contribute to the film growth, and are detrimental to the hydraulic system of the reactor. It is believed that particle formation is triggered by adducts that are formed when the group-III precursor, namely tri-methyl-aluminum (TMAl), and the group-V precursor, namely ammonia (NH3), come in direct contact in the gas-phase. Thus, one way to eliminate particle formation is to prevent the group-III and the group-V precursors from coming in direct contact at all in the gas-phase. In this article, pulsing of TMAl and NH3 is numerically investigated as a means to reduce AlN particle formation. The investigations are conducted using computational fluid dynamics (CFD) analysis with the inclusion of detailed chemical reaction mechanisms both in the gas-phase and at the surface. The CFD code is first validated for steady-state (non-pulsed) MOCVD of AlN against published data. Subsequently, it is exercised for pulsed MOCVD with various pulse widths, precursor gas flow rates, wafer temperature, and reactor pressure. It is found that in order to significantly reduce particle formation, the group-III and group-V precursors need to be separated by a carrier gas pulse, and the carrier gas pulse should be at least 5–6 times as long as the precursor gas pulses. The studies also reveal that with the same time-averaged precursor gas flow rates as steady injection (non-pulsed) conditions, pulsed MOCVD can result in higher film growth rates because the precursors are incorporated into the film, rather than being wasted as particles. The improvement in growth rate was noted for both horizontal and vertical reactors, and was found to be most pronounced for intermediate wafer temperature and intermediate reactor pressure.


2011 ◽  
Vol 39 (6) ◽  
pp. 1103-1110 ◽  
Author(s):  
J. E. Ritchie ◽  
A. B. Williams ◽  
C. Gerard ◽  
H. Hockey

In this study, we evaluated the performance of a humidified nasal high-flow system (Optiflow™, Fisher and Paykel Healthcare) by measuring delivered FiO2 and airway pressures. Oxygraphy, capnography and measurement of airway pressures were performed through a hypopharyngeal catheter in healthy volunteers receiving Optiflow™ humidified nasal high flow therapy at rest and with exercise. The study was conducted in a non-clinical experimental setting. Ten healthy volunteers completed the study after giving informed written consent. Participants received a delivered oxygen fraction of 0.60 with gas flow rates of 10, 20, 30, 40 and 50 l/minute in random order. FiO2, FEO2, FECO2 and airway pressures were measured. Calculation of FiO2 from FEO2 and FECO2 was later performed. Calculated FiO2 approached 0.60 as gas flow rates increased above 30 l/minute during nose breathing at rest. High peak inspiratory flow rates with exercise were associated with increased air entrainment. Hypopharyngeal pressure increased with increasing delivered gas flow rate. At 50 l/minute the system delivered a mean airway pressure of up to 7.1 cmH2O. We believe that the high gas flow rates delivered by this system enable an accurate inspired oxygen fraction to be delivered. The positive mean airway pressure created by the high flow increases the efficacy of this system and may serve as a bridge to formal positive pressure systems.


Author(s):  
Z. Insepov ◽  
R. J. Miller

Propagation of Rayleigh traveling waves from a gas on a nanotube surface activates a macroscopic flow of the gas (or gases) that depends critically on the atomic mass of the gas. Our molecular dynamics simulations show that the surface waves are capable of actuating significant macroscopic flows of atomic and molecular hydrogen, helium, and a mixture of both gases both inside and outside carbon nanotubes (CNT). In addition, our simulations predict a new “nanoseparation” effect when a nanotube is filled with a mixture of two gases with different masses or placed inside a volume filled with a mixture of several gases with different masses. The mass selectivity of the nanopumping can be used to develop a highly selective filter for various gases. Gas flow rates, pumping, and separation efficiencies were calculated at various wave frequencies and phase velocities of the surface waves. The nanopumping effect was analyzed for its applicability to actuate nanofluids into fuel cells through carbon nanotubes.


1974 ◽  
Vol 14 (01) ◽  
pp. 44-54 ◽  
Author(s):  
Gary W. Rosenwald ◽  
Don W. Green

Abstract This paper presents a mathematical modeling procedure for determining the optimum locations of procedure for determining the optimum locations of wells in an underground reservoir. It is assumed that there is a specified production-demand vs time relationship for the reservoir under study. Several possible sites for new wells are also designated. possible sites for new wells are also designated. The well optimization technique will then select, from among those wellsites available, the locations of a specified number of wells and determine the proper sequencing of flow rates from Those wells so proper sequencing of flow rates from Those wells so that the difference between the production-demand curve and the flow curve actually attained is minimized. The method uses a branch-and-bound mixed-integer program (BBMIP) in conjunction with a mathematical reservoir model. The calculation with the BBMIP is dependent upon the application of superposition to the results from the mathematical reservoir model.This technique is applied to two different types of reservoirs. In the first, it is used for locating wells in a hypothetical groundwater system, which is described by a linear mathematical model. The second application of the method is to a nonlinear problem, a gas storage reservoir. A single-phase problem, a gas storage reservoir. A single-phase gas reservoir mathematical model is used for this purpose. Because of the nonlinearity of gas flow, purpose. Because of the nonlinearity of gas flow, superposition is not strictly applicable and the technique is only approximate. Introduction For many years, members of the petroleum industry and those concerned with groundwater hydrology have been developing mathematical reservoir modeling techniques. Through multiple runs of a reservoir simulator, various production schemes or development possibilities may be evaluated and their relative merits may be considered; i.e., reservoir simulators can be used to "optimize" reservoir development and production. Formal optimization techniques offer potential savings in the time and costs of making reservoir calculations compared with the generally used trial-and-error approach and, under proper conditions, can assure that the calculations will lead to a true optimum.This work is an extension of the application of models to the optimization of reservoir development. Given a reservoir, a designated production demand for the reservoir, and a number of possible sites for wells, the problem is to determine which of those sites would be the best locations for a specified number of new wells so that the production-demand curve is met as closely as possible. Normally, fewer wells are to be drilled than there are sites available. Thus, the question is, given n possible locations, at which of those locations should n wells be drilled, where n is less than n? A second problem, that of determining the optimum relative problem, that of determining the optimum relative flow rates of present and future wells is also considered. The problem is attacked through the simultaneous use of a reservoir simulator and a mixed-integer programming technique.There have been several reported studies concerned with be use of mathematical models to select new wells in gas storage or producing fields. Generally, the approach has been to use a trial-and-error method in which different well locations are assumed. A mathematical model is applied to simulate reservoir behavior under the different postulated conditions, and then the alternatives are postulated conditions, and then the alternatives are compared. Methods that evaluate every potential site have also been considered.Henderson et al. used a trial-and-error procedure with a mathematical model to locate new wells in an existing gas storage reservoir. At the same time they searched for the operational stratagem that would yield the desired withdrawal rates. In the reservoir that they studied, they found that the best results were obtained by locating new wells in the low-deliverability parts of the reservoir, attempting to maximize the distance between wells, and turning the wells on in groups, with the low-delivery wells turned on first.Coats suggested a multiple trial method for determining well locations for a producing field. SPEJ P. 44


Fuel ◽  
2022 ◽  
Vol 308 ◽  
pp. 121872
Author(s):  
Abouzar Rajabi Behesht Abad ◽  
Hamzeh Ghorbani ◽  
Nima Mohamadian ◽  
Shadfar Davoodi ◽  
Mohammad Mehrad ◽  
...  

1959 ◽  
Vol 14 (5) ◽  
pp. 753-759 ◽  
Author(s):  
J. B. West ◽  
P. Hugh-Jones

Patterns of gas flow in the upper bronchial tree have been studied by observing the flow of dye and different gases through a lung cast, and by measurements made on open-chested dogs and on human beings at bronchoscopy. Flow is completely laminar throughout the bronchial tree at low expiratory flow rates (up to 10 l/min.) and completely turbulent, proximal to the segmental bronchi, at high flow rates (80 l/min.). Both at low and high expiratory flow rates, gas from segmental bronchi was not uniformly mixed in the lobar or main bronchi which they supplied. The composition of a catheter sample in these airways would therefore not be representative of the alveolar gas in the corresponding lobe or lung unless the alveolar gas in all areas distal to the sampling tube was homogeneous. Penetration of the left upper lobe bronchus by gas from the lower lobe was demonstrated in the model and a normal subject at bronchoscopy. Submitted on September 3, 1958


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