The Formation and Morphology of Stress Induced Voids in Thin Narrow Aluminum Lines

1990 ◽  
Vol 203 ◽  
Author(s):  
C. A. Paszkiet ◽  
M. A. Korhonen ◽  
Che-Yu Li
Keyword(s):  
Heat Treatment ◽  
Silicon Nitride ◽  
Grain Boundaries ◽  
Room Temperature ◽  
Void Nucleation ◽  
Aluminum Film ◽  
Passivation Layer ◽  
Silicon Substrates ◽  
Heat Treated

ABSTRACTThin, narrow, lines were reactive ion etched from a highly textured aluminum film deposited on (100) silicon substrates; some arrays of lines were covered with a passivation layer of silicon nitride. Passivated and unpassivated lines were heat treated at 400°C.Voids were present in nitride covered lines which were aged for over three months at room temperature as well as in nitride covered lines examined immediately after heat treatment. Voids were not visible in bare, heat treated lines. Void nucleation occurred at the points of intersection of grain boundaries with line edges and growth appeared to follow grain boundaries.

X-Ray Stress Studies of Passivated and Unpassivated Narrow Aluminum Metallizations

1990 ◽  
Vol 188 ◽  
Author(s):  
C. A. Paszkiet ◽  
M. A. Korhonen ◽  
Che-Yu Li
Keyword(s):  
Heat Treatment ◽  
Room Temperature ◽  
Nitrogen Atmosphere ◽  
Passivation Layer ◽  
Apparent Stress ◽  
X Ray Diffraction ◽  
X Ray ◽  
Stress Studies ◽  
Heat Treated ◽  
Measurement Period

ABSTRACTStresses in thin narrow textured metal lines were measured using x-ray diffraction techniques. Arrays of 1.5μm wide, 0.32μm thick aluminum lines, both with and without a 0.32μm thick SiNx passivation layer, were heat-treated at 400°C in a hydrogen/nitrogen atmosphere. After heat treatment the lines were examined periodically using chromium radiation to monitor the relaxation of the stress developed during heat treatment. The apparent stress in both the passivated and unpassivated lines relaxed significantly over the measurement period of three days. The higher stresses present in the passivated lines may be partially responsible for the voids which were found after aging at room temperature.

Vacuum Heat Treatment of MgO -Densified Pressureless Sintered Silicon Nitride Ceramics

2007 ◽  
Vol 554 ◽  
pp. 107-112 ◽  
Author(s):  
V. Demir ◽  
Derek P. Thompson
Keyword(s):  
Heat Treatment ◽  
Silicon Nitride ◽  
Pressureless Sintering ◽  
Vacuum Heat Treatment ◽  
Sem Images ◽  
Edx Analysis ◽  
Heat Treated ◽  
Nitride Ceramics ◽  
Different Temperatures ◽  
Sintered Silicon

Silicon nitride samples were pressureless sintered with up to 5 w/o MgO to give densities in the range 98-99% of theoretical. After pressureless sintering, selected samples were placed in a vacuum heat treatment furnace surrounded by a carbon bed in a carbon crucible at a pressure of less than 4x10-4 mbar, and vacuum heat treated at different temperatures and times to remove grainboundary glass. The results showed that this was substantially achieved at 1575oC for 3h and that increasing the time to 5 hours gave still further improvement. SEM images, EDX analysis and oxidation tests provided additional evidence for the removal of Mg from the samples.

Enhancement of Long-Wavelength Photoluminescence Due to Heat-Treatment in Si-Doped GaAs

1992 ◽  
Vol 262 ◽  
Author(s):  
M. Suezawa ◽  
A. Kasuya ◽  
Y. Nishina ◽  
K. Sumino
Keyword(s):  
Heat Treatment ◽  
Radiative Recombination ◽  
Room Temperature ◽  
Excitation Spectra ◽  
Long Wavelength ◽  
Heat Treated ◽  
Intense Luminescence ◽  
Si Doped

ABSTRACTHighly officient radiative recombination even at room temperature was found at a wavelength of about 1.3 μm in heat-treated Si-doped GaAs. The range of Si concentrations and the condition of heat-treatment to yield this intense luminescence were determined. Excitation spectra of the PL lines suggest that such PL lines are related to pairs of Si-donor and Si- acceptor and such pairs combined with gallium vacancies.

Microstructure of Silicon Nitride Fibers at Elevated Temperatures

2017 ◽  
Vol 898 ◽  
pp. 1705-1711 ◽  
Author(s):  
Jun Zhe Li ◽  
Xun Sun ◽  
Hai Tao Liu ◽  
Hai Feng Cheng ◽  
Xiao Shan Zhang
Keyword(s):  
Heat Treatment ◽  
Silicon Nitride ◽  
Amorphous Silicon ◽  
Treatment Process ◽  
Elevated Temperatures ◽  
Heat Treatment Process ◽  
Amorphous Silicon Nitride ◽  
Heat Treated ◽  
Strength Retention ◽  
Heat Treated Temperature

The composition and microstructure of silicon nitride fibers after heat-treatment at elevated temperatures were investigated by XRD, NMR, XPS, SEM and TEM analyses. The results show that as-received fibers consisted of amorphous silicon nitride, and a little Si-C-O structure. During heat-treatment process, α-Si3N4 and β-Si3N4 formed resulting from the crystallization of amorphous silicon nitride, and the formation of β-SiC derived from the decomposition of Si-C-O structure. As heat-treated temperature increased from 1400oC to 1600oC, the above phenomenon become obvious, indicating that the fiber would possess high serving life with serving temperature lower than 1400oC. The tensile strength of fibers stays stable when heat-treated temperature was below 1200oC, while the strength retention of fibers sharply decreased to 50% after heat-treatment at 1400°C.

scholarly journals Влияние термообработки на электрические характеристики полуизолирующих слоев, полученных с помощью облучения n-SiC высокоэнергетическими ионами аргона

2018 ◽  
Vol 44 (6) ◽  
pp. 11 ◽  
Author(s):  
П.А. Иванов ◽  
А.С. Потапов ◽  
М.Ф. Кудояров ◽  
М.А. Козловский ◽  
Т.П. Самсонова
Keyword(s):  
Heat Treatment ◽  
Silicon Carbide ◽  
Room Temperature ◽  
High Energy ◽  
Room Temperature Resistivity ◽  
Electrical Characteristics ◽  
Near Surface ◽  
Heat Treated ◽  
Argon Ions ◽  
Temperature Resistivity

AbstractIrradiation of crystalline n -type silicon carbide ( n -SiC) with high-energy (53-MeV) argon ions was used to create near-surface semi-insulating ( i -SiC) layers. The influence of subsequent heat treatment on the electrical characteristics of i -SiC layers has been studied. The most high-ohmic ion-irradiated i -SiC layers with room-temperature resistivity of no less than 1.6 × 10^13 Ω cm were obtained upon the heat treatment at 600°C, whereas the resistivity of such layers heat-treated at 230°C was about 5 × 10^7 Ω cm.

scholarly journals Hydrogen Detection with SAW Polymer/Quantum Dots Sensitive Films

Sensors ◽  
2019 ◽  
Vol 19 (20) ◽  
pp. 4481 ◽  
Author(s):  
Izabela Constantinoiu ◽  
Cristian Viespe
Keyword(s):  
Heat Treatment ◽  
Quantum Dots ◽  
Room Temperature ◽  
Limit Of Detection ◽  
Composite Films ◽  
High Specific Surface Area ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Heat Treated ◽  
Gas Molecules

Regarding the use of hydrogen as a fuel, it is necessary to measure its concentration in air at room temperature. In this paper, sensitive composite films have been developed for surface acoustic wave (SAW) sensors, using quantum dots (QDs) and polymers. Si/SiO2 QDs were used due to having a high specific surface area, which considerably improves the sensitivity of the sensors compared to those that only have a polymer. Si/SiO2 QDs were obtained by laser ablation and analyzed by X-ray diffraction and transmission electron microscopy (TEM). Two types of polymers were used: polydimethylsiloxane (PDMS) and polymethylmethacrylate (PMMA). Polymer and polymer with QDs compositions were deposited on the sensor substrate by drop casting. A heat treatment was performed on the films at 80 °C with a thermal dwell of two hours. The sensors obtained were tested at different hydrogen concentrations at room temperature. A limit of detection (LOD) of 452 ppm was obtained by the sensor with PDMS and Si/SiO2 QDs, which was heat treated. The results demonstrated the potential of using QDs to improve the sensitivity of the SAW sensors and to achieve a heat treatment that increases its adsorption capacity of the gas molecules.

Platinum-TiO2 (Rutile) Substrate Interaction During Cyclic Oxidation-Reduction Heat-Treatment

1981 ◽  
Vol 39 ◽  
pp. 72-73
Author(s):  
S. Shinozaki ◽  
W. T. Donlon ◽  
A. H. Meitzler
Keyword(s):  
Heat Treatment ◽  
Room Temperature ◽  
Treatment Procedure ◽  
Substrate Interaction ◽  
Reducing Atmosphere ◽  
Oxidation Reduction ◽  
Heat Treated ◽  
Pt Electrodes ◽  
The Matrix ◽  
Tio2 Rutile

When polycrystalline TiO2 (rutile) pellets (∼1mm in thickness and ∼3 mm in diameter), dispersed with Pt particles to act as a catalyst, were heat-treated under certain conditions involving an applied electric field, new unusual microstructures were formed. The heat-treatment procedure was, as follows: 1) apply 1 volt dc field between two Pt electrodes inbedded into the pellet, 2) heat the sample to 750°C and begin cycling the sample between oxydizing (4% O2 in N2) and reducing (2% CO in N2) atmospheres at a rate of several cycles per hour, 3) lower the temperature to 600°C while continually cycling (200 cycle), and, 4) cool the sample to room temperature under the reducing atmosphere (1). The pellet was ion milled to a proper electron transparency and examined by means of a Siemens EM102 and a Philips EM400 TEM-STEM microscope.Some TiO2 grains in this sample exhibited no resolvable defect structure, except that the matrix appeared to be strained due to small defects (Fig. la).

THE EFFECT OF LOW TEMPERATURES UPON THE IMPACT RESISTANCE OF STEEL CASTINGS

1930 ◽  
Vol 2 (5) ◽  
pp. 327-340
Author(s):  
R. W. Moffatt
Keyword(s):  
Heat Treatment ◽  
Low Temperatures ◽  
Room Temperature ◽  
Freezing Point ◽  
High Carbon Steel ◽  
Impact Resistance ◽  
Nickel Steel ◽  
Heat Treated ◽  
Steel Castings ◽  
The Impact

The investigation deals with the effect of low temperatures on the impact resistance of steel castings and forgings. Low, medium and high carbon steel castings and a few alloys of vanadium, nickel, and vanadium-nickel steel castings were examined. The metals were subjected to low temperatures, both before and after heat treatment. The temperatures for the tests varied from room temperatures to temperatures well below 0° F., so as to extend below the ordinary atmospheric range of temperatures found in northern climates.It was found that the impact resistances of the metals decreased for temperatures below the freezing point. For specimens, not heat treated, the impact resistance at − 40° F. may be only one-third to one-half of that at room temperature. Heat treatment increases the impact resistance at room temperatures and temperatures below the freezing point. The impact resistance at − 40° F. for the heat-treated metal compared favorably with the impact resistance of the untreated metal at room temperature, 68° F. Heat treatment may slightly lower the yield point and the ultimate tensile strength, but it increases the ductility and the impact resistance of the metal. By proper heat treatment of steel castings the impact resistance at − 40° F. may be brought over 300% higher than that of the untreated metal at that temperature.

IN-SITU Analysis Of The Microstructure of Thermally Treated Thin Copper Films

1993 ◽  
Vol 309 ◽  
Author(s):  
J. Nucci ◽  
H. Neves ◽  
Y. Shacham ◽  
E. Eisenbraun ◽  
B. Zheng ◽  
...  
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Room Temperature ◽  
Thermal Evolution ◽  
Electron Beam Evaporation ◽  
Copper Films ◽  
Tem Analysis ◽  
Heat Treated ◽  
Baseline Information

AbstractCopper thin films were deposited by sputtering, electron beam evaporation, and electroless plating onto nitride membranes for TEM analysis. The samples were heat treated in-situ from room temperature to 600 °C for structural and chemical analysis. The as-deposited and heat treated microstructures were investigated. Orientation changes with heat treatment and reactions among the sample layers were analyzed by electron diffraction. This work provides baseline information for a study of the thermal evolution of copper lines.

Investigation on the Strain Behaviour of a Precipitation-Hardenable Aluminium Alloy through a Temperature Gradient Based Heat Treatment

2015 ◽  
Vol 639 ◽  
pp. 361-368 ◽  
Author(s):  
Gabriella di Michele ◽  
Pasquale Guglielmi ◽  
Gianfranco Palumbo ◽  
Donato Sorgente
Keyword(s):  
Heat Treatment ◽  
Temperature Gradient ◽  
Aluminium Alloy ◽  
Room Temperature ◽  
Tensile Tests ◽  
Gauge Length ◽  
Image Correlation ◽  
Experimental Campaign ◽  
Strain Behaviour ◽  
Heat Treated

In this work the strain behaviour of the heat-treated 6xxx series aluminium alloy AC170PX is investigated by a not conventional approach. Thanks to the low density combined with good mechanical properties, this aluminium alloy is often adopted for automotive applications. Despite these advantages, its formability at room temperature is low. In order to overcome this limit, a distribution of the material properties can be achieved by a local heat treatment (Tailored Heat Treated Blanks). In this context, to evaluate the effects of those parameters mainly affecting the precipitation hardening (aging temperature and aging time), a first experimental campaign was conducted using conventional furnace heat treatment in different conditions . Tensile tests were run with the aim of determining the flow and the aging curves of the heat treated specimens. Starting from these results, a not uniform heat treatment was designed using a Gleeble physical simulator Heat treatments based on a temperature gradient along the sample were performed. Then, tensile tests of the so heated specimens were carried out at room temperature. Through a digital image correlation system both the distribution and the evolution of the strain along the gauge length of the specimen were analysed in order to obtain the hardening/softening working conditions related to a specific heating cycle. These results were validated by the comparison with the data obtained from the first experimental campaign.

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