Internal Stresses and Adhesion Properties of Film/Substrate Interfaces
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ABSTRACTThe evolution of internal stresses in Tungsten films deposited on Silicon substrates submitted to external stresses is discussed here. The stresses are estimated and measured by theoretical and experimental methods. The discussion of the internal stress evolution is shown to be dependent of the film/substrate interfaces, and of the loss of adhesion inducing stress relaxation.
2004 ◽
Vol 50
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pp. 733-737
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2012 ◽
Vol 706-709
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pp. 1607-1611
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2017 ◽
Vol 25
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pp. 125-136
1975 ◽
Vol 3
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pp. 287-299
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1992 ◽
Vol 43
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pp. 667-670
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2010 ◽
Vol 18
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pp. 025003
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