Investigation of Texture and Stress in Undoped Polysilicon Films

1990 ◽  
Vol 182 ◽  
Author(s):  
J. Huang ◽  
P. Krulevitch ◽  
G.C. Johnson ◽  
R.T. Howe ◽  
H.R. Wenk
Keyword(s):  
Quantitative Description ◽  
Orientation Distribution ◽  
Process Conditions ◽  
Deposition Condition ◽  
X Ray Diffraction ◽  
Thermal Oxide ◽  
Pole Figures ◽  
Polysilicon Films ◽  
Curvature Measurements ◽  
Reflection Geometry

AbstractUndoped LPCVD polysilicon films deposited on thermal oxide and prepared under various process conditions have been investigated for their texture and stress characteristics. Pole figures measured by X-ray diffraction in reflection geometry were used to determine the orientation. distribution function which provides a quantitative description of the texture. Stresses were determined using wafer curvature measurements. Both texture and stress show substantial variation with deposition condition. Textures typically exhibit axial symmetry and appear to be correlated with the sign and magnitude of the stress. Under certain deposition conditions, the stress varies considerably along the tube, with the stress in the wafers at the upstream end being tensile and at the downstream end being compressive.

Textures Applied to Mechanical Processing Technology Assessment in Ancient Bronze

2005 ◽  
Vol 495-497 ◽  
pp. 719-724
Author(s):  
R.E. Bolmaro ◽  
B. Molinas ◽  
E. Sentimenti ◽  
A.L. Fourty
Keyword(s):  
Orientation Distribution ◽  
Distribution Functions ◽  
Archaeological Sites ◽  
Mechanical Processing ◽  
Post Processing ◽  
X Ray Diffraction ◽  
Mechanical Process ◽  
X Ray ◽  
Pole Figures ◽  
Microscopic Inspection

Some ancient metallic art craft, utensils, silverware and weapons are externally undistinguishable from modern ones. Not only the general aspect and shape but also some uses have not changed through the ages. Moreover, when just some small pieces can be recovered from archaeological sites, the samples can not easily be ascribed to any known use and consequently identified. It is clear that mechanical processing has changed along history but frequently only a "microscopic" inspection can distinguish among different techniques. Some bronze samples have been collected from the Quarto d’Altino (Veneto) archaeological area in Italy (paleovenetian culture) and some model samples have been prepared by a modern artisan. The sample textures have been measured by X-ray Diffraction techniques. (111), (200) and (220) pole figures were used to calculate Orientation Distribution Functions and further recalculate pole figures and inverse pole figures. The results were compared with modern forging technology results. Textures are able to discern between hammering ancient techniques for sheet production and modern industrial rolling procedures. However, as it is demonstrated in the present work, forgery becomes difficult to detect if the goldsmith, properly warned, proceeds to erase the texture history with some hammering post-processing. The results of this contribution can offer to the archaeologists the opportunity to take into consideration the texture techniques in order to discuss the origin (culture) of the pieces and the characteristic mechanical process developed by the ancient artisan. Texture can also help the experts when discussing the originality of a certain piece keeping however in mind the cautions indicated in this publication.

Crystallographic Texture and Phase Metrology During Damascene Copper Processing

2002 ◽  
Vol 721 ◽  
Author(s):  
K.J. Kozaczek ◽  
P.W. DeHaven ◽  
K.P. Rodbell ◽  
S. Malhotra ◽  
D.S. Kurtz ◽  
...  
Keyword(s):  
Crystallographic Texture ◽  
Texture Evolution ◽  
Deposition Process ◽  
Orientation Distribution ◽  
Transformation Method ◽  
Time Frame ◽  
X Ray Diffraction ◽  
Si Substrates ◽  
Pole Figures ◽  
And Control

AbstractThe rapid adoption of damascene copper technology has brought about an increased need to understand and control microstructure in the barrier and metal layers during processing. We have developed and implemented a methodology for rapidly characterizing thin film polycrystalline microstructures on 200 mm Si substrates using an X-ray diffraction (XRD) based metrology tool to measure crystallographic texture and phase in a time frame suitable for in-line applications. The acquired data can be used as a direct measure of the deposition process in terms of film quality, reproducibility and stability over time. The spatial distribution of crystallographic texture and phase can be measured on a single wafer in order to check within wafer uniformity. These same measurements can also be carried out at predetermined intervals on wafers from single deposition tools, with the results used to create a database that can be applied to process control trend charting and to the establishment of acceptance criteria. The methodology developed makes use of several novel data analysis and collection techniques, such as the use of a direct matrix transformation method to determine the orientation distribution function (ODF) from a group of truncated pole figures. Useful quantitative outputs of the ODF, such as volumetric fractions of crystallographic texture components, can be used in quantifying texture evolution within and between wafers. On-the-fly texture compensation can also be used to generate useful quantitative phase and film thickness measurements. We present the principles of operation of this metrology tool and selected examples collected in the IBM's Advanced Semiconductor Technology Center (ASTC), East Fishkill, NY.

Critical evaluation of the Lotgering degree of orientation texture indicator

2004 ◽  
Vol 19 (11) ◽  
pp. 3414-3422 ◽  
Author(s):  
Jacob L. Jones ◽  
Elliott B. Slamovich ◽  
Keith J. Bowman
Keyword(s):  
Bismuth Titanate ◽  
Critical Evaluation ◽  
Orientation Distribution ◽  
X Ray Diffraction ◽  
Standard Unit ◽  
X Ray ◽  
Pole Figures ◽  
Textured Ceramics ◽  
Degree Of Orientation ◽  
Tape Cast

Preferred orientation in textured ceramics is often assessed by comparing the relative intensities of x-ray diffraction reflections to those of a randomly oriented ceramic using the Lotgering degree of orientation (f). However, this paper provides evidence that indiscriminate assessments of f can be misleading. Using measured intensities of a modestly textured tape cast bismuth titanate (Na0.5Bi4.5Ti4O15) ceramic, calculated f values vary from 7.4 to 73.2% depending on the reflections included in the calculation. The texture is also quantified by calculating the orientation distribution function (ODF) using measured pole figures. A model is then presented that demonstrates f is nonlinear with the multiple of preferred (00l)-orientations, the standard unit of the 00l pole figure.

Preferred crystallographic orientation in mature and juvenile wood

2007 ◽  
Vol 222 (3-4) ◽  
Author(s):  
Jan T. Bonarski ◽  
Wieslaw Olek
Keyword(s):  
Distribution Function ◽  
Juvenile Wood ◽  
Microfibril Angle ◽  
Orientation Distribution ◽  
Experimental Methods ◽  
X Ray Diffraction ◽  
Traditional Concept ◽  
X Ray ◽  
Pole Figures ◽  
The Mean

Investigations of the crystallograpically organized regions of mature and juvenile Scots pine wood were performed. Experimental methods of X-ray diffraction were applied. Incomplete pole figures were measured, in order to calculate the orientation distribution function. The differences in the texture of the mature and juvenile wood were determined. The traditional concept of the mean microfibril angle was enhanced by developing the misorientation parameters. Evident differences in the space arrangement of cellulose of the both zones of wood were identified and described.

scholarly journals Texture and Lamellae Distribution Functions in Lamellar Eutectics

1986 ◽  
Vol 6 (4) ◽  
pp. 265-287 ◽  
Author(s):  
H. J. Bunge
Keyword(s):  
Three Dimensional ◽  
Orientation Distribution ◽  
Distribution Functions ◽  
X Rays ◽  
Two Dimensional ◽  
Absorption Factor ◽  
X Ray Diffraction ◽  
Diffraction Vector ◽  
X Ray ◽  
Pole Figures

The crystallographic orientation distribution and the geometrical lamellae orientation distribution in lamellar eutectics are, in general, not independent of each other. The combined orientation-lamellae distribution function depends on five angular parameters. X-ray diffraction in such eutectics may exhibit an anisotropic macroscopic absorption factor if the penetration depth of the X-rays is large compared with their planar size. As a consequence, the reflected X-ray intensity may depend on a third angle γ, i.e. a rotation of the sample about the diffraction vector s additionally to the usual pole figure angles α, β which describe the orientation of the diffraction vector s with respect to the sample coordinate system. It is thus necessary to measure three-dimensional generalized pole figures instead of conventional two-dimensional ones.

Analysis of Preferred Orientations in Linear Friction Welded (LFW) Aluminium Alloy Specimens using “One-shot” Multi-element Energy Dispersive Synchrotron X-ray Diffraction

2013 ◽  
Vol 28 (S2) ◽  
pp. S327-S332 ◽  
Author(s):  
M.Y. Xie ◽  
T.S. Jun ◽  
A.M. Korsunsky ◽  
M. Drakopoulos
Keyword(s):  
Powder Diffraction ◽  
Dissimilar Materials ◽  
Orientation Distribution ◽  
Energy Dispersive ◽  
X Ray Diffraction ◽  
Matlab Toolbox ◽  
X Ray ◽  
Sample Rotation ◽  
Pole Figures ◽  
Linear Friction

Linear Friction Welding (LFW) has tremendous potential for joining components from similar and dissimilar materials, avoiding material melting and introducing minimal distortion and only moderate levels of residual stress. However, the significant amount of attendant shear introduces preferred crystal orientations that have not yet been well studied. The “one-shot” approach to the interpretation of multi-element energy-dispersive X-ray powder diffraction data allows preferred orientation analysis without any sample preparation (cutting or polishing) or sample rotation. The key step for texture analysis by X-ray powder diffraction is the derivation of the orientation distribution function (ODF) from experimental data. Matlab toolbox “MTEX” provides a powerful function “calcODF” based on the harmonics method for this purpose. In the study reported in this paper, energy dispersive X-ray diffraction patterns were collected using the “horseshoe” multi-element energy-dispersive Ge detector installed on the JEEP beamline at Diamond Light Source. A single exposure was used for each gauge volume of interest, and a line was scanned across an Aluminum 2024 alloy LFW sample. The patterns were converted into raw pole figures through single peak fitting and equal area projection. The ODF calculation was performed based on these pole figures using Matlab toolbox “MTEX”. As a result, full pole figures obtained after ODF calculation were obtained. These are presented and discussed. The results show that the thermal-mechanical processes that occur during the LFW process lead to significant modification of the orientation distribution, but cause only moderate changes in the texture index.

Determination of the wurtzite content and orientation distribution of nanowire ensembles

2009 ◽  
Vol 1206 ◽  
Author(s):  
Dominik Kriegner ◽  
Mario Keplinger ◽  
Julian Stangl ◽  
Aaron M. Andrews ◽  
Pavel Klang ◽  
...  
Keyword(s):  
Lattice Constant ◽  
Orientation Distribution ◽  
Growth Direction ◽  
X Ray Diffraction ◽  
X Ray ◽  
Pole Figures

AbstractWe present x-ray diffraction based methods to quantitatively determine the wurtzite content of nanowire ensembles and to investigate the effect of twinning. An increased lattice constant in growth direction is found for all investigated InAs and InP nanowire samples. This increase is independent of the wurtzite content. Using x-ray pole figures we find that twinning is present in GaAs/Si branched nanowires, which leads to 60° rotations of the lattice.

scholarly journals APLIKACE TEXTURNÍ RTG-DIFRAKČNÍ ANALÝZY V TEKTONICE – KVANTIFIKACE PŘEDNOSTNÍ ORIENTACE KALCITU V KARBONÁTOVÝCH HORNINÁCH

2016 ◽  
Vol 23 (1-2) ◽  
Author(s):  
Stanislav Kurdík ◽  
Rostislav Melichar ◽  
Jiří Novák ◽  
Dalibor Všianský
Keyword(s):  
Diffraction Analysis ◽  
Deformation Mechanisms ◽  
Optical Methods ◽  
Tectonic Movement ◽  
X Ray Diffraction ◽  
Beam Direction ◽  
X Ray ◽  
Fine Grained ◽  
Pole Figures ◽  
Reflection Geometry

The goal of this work was to apply texture x-ray diffraction analysis to study naturally strained rocks, in which the quantification of main preferred orientation cannot be conducted by the optical methods. This method has mainly been developed for metallography and its application in geology has been very limited so far. Samples of the fine-grained limestone have been collected from an outcrop, in which the direction of tectonic movement has been known. Thus, the tectonic situation could be correlated with the data obtained by XRD texture analysis. Analyses have been done by two devices with different geometry of experiment. The first experiment (Schulz reflection geometry) needed correction for the gain data, because of tilting of the sample, which led to the misalignment of the sample from the x-ray beam direction. The second one (in-plane geometry) has been measured, when the sample has been fixed and rotated, thus the correction was not needed. The results in a form of pole figures reflect the mechanism of deformation. The orientation of cleavage planes of calcite parallel to foliation indicates a cataclastic flow. Thus, the method could be used to study deformation mechanisms. The asymmetry of the results can show sense of shear, but it could also reflect inhomogenities of the samples. 

Cross-sectional texture of carbon fibres analysed by scanning microbeam X-ray diffraction

2001 ◽  
Vol 34 (4) ◽  
pp. 473-479 ◽  
Author(s):  
Oskar Paris ◽  
Dieter Loidl ◽  
Martin Müller ◽  
Helga Lichtenegger ◽  
Herwig Peterlik
Keyword(s):  
Quantitative Description ◽  
Fibre Diameter ◽  
Orientation Distribution ◽  
Carbon Fibres ◽  
X Ray Diffraction ◽  
Cross Sectional ◽  
X Ray ◽  
The Cross ◽  
Diffraction Patterns ◽  
Integrated Intensities

Scanning microbeam X-ray diffraction analysis of single carbon fibres allows the cross-sectional orientation distribution (texture) of the carbon layers to be determined, even when the fibre axis is oriented perpendicular to the X-ray beam (fibre geometry). The fibre is scanned across a microbeam with a diameter significantly smaller than the fibre diameter, and fibre diffraction patterns are recorded for every scanning step. The cross-sectional texture information is obtained from the integrated intensities of two different equatorial reflections as a function of the position on the fibre. As an example, results from two different types of carbon fibres are presented: a polyacrylonitrile-based fibre, with random cross-sectional texture, and a fibre based on mesophase pitch, which exhibits a radially folded cross-sectional texture. Detailed modelling of the diffraction data allows a quantitative description of the radial folded texture.

Effects of thermal modification on wood ultrastructure analyzed with crystallographic texture

Holzforschung ◽  
2014 ◽  
Vol 68 (6) ◽  
pp. 721-726 ◽  
Author(s):  
Wiesław Olek ◽  
Jan T. Bonarski
Keyword(s):  
Crystallographic Texture ◽  
Orientation Distribution ◽  
Crystalline Cellulose ◽  
Temporary Increase ◽  
X Ray Diffraction ◽  
X Ray ◽  
3D Texture ◽  
Lattice Symmetry ◽  
Pole Figures ◽  
Monoclinic Lattice

Abstract The changes in ultrastructure of thermally modified beech and poplar wood have been studied by means of the crystallographic texture analysis. The experimental pole figures have been registered based on the X-ray diffraction (XRD). The 3D texture function, i.e., the orientation distribution function (ODF) was calculated with the use of the procedure implemented for materials with the monoclinic lattice symmetry. The inverse pole figures were recalculated from the obtained ODF. Areas with specific crystallographic organization in wood were identified and gradual changes in intensities of moderately oriented areas were observed. Simultaneously, additional reorganization of crystalline cellulose was observed as a result of heat treatment. The integrated skeleton lines confirmed the gradual decomposition of hemicelluloses as well as the temporary increase of cellulose self-organization.

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