Instabilities in the Mechanical Stress in Deposited SiO2 Films Caused by Thermal Treatments

1990 ◽  
Vol 181 ◽  
Author(s):  
Bharat Bhushan ◽  
S.P. Murarka
Keyword(s):  
Heat Treatment ◽  
Mechanical Stress ◽  
Stress Measurement ◽  
In Situ Stress ◽  
Thermal Treatments ◽  
Heat Treated ◽  
Large Hysteresis ◽  
In Situ Stress Measurement ◽  
Deposited Films

ABSTRACTUsing an in-situ stress measurement technique that measures stress as a function of annealing temperature, instabilities in mechanical stress induced by heat treatment in a variety of doped/undoped SiO2 films deposited by APCVD, LPCVD and PECVD techniques have been investigated. A large hysteresis in mechanical stress, caused by first heat treatment to which the as-deposited films are subjected, has been observed in films deposited by APCVD/LPCVD techniques. No such hysteresis is obsesrved in films deposited by PECVD technique. Hysteresis in APCVD/LPCVD films is found to vanish once the films are heat treated at or above 800°C. The results are discussed in terms of oxide densification, the presence of hydrogenous species, and phosphorous.

In-Situ Stress Measurement during Heat Treatment of Amorphous Tantalum Oxide

2015 ◽  
Vol 4 (7) ◽  
pp. N64-N69
Author(s):  
Xin Su ◽  
Mark Viste ◽  
Joachim Hossick-Schott ◽  
Lei Yang ◽  
Brian W. Sheldon
Keyword(s):  
Heat Treatment ◽  
Stress Measurement ◽  
Tantalum Oxide ◽  
In Situ Stress ◽  
In Situ Stress Measurement

In Situ Stress Measurement and Inversion in Deep Roadway

2013 ◽  
Vol 734-737 ◽  
pp. 759-763 ◽  
Author(s):  
Yong Li ◽  
Yun Yi Zhang ◽  
Ren Jie Gao ◽  
Shuai Tao Xie
Keyword(s):  
Field Measurement ◽  
Stress Measurement ◽  
Measurement Data ◽  
Back Analysis ◽  
In Situ Stress ◽  
Deep Mine ◽  
Accuracy Requirement ◽  
Initial Stress Field ◽  
In Situ Stress Measurement

Jixi mine area is one of the early mined areas in China and it's a typical deep mine. Because of large deformation of underground roadway and dynamic disasters occurred frequently in this mine, five measurement points of in-situ stress in this mine was measured and then analyzed with inversion. Based on these in-situ stress measurement data, numerical model of 3D in-situ stress back analysis was established. According to different stress fields, related analytical samples of neural network were given with FLAC program. Through the determination of hidden layers, hidden nodes and the setting of parameters, the network was optimized and trained. Then according to field measurement of in-situ stress, back analysis of initial stress field was conducted. Compared with field measurement, with accuracy requirement satisfied, it shows that the in-situ stress of rock mass obtained is basically reasonable. Meanwhile, it proves that the measurement of in-situ stress can provide deep mines with effective and rapid means, and also provide reliable data to optimization of deep roadway layout and supporting design.

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