XPS Characterization of Mixed Carbides Obtained from Polymer Precursors
Keyword(s):
X Ray
◽
ABSTRACTPolymer precursors for Si-C, Si-Ti-C-O and Si-Al-C-O systems have been obtained from polycarbosilane and the corresponding metal alkoxides. X-ray Photoelectron Spectroscopy (XPS) has been used to follow the structural evolution of these preceramic compounds during the pyrolysis process.