Microstructural Evolution of TiO2 Sol-Gel Thin Films

1990 ◽  
Vol 180 ◽  
Author(s):  
J.L. Keddie ◽  
E.P. Giannelis

ABSTRACTBackscattering spectrometry has been used to determine the density of TiO2 sol-gel films. The density of the as-deposited films relative to that of anatase varies slightly with respect to deposition conditions and is approximately 0.5. Annealing at temperatures as high as 750°C increases the relative density to 0.7 with concomitant decreases in the O:Ti ratio and H content but it does not result in complete densification. Film densities are consistently higher for films annealed under dynamic vacuum compared to those in air.

2003 ◽  
Vol 18 (2) ◽  
pp. 357-362 ◽  
Author(s):  
Mary M. Sandstrom ◽  
Paul Fuierer

Control over crystallographic orientation in thin films is important, particularly with highly anisotropic structures. Because of its ferroelectric nature, the layered perovskite La2Ti2O7 has interesting piezoelectric and electrooptic properties that may be exploited when films are highly textured. Sol-gel films with an orientation factor of greater than 95% were fabricated without relying on epitaxial (lattice-matching) growth from the substrate. Film orientation and crystallization were confirmed by x-ray diffraction, scanning electron microscopy, atomic force microscopy, and optical measurements. The particle sizes in all precursor solutions were measured by dynamic light scattering experiments. Experimental results indicate that film orientation is a function of precursor solution concentration, size of the molecular clusters in the solution, and film thickness.


Chemosphere ◽  
1998 ◽  
Vol 36 (3) ◽  
pp. 483-495 ◽  
Author(s):  
Jong-Soon Kim ◽  
Kiminori Itoh ◽  
Masayuki Murabayashi

1990 ◽  
Vol 200 ◽  
Author(s):  
Cheng-Chen Hsueh ◽  
Martha L. MeCartney

ABSTRACTFerroelectric PZT thin films were prepared by sol-gel methods and RF magnetron sputtering. Sputtered PZT fast fired at 650° for 30 minutes showed microporosity. For the sol-gel route, solution precursors had a significant effect on the microstructure of the crystalline PZT films. PZT thin films derived from metal-organic precursors dissolved in n-propanol were observed to have large and microporous spherulitic grains on the order of 2 μm and phase separation in acetic acid-catalyzed films. In contrast, PZT precursors originated from alcohol exchanges with 2-methoxyethanols resulted in dense films with fine grains of ∼0.2 μm and clear evidence of ferroelectric domains. The dense sol-gel films possessed superior dielectric and ferroelectric properties.


1999 ◽  
Vol 596 ◽  
Author(s):  
S. B. Majumder ◽  
S. Bhaskar ◽  
P. S. Dobal ◽  
A. L. Morales. Cruz ◽  
R. S. Katiyar

AbstractIn the present work we have studied the characteristics of Pb1.05-xLaxTil-x/4O3 ( x= 0 to 30 at%) thin films prepared by acetic acid and methoxy-ethanol based sol-gel techniques. We have found that higher intermediate temperature fired films (x=0.15), prepared by acetic acid modified technique yielded (100) textured growth with improved dielectric properties. It has been argued that homogeneous mixing of the film constituents in the sol is influenced by the choice of the precursor materials and preparation methodology which in turn controls the growth characteristics and electrical properties. Lanthanum as a dopant has a pronounced influence on the structure, microstructure and electrical properties of the deposited films. In the Raman spectra, the soft E(1TO) phonon shifts towards the lower frequency with a sharp decrease in its intensity and a tetragonal to cubic structural transformation (for 26.5 at % La) was observed at room temperature. In the ferroelectric composition range (up to 15 at % La doping), we have observed a significant improvement of ferroelectric properties with the La addition.


2010 ◽  
Vol 518 (23) ◽  
pp. 6792-6798 ◽  
Author(s):  
James B. Miller ◽  
Hsin-Jung Hsieh ◽  
Bret H. Howard ◽  
Esteban Broitman

2011 ◽  
Vol 176 (9) ◽  
pp. 716-722 ◽  
Author(s):  
Enrico Della Gaspera ◽  
Mattia Pujatti ◽  
Massimo Guglielmi ◽  
Michael L. Post ◽  
Alessandro Martucci

1997 ◽  
Vol 8 (1-3) ◽  
pp. 409-413 ◽  
Author(s):  
Rui M. Almeida ◽  
Eva E. Christensen

2011 ◽  
Vol 115 (7) ◽  
pp. 3115-3122 ◽  
Author(s):  
Benjamin Louis ◽  
Natacha Krins ◽  
Marco Faustini ◽  
David Grosso
Keyword(s):  
Sol Gel ◽  

1994 ◽  
Vol 346 ◽  
Author(s):  
Hiroshi Hirashima ◽  
Kenji Adachi ◽  
Hiroaki Imai

ABSTRACTIn order to densify and to improve the physical properties, TiO2 sol-gel films, about 100 nm in thickness, on silica glass or silicon wafer were implanted with Ar+ or B+ ions. The refractive index of the as-dried films increased and the IR absorption band of OH disappeared after Ar+ implantation. Drying and densification of sol-gel films were enhanced by Ar+ implantation. On the other hand, the refractive index and the thickness of the films hardly changed with B+ implantation. However, IR absorption bands of B-O bond were observed after B+ implantation. This suggests that sol-gel films could be chemically modified by ion implantation with reactive ion species.


2020 ◽  
Vol 59 (25) ◽  
pp. 7720
Author(s):  
F. M. Fardo ◽  
R. S. Ribeiro ◽  
J. A. Strauss ◽  
J. Nardi ◽  
L. C. Ferreira ◽  
...  

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