Silica-Based Single-Mode Waveguides and Their Applications to Integrated-Optic Devices
Keyword(s):
Low Loss
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AbstractLow-loss silica-based single-mode waveguides are fabricated on Si substrates by flame hydrolysis deposition and reactive ion etching. The waveguide loaded with a thin film heater operates as a phase shifter due to the refractive index dependence on temperature. The phase shifter can afford optical switching and/or tuning functions for silica-based integrated-optic devices. The waveguides have large stress-induced birefringence due to the difference in thermal expansion coefficients between SiO2 and Si. Waveguide birefringence control techniques are proposed for constructing various polarization insensitive and sensitive devices.
2003 ◽
Vol 21
(10)
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pp. 2429-2433
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1988 ◽
Vol 46
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pp. 568-569
2020 ◽
Vol 48
(12)
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pp. 2111-2129
2013 ◽
Vol 646
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pp. 59-66
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1988 ◽
Vol 6
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pp. 1186-1198
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Keyword(s):