Effect of Ambient Atmosphere on Thin Film Reaction of Si3N4 with Ti

1989 ◽  
Vol 170 ◽  
Author(s):  
Seshu B. Desu ◽  
J. Ashley Taylor
Keyword(s):  
Layer Structure ◽  
Chemical Vapor ◽  
Product Formation ◽  
Ambient Atmosphere ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Pressure Chemical ◽  
Rapid Thermal Annealer ◽  
The Stability ◽  
Increasing Temperature

AbstractThe reaction of sputtered deposited Ti films of 100 nm thick with low pressure chemical vapor deposited Si3N4 films (300 nm thick) was studied in N2 or Ar, in a rapid thermal annealer. Reactions are followed using x-ray diffraction, Auger electron spectroscopy, and transmission electron microscopy. In argon, the Si3N4 and Ti reaction at low temperatures led to the product formation of two layer structure (TiN/Ti5Si3), with some contaminant oxygen and nitrogen released from the reaction uniformly dissolved throughout the remaining unreacted Ti. At higher temperatures, a three layer structure, TiN/TixSiy/TiN, on unreacted Si3N4 was developed. With increasing temperature the value of x and y decreased from 5 to 0 and 3 to 1, respectively. Reactions in N2 ambient, irrespective of temperature, always produced the three layer structure, but the thickness of TixSiy layer was much smaller than that produced in argon ambient for the corresponding temperatures. The reaction mechanism can be explained in terms of relative diffusion coefficients and the stability of the interfaces.

Growth of Si1−xGex, Strained Layers Using Atmospheric-Pressure CVD

1991 ◽  
Vol 220 ◽  
Author(s):  
F. Namavar ◽  
J. M. Manke ◽  
E. P. Kvam ◽  
M. M. Sanfacon ◽  
C. H. Perry ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Defect Density ◽  
Chemical Vapor ◽  
Good Growth ◽  
X Ray Diffraction ◽  
Strained Layers ◽  
Dislocation Glide ◽  
Transmission Electron ◽  
Pressure Chemical ◽  
Film Defect

ABSTRACTThe objective of this paper is to demonstrate the epitaxial growth of SiGe strained layers using atmospheric-pressure chemical vapor deposition (APCVD). We have grown SiGe layers with various thicknesses and Ge concentrations at temperatures ranging from 800–1000°C. The samples were studied using a variety of methods, including transmission electron microscopy (TEM), high resolution X-ray diffraction (HRXRD) and Raman spectroscopy (RS). Both HRXRD and RS results indicate that samples with about 10% Ge and a thickness of about 1000 Å are almost fully strained. TEM analyses of these samples indicate a film defect density less than 105/cm2. SIMS results indicate that the oxygen concentration in the epitaxial layers is lower than that found in CZ substrates.Our analyses also indicate that as-grown epitaxial Ge layers several microns thick have a defect density less than 107/cm2. The relatively low defect density in both SiGe and Ge layers grown on Si has been attributed to far higher dislocation glide velocity at the relatively elevated growth temperatures employed in CVD and to very good growth cleanliness.

Growth of Silicon-Germanium Alloys by Atmospheric-Pressure Chemical Vapor Deposition at Low Temperatures

1991 ◽  
Vol 220 ◽  
Author(s):  
P. D. Agnello ◽  
T. O. Sedgwick ◽  
M. S. Goorsky ◽  
J. Ott ◽  
T. S. Kuan ◽  
...  
Keyword(s):  
Silicon Germanium ◽  
Atmospheric Pressure ◽  
Chemical Vapor ◽  
Hole Mobility ◽  
Significant Feature ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Pressure Chemical ◽  
Silicon Growth ◽  
Silicon Germanium Alloys

ABSTRACTDichlorosilanc and germane were used to grow silicon-germanium alloys at temperatures as low as 550°C at atmospheric pressure. Germanium mole fractions as high as 44% were obtained and the layers exhibit smooth surface morphology. Silicon-gcrmanium/silicon multilayers with abrupt hctero-intcrfaccs have been achieved. Cross Section Transmission Electron Microscopy, (XTEM) and High Resolution X-Ray Diffraction, (HRXRD) characterization of the hetero-interface abruptness will be presented. Recent results on two-dimensional (2-D) hole mobility structures grown by this technique will also be reported. Selective growth of silicon-germanium on oxide patterned silicon wafers was also demonstrated. A significant feature of the selective deposition is the lack of faceting at the oxide sidcwall, which has been commonly observed in high temperature silicon growth.

Characterization of polycrystalline silicon carbide films grown by atmospheric pressure chemical vapor deposition on polycrystalline silicon

1998 ◽  
Vol 13 (2) ◽  
pp. 406-412 ◽  
Author(s):  
Christian A. Zorman ◽  
Shuvo Roy ◽  
Chien-Hung Wu ◽  
Aaron J. Fleischman ◽  
Mehran Mehregany
Keyword(s):  
Polycrystalline Silicon ◽  
Chemical Vapor ◽  
Deposition Process ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Polycrystalline Silicon Carbide ◽  
Pressure Chemical ◽  
Temperature Deposition ◽  
Sic Films

X-ray diffraction, transmission electron microscopy, and Rutherford backscattering spectroscopy were used to characterize the microstructure of polycrystalline SiC films grown on as-deposited and annealed polysilicon substrates. For both substrate types, the texture of the SiC films resembles the polysilicon at the onset of SiC growth. During the high temperature deposition process, the as-deposited polysilicon recrystallizes without influencing the crystallinity of the overlying SiC. An investigation of the SiC/polysilicon interface reveals that a heteroepitaxial relationship exists between polysilicon and SiC grains. From this study, a method to control the orientation of highly textured polycrystalline SiC films has been developed.

Texture Evolution in Si/SiC Layered Structures Deposited on Si(001) by Chemical Vapor Deposition

1998 ◽  
Vol 13 (9) ◽  
pp. 2632-2642 ◽  
Author(s):  
L-O. Björketun ◽  
L. Hultman ◽  
O. Kordina ◽  
J-E. Sundgren
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Texture Evolution ◽  
Chemical Vapor ◽  
Columnar Structure ◽  
Layer Growth ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Pressure Chemical

Texture evolution in Si/SiC multilayers deposited by atmospheric pressure chemical vapor deposition on carbonized Si(001) substrates was investigated using x-ray diffraction and transmission electron microscopy. SiC layers were epitaxial and (001)-oriented. Si layers deposited on the SiC exhibited a columnar structure with predominantly (110) orientation which could be related to the nucleation. Orientational relationships were Si[111] ║ SiC[110] and Si[112] ║ SiC[110]. Also, a low density of (112)-oriented columns was present. Extensive twinning on the vertical {111} planes within the Si columns led to domains of hexagonal stacking up to 10 nm in size with the presence of 2H-Si and 4H-Si. Subsequent SiC layer growth on the (110)-oriented Si layer resulted in a (110)-oriented SiC layer if the Si layer was carbonized prior to growth.

Growth of crack-free GaN on AlN quantum dots on Si(111)substrates by MOCVD

2003 ◽  
Vol 798 ◽  
Author(s):  
W. H. Sun ◽  
J. L. Chen ◽  
L. S. Wang ◽  
S. J. Chua
Keyword(s):  
Quantum Dots ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Optical Microscope ◽  
X Ray Diffraction ◽  
X Ray ◽  
Force Microscopy ◽  
Transmission Electron ◽  
Pressure Chemical ◽  
Aln Buffer

AlN self-assembled quantum dots (QDs) with high density of ∼ 4.4 × 1010/cm2 on Si(111) substrates have been grown by low-pressure chemical vapor deposition under a very low V/III ratio of 350. We found that using AlN-QD/AlN buffer two-inch GaN epilayers without cracks were grown, indicating the underlying quantum dots play a crucial role in relaxing the stain of GaN epilayer. The quality and morphology were investigated by atom force microscopy, transmission electron microscopy, X-ray diffraction and optical microscope.

A Comparative Study of the Synthesis of Carbon Nanotubes Using Ni and Fe as Catalyst

2009 ◽  
Vol 67 ◽  
pp. 89-94 ◽  
Author(s):  
Joydip Sengupta ◽  
Sovan Kumar Panda ◽  
Chacko Jacob
Keyword(s):  
Electron Microscopy ◽  
Carbon Nanotubes ◽  
Chemical Vapor ◽  
X Ray Diffraction ◽  
Raman Spectroscopic ◽  
Force Microscopy ◽  
Atomic Force ◽  
Transmission Electron ◽  
Pressure Chemical ◽  
Synthesis Of Carbon Nanotubes

The effect of Fe and Ni catalysts on the synthesis of carbon nanotubes (CNTs) using atmospheric pressure chemical vapor deposition (APCVD) was investigated. Distribution of the catalyst particles over the Si substrate was analyzed by atomic force microscopy (AFM). Characterization by X-ray diffraction analysis (XRD), field emission scanning electron microscopy (FESEM), high-resolution transmission electron microscopy (HRTEM) and Raman spectroscopic measurements over the grown species is reported. The study clearly shows that the catalyst strongly influences morphology and microstructure of the grown CNTs.

Synthesis of Carbon Onions Including Fe3C by Chemical Vapor Deposition Using an Iron Catalyst Supported on Sodium Chloride

2012 ◽  
Vol 184-185 ◽  
pp. 1294-1297 ◽  
Author(s):  
Lei Shan Chen ◽  
Cun Jing Wang ◽  
Gai Rong Chen
Keyword(s):  
Sodium Chloride ◽  
Iron Catalyst ◽  
Layer Structure ◽  
Chemical Vapor ◽  
Catalytic Decomposition ◽  
X Ray Diffraction ◽  
Graphitic Layer ◽  
Transmission Electron ◽  
Heat Treated ◽  
Carbon Onions

Carbon onions including Fe3C were synthesized by the catalytic decomposition of acetylene at 400 °C using iron supported on sodium chloride as catalyst. The samples were examined by high resolution transmission electron microscopy, energy dispersive spectroscopy, and X-ray diffraction. The results show that carbon onions including Fe3C core with a structure of stacked graphitic fragments and diameters in the range 15-50 nm were obtained. When the product was further heat-treated under vacuum at 1100 °C, carbon onions with a clear concentric graphitic layer structure were obtained.

Substrate Effects on the Kinetics of Solid Phase Crystallization In a-Si

1991 ◽  
Vol 230 ◽  
Author(s):  
L. Haji ◽  
P. Joubert ◽  
M. Guendouz ◽  
N. Duhamel ◽  
B. Loisel
Keyword(s):  
Indium Tin Oxide ◽  
Solid Phase ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
X Ray Diffraction ◽  
Solid Phase Crystallization ◽  
Transmission Electron ◽  
Pressure Chemical ◽  
Drastic Effect ◽  
Kinetics Of

AbstractThe effect of substrate nature on the solid phase crystallization at 600 °C of a-Si deposited by low pressure chemical vapor deposition is investigated by x-ray diffraction and transmission electron microscopy. The nucleation rate varies slightly resulting to a weak variation in the final grain sizes as a function of the substrate type. In all cases the grain growth mode is found to be three dimensional. In contrary, a drastic effect of the substrate is observed for films deposited by plasma enhanced CVD. Fast crystallization is obtained on indium tin oxide (ITO) resulting to small grain poly-Si, whereas the crystallization is retarded on glass leading to an increase in the grain size.

TEM characterization of Au/Polysilicon interactions

1990 ◽  
Vol 48 (4) ◽  
pp. 650-651
Author(s):  
N. David Theodore ◽  
Leslie H. Allen ◽  
C. Barry Carter ◽  
James W. Mayer
Keyword(s):  
Solid Phase ◽  
Single Crystal Silicon ◽  
Chemical Vapor ◽  
Electrical Contacts ◽  
Silicon Substrates ◽  
Crystal Silicon ◽  
Transmission Electron ◽  
Polysilicon Films ◽  
The Stability

Metal/polysilicon investigations contribute to an understanding of issues relevant to the stability of electrical contacts in semiconductor devices. These investigations also contribute to an understanding of Si lateral solid-phase epitactic growth. Metals such as Au, Al and Ag form eutectics with Si. reactions in these metal/polysilicon systems lead to the formation of large-grain silicon. Of these systems, the Al/polysilicon system has been most extensively studied. In this study, the behavior upon thermal annealing of Au/polysilicon bilayers is investigated using cross-section transmission electron microscopy (XTEM). The unique feature of this system is that silicon grain-growth occurs at particularly low temperatures ∽300°C).Gold/polysilicon bilayers were fabricated on thermally oxidized single-crystal silicon substrates. Lowpressure chemical vapor deposition (LPCVD) at 620°C was used to obtain 100 to 400 nm polysilicon films. The surface of the polysilicon was cleaned with a buffered hydrofluoric acid solution. Gold was then thermally evaporated onto the samples.

scholarly journals Temperature Dependence of Stress and Optical Properties in AlN Films Grown by MOCVD

Nanomaterials ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 698
Author(s):  
Wenwang Wei ◽  
Yi Peng ◽  
Jiabin Wang ◽  
Muhammad Farooq Saleem ◽  
Wen Wang ◽  
...  
Keyword(s):  
Optical Properties ◽  
Compressive Stress ◽  
Sapphire Substrate ◽  
Light Transmission ◽  
Chemical Vapor ◽  
Biaxial Stress ◽  
X Ray Diffraction ◽  
Patterned Sapphire Substrate ◽  
Transmission Electron ◽  
Nano Patterning

AlN epilayers were grown on a 2-inch [0001] conventional flat sapphire substrate (CSS) and a nano-patterned sapphire substrate (NPSS) by metalorganic chemical vapor deposition. In this work, the effect of the substrate template and temperature on stress and optical properties of AlN films has been studied by using Raman spectroscopy, X-ray diffraction (XRD), transmission electron microscopy (TEM), UV-visible spectrophotometer and spectroscopic ellipsometry (SE). The AlN on NPSS exhibits lower compressive stress and strain values. The biaxial stress decreases from 1.59 to 0.60 GPa for AlN on CSS and from 0.90 to 0.38 GPa for AlN on NPSS sample in the temperature range 80–300 K, which shows compressive stress. According to the TEM data, the stress varies from tensile on the interface to compressive on the surface. It can be deduced that the nano-holes provide more channels for stress relaxation. Nano-patterning leads to a lower degree of disorder and stress/strain relaxes by the formation of the nano-hole structure between the interface of AlN epilayers and the substrate. The low crystal disorder and defects in the AlN on NPSS is confirmed by the small Urbach energy values. The variation in bandgap (Eg) and optical constants (n, k) with temperature are discussed in detail. Nano-patterning leads to poor light transmission due to light scattering, coupling, and trapping in nano-holes.

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