The Effect of Reactor Pressure on the Growth of Glow Discharge a-SiN:H

1989 ◽  
Vol 165 ◽  
Author(s):  
W. J. Varhue ◽  
K. A. Pandelisev
Keyword(s):  
Electrical Resistivity ◽  
Energy Spectrum ◽  
Glow Discharge ◽  
Electron Energy ◽  
Substrate Surface ◽  
Ion Bombardment ◽  
Electron Energy Spectrum ◽  
N Content ◽  
Reactor Pressure

AbstractThe electrical resistivity and N content of a-SiN:H films can be controlled by varying the reactor pressure. This appears to be a result of the increased dissociation of the ammonia feed gas by the change in the electron energy spectrum. The effect of ion bombardment of the substrate surface does not result in observable changes in film quality.

Nonlocal nature of the electron energy spectrum in a glow-discharge in pure O2: II. Actinometry of O(3 P) atoms in a plasma at low gas pressures

2000 ◽  
Vol 26 (11) ◽  
pp. 980-990 ◽  
Author(s):  
V. V. Ivanov ◽  
K. S. Klopovskii ◽  
D. V. Lopaev ◽  
A. T. Rakhimov ◽  
T. V. Rakhimova
Keyword(s):  
Energy Spectrum ◽  
Glow Discharge ◽  
Electron Energy ◽  
Electron Energy Spectrum ◽  
Nonlocal Nature ◽  
Gas Pressures

Thermodynamic activity and electron energy spectrum of metallic solutions

2014 ◽  
Vol 44 (2) ◽  
pp. 90-95
Author(s):  
I. F. Selyanin ◽  
V. B. Deev ◽  
A. I. Kutsenko ◽  
A. A. Kutsenko ◽  
O. G. Prikhod’ko
Keyword(s):  
Energy Spectrum ◽  
Electron Energy ◽  
Thermodynamic Activity ◽  
Electron Energy Spectrum

Electron energy spectrum in 2D-quasicrystals

1988 ◽  
Vol 130 (6-7) ◽  
pp. 381-384 ◽  
Author(s):  
A.V. Kuzmenko ◽  
I.R. Sagdeev ◽  
D.A. Usikov ◽  
G.M. Zaslavsky
Keyword(s):  
Energy Spectrum ◽  
Electron Energy ◽  
Electron Energy Spectrum

Numerical simulation of relativistic electron energy spectrum measurement based on graphite slices calorimeter

2010 ◽  
Vol 22 (4) ◽  
pp. 918-922
Author(s):  
张信军 Zhang Xinjun ◽  
王亮平 Wang Liangping ◽  
呼义翔 Hu Yixiang ◽  
吴撼宇 Wu Hanyu ◽  
李岩 Li Yan
Keyword(s):  
Numerical Simulation ◽  
Energy Spectrum ◽  
Relativistic Electron ◽  
Electron Energy ◽  
Electron Energy Spectrum ◽  
Spectrum Measurement

Parametric Sensitivity of the Formation of Reversed Electron Energy Spectrum Caused by Plasmaspheric Hiss

2019 ◽  
Vol 46 (8) ◽  
pp. 4134-4143 ◽  
Author(s):  
Binbin Ni ◽  
He Huang ◽  
Wenxun Zhang ◽  
Xudong Gu ◽  
Hong Zhao ◽  
...  
Keyword(s):  
Energy Spectrum ◽  
Electron Energy ◽  
Electron Energy Spectrum ◽  
Parametric Sensitivity
Sign in / Sign up

Export Citation Format

Share Document