The Formation of Silicon-Rich Silicides

1989 ◽  
Vol 163 ◽  
Author(s):  
Maria Ronay ◽  
R.G. Schad

AbstractDiffusion studies of mono and bilaycrs of transition-metal films on silicon showed that the formation of η′ —Cu3Si lowers the formation temperature of subsequently forming ReSi2 by 400°C. This is due to the creation of a large amount of silicon self-interstitials accompanying the formation of the copper suicide, which lowers the activation energy for silicon diffusion. The generalization of this result - stating that the formation of all suicides, in which the volume density of silicon is much larger than in elementary silicon injects silicon self-intcrstitials into the silicon lattice - gives new insight into suicide formation, silicide-cnhanccd dopant diffusion and the self-diffusion of silicon itself6.

1959 ◽  
Vol 37 (10) ◽  
pp. 1623-1628 ◽  
Author(s):  
J. R. MacEwan ◽  
J. U. MacEwan ◽  
L. Yaffe

The self-diffusion of nickel has been studied in polycrystalline samples by a sectioning technique. There is evidence of grain boundary diffusion below temperatures of 1150 °C. The results obtained between 1150° and 1400 °C are representative of volume diffusion and are represented by the expression[Formula: see text]A comparison is made with the results of other self-diffusion studies using Zener's hypothesis.


2000 ◽  
Vol 55 (3-4) ◽  
pp. 412-414 ◽  
Author(s):  
Hiroyuki Ishida

Abstract The reorientation of the tetrahedral complex anion ZnCl42- and the self-diffusion of the cation in (CH3NH3)2ZnCl4 were studied by 1H NMR spin-lattice relaxation time (1H T1) experiments. In the second highest-temperature phase, the temperature dependence of 1H T1 observed at 8.5 MHz could be explained by a magnetic dipolar-electric quadrupolar cross relaxation between 1H and chlorine nuclei, and the activation energy of the anion motion was determined to be 105 kJ mol -1 . In the highest-temperature phase, the activation energy of the self-diffusion of the cation was determined to be 58 kJ mol -1 from the temperature and frequency dependence of 1H T1


1994 ◽  
Vol 337 ◽  
Author(s):  
D. Gupta

ABSTRACTAvailability of diffusion data is important in the evaluation of the prospect of substituting Cu for Al-Cu metallization for improving electrical and electromigration performance. Measurements have been made of 67Cu radioactive tracer diffusion in Cu, Cu-0.4Zr and several Al-Cu thin films of commonly used compositions. Grain boundary self diffusion in Cu is described by δDb= 1.5xl0-9 exp( — 0.92eV/kT) cm3/ sec. The activation energy for Cu diffusion in Al, Al-l%Cu and Al-0.5Cu-0.15Ti thin films depends on the amount of Cu present and varies in the 0.4 - 1.0 eV range. The measured diffusion parameters in the two alloy systems are compared and contrasted with those available from electromigration studies.


2005 ◽  
Vol 20 (5) ◽  
pp. 1146-1153 ◽  
Author(s):  
Mikhail I. Mendelev ◽  
Hao Zhang ◽  
David J. Srolovitz

We examined the influence of the boundary plane on grain-boundary diffusion in Ni through a series of molecular dynamics simulations. A series of 〈010〉 ∑5 tilt boundaries, including several high symmetry and low symmetry boundary planes, were considered. The self-diffusion coefficient is a strong function of boundary inclination at low temperature but is almost independent of inclination at high temperature. At all temperatures, the self-diffusion coefficients are low when at least one of the two grains has a normal with low Miller indices. The grain boundary self-diffusion coefficient is an Arrhenius function of temperature. The logarithm of the pre-exponential factor in the Arrhenius expression was shown to be nearly proportional to the activation energy for diffusion. The activation energy for self-diffusion in a (103) symmetric tilt boundary is much higher than in boundaries with other inclinations. We discuss the origin of the boundary plane density–diffusion coefficient correlation.


2010 ◽  
Vol 297-301 ◽  
pp. 1371-1376
Author(s):  
Dezső L. Beke

There are a number of well-known empirical relations for diffusion in solids. For example the proportionality between the self-diffusion activation energy and melting point or between the entropy of the diffusion and the ratio of activation energy and the melting point (Zener rule) are perhaps the best known ‘rules of thumb’. We have shown earlier in our Laboratory, that these relations are direct consequences of the similarity of interatomic potentials seen by ions in solids. On the basis of this, similar relations were extended for impurity and self diffusion in binary solid alloys. In this paper, results for binary liquid mixtures will be reviewed. First a minimum derivation of the temperature dependence of the self-diffusion coefficient, D, is presented (minimum derivation in the sense that it states only that the reduced (dimensionless) D should be a universal function of the reduced temperature), using the similarity of interatomic potentials and dimensional analysis. Then the extension of this relation for determination of the pressure and composition dependence of the self-diffusion coefficients is described using pressure and composition dependent scaling parameters (melting point, atomic volume and mass). The obtained universal form (valid for binary liquid alloys) is very useful for the estimation of the temperature, composition and pressure dependence of the self-diffusion coefficients. Finally, the relation for the ratio of the impurity and self-diffusion coefficients is derived.


2011 ◽  
Vol 53 (11) ◽  
pp. 2194-2200 ◽  
Author(s):  
A. A. Vasilyev ◽  
S. F. Sokolov ◽  
N. G. Kolbasnikov ◽  
D. F. Sokolov

1964 ◽  
Vol 17 (5) ◽  
pp. 516 ◽  
Author(s):  
DA Collins ◽  
H Watts

The self-diffusion coefficient of benzene in benzene-cyclohexane mixtures was measured at 15�, 25�, and 35�. Viscosities of the mixtures were measured at the same temperatures. The diffusion coefficient is a maximum, while the viscosity is a minimum at a mole fraction of benzene between 0.6 and 0.8. The activation energy for viscous flow is a minimum in the mole fraction range 0.6-0.8 of benzene. The excess viscosity and the excess activation energy of viscous flow are minimal at a mole fraction 0.5, the same composition at which the maxima occur in excess volume and heat mixing. The product Dn is a linear function of mole fraction.


2014 ◽  
Vol 67 (6) ◽  
pp. 922 ◽  
Author(s):  
Dale J. Codling ◽  
Gang Zheng ◽  
Tim Stait-Gardner ◽  
William S. Price

The study of isomer diffusion provides useful information regarding solvent effects for mixture analysis. Isomers, particularly those with similar hydrodynamic radii, provide a mechanism for probing solute–solvent interactions. Here nuclear magnetic resonance was used to measure the self-diffusion of phenylenediamine isomers in various water–monohydric-alcohol (i.e. methanol, ethanol, 1-propanol, and tert-butanol) solvents. These systems allowed the effect of solvent modulation on isomer diffusion to be examined. It was found that the resonances of phenylenediamine isomers in a mixture were separable via diffusion, with the separation becoming greater at higher concentration of monohydric-alcohols. Unlike previously shown for dihydroxybenzene isomers, all three phenylenediamine isomers were differentiable via diffusion.


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