The Study of Contamination of Carbon, Boron, and Oxygen in LEC-GaAs

1989 ◽  
Vol 163 ◽  
Author(s):  
Y. Itoh ◽  
M. Takai ◽  
H. Fukushima ◽  
H. Kirita
Keyword(s):  
Charged Particle ◽  
Activation Analysis ◽  
Oxygen Concentration ◽  
Ambient Atmosphere ◽  
Segregation Coefficient ◽  
Charged Particle Activation Analysis ◽  
Charged Particle Activation ◽  
Lec Gaas ◽  
Particle Activation ◽  
Equilibrium Segregation

AbstractCarbon in LEC GaAs was found to be introduced as CO from the ambient atmosphere; the oxygen concentration in the crystals decreased with increase in the duration of melting. An equilibrium segregation coefficient of oxygen in GaAs crystals was found by charged particle activation analysis to be 0.1, the value of which was smaller by a factor of 3~4 than that reported before.

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