Laser-Based Area-Selective Processing Techniques for High-Density Interconnects

1989 ◽  
Vol 158 ◽  
Author(s):  
Y.S. Liu ◽  
H. S. Cole
Keyword(s):  
High Density ◽  
Direct Write ◽  
Selective Processing ◽  
Processing Techniques ◽  
Laser Direct Write

ABSTRACTThis paper reviews several laser-based area-selective processing techniques developed for high-density multichip interconnection applications. Key material and process requirements for the development of a viable laser-direct-write interconnect technique on polyimide are addressed.

Area-Selective Laser Processing Techniques for Multichip Interconnect

1989 ◽  
Vol 154 ◽  
Author(s):  
Y.S. Liu ◽  
H. S. Cole
Keyword(s):  
Laser Processing ◽  
Turnaround Time ◽  
Processing Technique ◽  
Yield Enhancement ◽  
Direct Write ◽  
Ic Design ◽  
Direct Energy ◽  
Processing Techniques ◽  
Laser Direct Write ◽  
Application Specific

AbstractThe interest in laser processing technology has increased significantly in recent years because of increasing demands for application-specific IC design and fabrication, yield enhancement, circuit restructuring, and prototyping; all of these benefit from an adaptive processing technique using direct energy for improvement of precision, resolution, process automation, and turnaround time. This paper reviews several laser-patterned metallization techniques developed for high-density multichip interconnection applications. Key material and process requirements for developing a viable laser-direct-write interconnect technique on polyimide are addressed.

Redistribution of pads on a singulated IC die using laser direct-write ablation

2006 ◽  
Vol 29 (1) ◽  
pp. 184-189
Author(s):  
Chengping Zhang ◽  
R. Bartholomew ◽  
P.C. Karulkar
Keyword(s):  
Direct Write ◽  
Laser Direct Write

Picoliter-Scale Protein Microarrays by Laser Direct Write

2002 ◽  
Vol 18 (5) ◽  
pp. 1126-1129 ◽  
Author(s):  
B.R. Ringeisen ◽  
P.K. Wu ◽  
H. Kim ◽  
A. Pique ◽  
R.Y.C. Auyeung ◽  
...  
Keyword(s):  
Protein Microarrays ◽  
Direct Write ◽  
Laser Direct Write

Rapid prototyping of micropower sources by laser direct-write

2004 ◽  
Vol 79 (4-6) ◽  
pp. 783-786 ◽  
Author(s):  
A. Piqué ◽  
C.B. Arnold ◽  
H. Kim ◽  
M. Ollinger ◽  
T.E. Sutto
Keyword(s):  
Rapid Prototyping ◽  
Direct Write ◽  
Laser Direct Write

Fabrication of Hybrid Cell-Microbead Constructs Using Laser Direct-Write of Alginate Microbeads and Adherent Breast Cancer Cells

2013 ◽  
Author(s):  
Andrew D. Dias ◽  
David M. Kingsley ◽  
Douglas B. Chrisey ◽  
David T. Corr
Keyword(s):  
Drug Delivery ◽  
Mammalian Cells ◽  
Hybrid Cell ◽  
High Surface ◽  
High Surface Area ◽  
Volume Ratio ◽  
Direct Write ◽  
Cellular Interactions ◽  
Paracrine Signaling ◽  
Laser Direct Write

Microbeads are becoming popular tools in tissue engineering as 3D microstructure hydrogels. The gel nature of microbeads enables them to sequester soluble factors and mammalian cells, and their high surface area-to-volume ratio allows diffusion between the bead and the environment [1,2]. Microbeads are thus good systems for drug delivery and can serve as 3D microenvironments for cells. To fully maximize their potential as delivery systems and microenvironments, it is highly desirable to create spatially-precise hybrid cultures of microbeads and mammalian cells. Precise placement of microbeads in proximity to patterned cells will allow the study of spatial cellular interactions, paracrine signaling, and drug delivery.

Ultrafast Laser Processing for Lab-on-a-Chip Device Manufacture

2004 ◽  
Vol 850 ◽  
Author(s):  
Koji Sugioka ◽  
Ya Cheng ◽  
Katsumi Midorikawa
Keyword(s):  
Heat Treatment ◽  
Laser Processing ◽  
Lab On A Chip ◽  
Ultrafast Laser ◽  
Wet Etching ◽  
Direct Write ◽  
Electric Control ◽  
Fs Laser ◽  
Laser Direct Write ◽  
Hollow Microstructures

ABSTRACT3D microstructuring of photosensitive glass is demonstrated by femtosecond (fs) laser for lab-on-a-chip manufacture. True 3D hollow microstructures embedded in the glass are fabricated by the fs laser direct write followed by heat treatment and successive wet etching. A variety of microcomponents for a lab-on-a-chip device like a microfluidics, a microvalve, a microoptics, a microlaser, etc. are fabricated by using this technique. The fs laser direct write process is also applied for selective metallization of internal walls of the hollow microstructures embedded in the glass for electric control of movement of the micromechanical components in the lab-on-a-chip device.

Generation of Micrometer-Sized Patterns for Microanalytical Applications Using a Laser Direct-Write Method and Microcontact Printing

1998 ◽  
Vol 70 (22) ◽  
pp. 4645-4652 ◽  
Author(s):  
B. A. Grzybowski ◽  
R. Haag ◽  
N. Bowden ◽  
G. M. Whitesides
Keyword(s):  
Microcontact Printing ◽  
Direct Write ◽  
Laser Direct Write
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