Spin-On Dielectrics: Good News and Bad News!

1989 ◽  
Vol 154 ◽  
Author(s):  
G. Smolinsky ◽  
N. Lifshitz ◽  
V. Ryan
Keyword(s):  
Water Retention ◽  
Electrical Contact ◽  
Dielectric Constants ◽  
The Other ◽  
Good News ◽  
Swelling Properties ◽  
Voltage Sweep ◽  
Silicate Film ◽  
Thermal Oxide ◽  
Solids Content

AbstractFive classes of spin-on dielectrics are discussed: polysilicates, polysiloxanes, polysilsesquioxanes, polyhydrocarbons, and polyimides. The emphasis is on the first three materials because very few polyhydrocarbon spin-on materials are available for study while spin-on polyimides sorb significant amounts of water. The polymer chemistry of the silicates, siloxanes, and silsesquioxanes is linkage through Si-O-Si-O bonds. Polyhydrocarbons are primarily linked through C-C bonds. As the name implies, polyimides are linked through (usually aromatic) imide groups. Because of their polar nature, polyimides, polysilicates, and polysiloxanes have dielectric constants >3, while the large hydrocarbon content of the remaining materials results in a dielectric constant of <3. Films of polysilicates are relatively brittle and thus are limited to a thickness <1 μm. On the other hand, films of polysilsesquioxanes, polyimides, and polyhydrocarbons can be readily deposited to a thickness >1 μm. Polysilicates have high temperature (>900°C) stability and do not react with O2; most polyhydrocarbons decompose above ˜350°C and oxidize readily; some polyimides are stable to 500°C; polysiloxanes and polysilsesquioxanes readily survive 425°C in N2. (Films of the latter two materials are converted to silicates upon heating at high temperatures in O2 or steam.) The infrared spectrum of a 425°C-cured silicate film shows the presense of Si-OH bonds and water, but after a 900°C anneal, the spectrum is almost identical to that of thermal oxide. The spectra of films of polysiloxanes or polysilsesquioxanes do not exhibit Si-OH absorption. Water retention in films is deleterious to the electrical and mechanical (swelling) properties of the dielectric and to making good aluminum-to-aluminum electrical contact through submicron vias. The water leads to a mobile charge (H+) phenomenon that is readily detected by a Triangular Voltage Sweep technique. Except for polysilicates, solutions of the other spin-on materials have reasonably long (weeks-to-months) shelf-lives. Polysilicate solutions are sols and tend to gel; the time to gelling is a function of solids content and solvent. Even though they exhibit shortcomings, polysiloxanes appear to be best suited as interlevel dielectrics in multilevel metalization schemes.

Characterization of Thin Dielectric Films as Copper Diffusion Barriers using Triangular Voltage Sweep

1999 ◽  
Vol 564 ◽  
Author(s):  
S. A. Cohen ◽  
J. Liu ◽  
L. Gignac ◽  
T. Ivers ◽  
D. Armbrust ◽  
...  
Keyword(s):  
Applied Stress ◽  
Carbon Film ◽  
Dielectric Constants ◽  
Dielectric Films ◽  
Voltage Sweep ◽  
Low Dielectric ◽  
Thermal Oxide ◽  
Na Ions ◽  
Silicon Oxynitrides ◽  
Thin Dielectric Films

AbstractAs technology progresses, the need for thinner Cu diffusion barrier caps is becoming more important, and it is advantageous if these barriers have low dielectric constants (κ). Towards this end, we characterized Cu penetration in several thin (35 nm to 70 nm) dielectrics, including silicon nitrides, silicon oxynitrides, an amorphous hydrogenated carbon film, and a methyl silsesquioxane layer. Metal Insulator Silicon (MIS) structures were used as the test vehicle. The barrier dielectrics were deposited on 100 nm thermal oxide which was grown on 2 Ω-cm, n-type Si wafers. After the deposition of 50 nm TEOS capping layers, both Al and Cu dots were evaporated on each wafer through a mask. Both Al and Cu dot samples were stressed at +2.7 MV/cm at 300°C for 10 minutes. For Cu dots, the applied stress pushed Cu ions into the dielectric stack. Stressing Al dots characterized the effects of the stress on the dielectric stacks and the quantity of Na ions in the films. Since C-V shifts are subject to stress-related instabilities in the interfaces as well as within the dielectrics themselves, triangular voltage sweep (TVS) was used after the applied stress to measure the concentration of Cu which reached the underlying thermal oxide film. The sensitivity of the TVS test with the structures used is about 5×109/cm2. Secondary ion mass spectroscopy (SIMS) analyses were performed on some of these samples to verify the electrical results.

Characterization of Thin Dielectric Films as Copper Diffusion Barriers Using Triangular Voltage Sweep

1999 ◽  
Vol 565 ◽  
Author(s):  
S. A. Cohen ◽  
J. Liu ◽  
L. Gignac ◽  
T. Ivers ◽  
D. Armbrust ◽  
...  
Keyword(s):  
Applied Stress ◽  
Carbon Film ◽  
Dielectric Constants ◽  
Dielectric Films ◽  
Voltage Sweep ◽  
Low Dielectric ◽  
Thermal Oxide ◽  
Na Ions ◽  
Silicon Oxynitrides ◽  
Thin Dielectric Films

AbstractAs technology progresses, the need for thinner Cu diffusion barrier caps is becoming more important, and it is advantageous if these barriers have low dielectric constants (κ). Towards this end, we characterized Cu penetration in several thin (35 nm to 70 nm) dielectrics, including silicon nitrides, silicon oxynitrides, an amorphous hydrogenated carbon film, and a methyl silsesquioxane layer. Metal Insulator Silicon (MIS) structures were used as the test vehicle. The barrier dielectrics were deposited on 100 nm thermal oxide which was grown on 2 Ω-cm, n-type Si wafers. After the deposition of 50 nm TEOS capping layers, both Al and Cu dots were evaporated on each wafer through a mask. Both Al and Cu dot samples were stressed at +2.7 MV/cm at 300°C for 10 minutes. For Cu dots, the applied stress pushed Cu ions into the dielectric stack. Stressing Al dots characterized the effects of the stress on the dielectric stacks and the quantity of Na ions in the films. Since C-V shifts are subject to stress-related instabilities in the interfaces as well as within the dielectrics themselves, triangular voltage sweep (TVS) was used after the applied stress to measure the concentration of Cu which reached the underlying thermal oxide film. The sensitivity of the TVS test with the structures used is about 5×109/cm2. Secondary ion mass spectroscopy (SIMS) analyses were performed on some of these samples to verify the electrical results.

Mary Magdalene

2019 ◽  
pp. 427-447
Author(s):  
Ann Graham Brock
Keyword(s):  
New Testament ◽  
The Other ◽  
Good News ◽  
Mary Magdalene ◽  
The New Testament ◽  
Visionary Leader

The New Testament gospels and numerous extracanonical texts portray Mary Magdalene as one of the most significant of Jesus’s disciples, present at Jesus’s crucifixion and primary among the resurrection witnesses. Moreover, many of these ancient sources portray Jesus or heavenly messengers or both commissioning her to tell the other disciples the good news. As a result, many claim apostolic authority for her, and some even call her “apostle of the apostles.” Among key texts that feature her are the Gospel of Philip, Pistis Sophia, and the Manichaean Psalms. She may also be the protagonist in the Gospel of Mary, although a few suppose her to be Mary the Mother or Mary of Bethany. The portrayals of Mary Magdalene often feature her as an especially prominent, outspoken, visionary leader, who, in postresurrection dialogues with Jesus, frequently demonstrates insights beyond other disciples, including Peter, who often challenges her.

Epitaxial Growth and Anisotropic Dielectric Properties of La-Doped Bi4Ti3O12 Thin Films

2007 ◽  
Vol 124-126 ◽  
pp. 177-180
Author(s):  
Jang Sik Lee ◽  
Q.X. Jia
Keyword(s):  
Thin Films ◽  
Dielectric Constant ◽  
Dielectric Properties ◽  
Bottom Electrode ◽  
Dielectric Constants ◽  
The Other ◽  
Field Range ◽  
Anisotropic Dielectric ◽  
Dielectric Nonlinearity ◽  
La Doped

To investigate the anisotropic dielectric properties of layer-structured bismuth-based ferroelectrics along different crystal directions, we fabricate devices along different crystal orientations using highly c-axis oriented Bi3.25La0.75Ti3O12 (BLT) thin films on (001) LaAlO3 (LAO) substrates. Experimental results have shown that the dielectric properties of the BLT films are highly anisotropic along different crystal directions. The dielectric constants (1MHz at 300 K) are 358 and 160 along [100] and [110], respectively. Dielectric nonlinearity is also detected along these crystal directions. On the other hand, a much smaller dielectric constant and no detectable dielectric nonlinearity in a field range of 0-200 kV/cm are observed for films along [001] when c-axis oriented SRO is used as the bottom electrode.

Preparation and Swelling Properties of P(AMPS-co-AM)/ Attapulgite Clay Superabsorbent Composite by Microwave Irradiation

2012 ◽  
Vol 512-515 ◽  
pp. 2394-2398 ◽  
Author(s):  
Ji Hong Xu ◽  
De Xin Tan ◽  
Ling Yan Yan ◽  
Zhong Li
Keyword(s):  
Microwave Irradiation ◽  
Microwave Power ◽  
Water Retention ◽  
Salt Water ◽  
Absorption Capacity ◽  
Water Absorbency ◽  
Swelling Properties ◽  
Superabsorbent Composite ◽  
Speed Up ◽  
Attapulgite Clay

A novel poly(2-acrylamido-2-methylpropa-nesulfonicacid-co-acrylamide) / attapulgite (P(AMPS-co-AM)/APT) high-salt superabsorbent composite was synthesized through graft polymerization in aqueous solution by microwave irradiation. The structure of the composite was characterized by infrared spectra (FTIR).The influence of the content of monomer, microwave power and the ratio of attapulgite clay on water absorbency was investigated. The swelling behaviors and the water retention of Superabsorbent resin with different APT content were also examined. The results show that the graft copolymerization took place between APT and organic monomers. Adding an appropriate amount of APT in resin can effectively improve the absorption capacity and salt-water performance. Microwave power is 390W, APT amount is 7.5% (mass fraction),The water absorbency of resin in distilled water and 0.9wt% NaCl were 1460g / g and 114 g / g. The resin has a faster absorption rate and strong water retention, the appropriate increase the amount of APT can significantly speed up the rate of the resin absorbent and improve its water retention.

scholarly journals Influence of stock on physical and chemical traits of fresh apricot fruit

2013 ◽  
Vol 27 (1) ◽  
pp. 111-114 ◽  
Author(s):  
T. Milošević ◽  
N. Milošević ◽  
I. Glišić ◽  
G. Šekularac
Keyword(s):  
Titratable Acidity ◽  
The Other ◽  
Soluble Solids ◽  
Fruit Firmness ◽  
Soluble Solids Content ◽  
Total Sugars ◽  
Solids Content ◽  
Chemical Traits ◽  
Physical And Chemical ◽  
Fruit Mass

Abstract The study was conducted to determine the effects of Myrobalan rootstock and Blackthorn interstock on fruit physical and chemical traits of five apricot cultivars. The results showed that cultivars grafted on Myrobalan rootstock appear to induce a higher fruit mass when compared with the Blackthorn interstock. Blackthorn interstock showed a tendency to induce a higher soluble solids/titratable acidity ratio than Myrobalan. Values of soluble solids content, total sugars, titratable acidity and fruit firmness between Myrobalan rootstock and Blackthorn interstock were not significant. Regarding cultivars, the greatest fruit mass observed in Roxana in both treatments, and the lowest in Biljana on Myrobalan and in Vera on Blackthorn. The lowest soluble solids, total sugars and soluble solids/titratable acidity ratio were found in Roxana in both variants of grafting, whereas the greatest titratable acidity also observed in Roxana in both cases, respectively. Based on the results from this study, the fruits of Roxana can be recommended for fresh consumption, whereas fruits of the other cultivars can be recommended for processing.

Nanotechnology and Its Applications in Forensic and Criminal Cases

2015 ◽  
pp. 552-564
Author(s):  
Gulnaz T. Javan
Keyword(s):  
Forensic Science ◽  
The Other ◽  
Good News ◽  
Medical Applications ◽  
Future Prospects ◽  
Criminal Cases ◽  
The World ◽  
The Future ◽  
Forensic Tools ◽  
Richard Feynman

When Dr. Richard Feynman first gave the good news in 1959 that nanotechnology was on its way to change or perhaps transform the world of technology, many people might have considered his concepts too futuristic to be realized. Criminals, on the other hand, would not have known how effective nanotechnological tools would become in solving crimes in a few decades. Among some of the medical applications of the technology are drug production, diagnostics, and production of medical as well as forensic tools and devices. Forensic science can be described as the sum of scientific tests or techniques used in the investigation of crimes. This chapter is, therefore, aimed at introducing and discussing nanotechnology as applied in forensic science along with instrumentation used in performing nano-analysis. The future prospects of the technology as employed in forensic science and toxicity of nanomaterials are also dealt with in this chapter.

Coupling Swelling and Water Retention Processes in Compacted Bentonite

2011 ◽  
Vol 6 (1) ◽  
Author(s):  
Antti Lempinen
Keyword(s):  
Water Retention ◽  
Spent Nuclear Fuel ◽  
Effective Strain ◽  
Swelling Pressure ◽  
Model Parameters ◽  
Confined Water ◽  
Swelling Properties ◽  
Compacted Bentonite ◽  
Buffer Material ◽  
Swelling Factor

Compacted bentonite is the main candidate for buffer material in several plans for spent nuclear fuel repositories. One of its important properties is high swelling capacity, which is caused by interaction between water molecules and exchangeable cations. This interaction makes bentonite behave differently from capillary materials. In this article, a model for thermo-hydro-mechanical state of partially water saturated bentonite is presented. It couples the water retention and swelling properties with introduction of the swelling factor in effective strain. The Helmholz energy density determines the state with a relatively small set of independent parameters: swelling pressure, swelling factor, maximum confined water content and the reference state. The model parameters are determined from experimental data for FEBEX bentonite, and as a simple consistency check, confined suction curves are calculated and compared to test results. Consistency of the model with observations on nano- and microscale of bentonite is also discussed.

Visual Target Acquisition: Bridging the Gap from Vision Research to Applied Models

1992 ◽  
Vol 36 (18) ◽  
pp. 1418-1419
Author(s):  
Theodore J. Doll
Keyword(s):  
Vision Research ◽  
Visual Target ◽  
Lessons Learned ◽  
The Other ◽  
Bad News ◽  
Good News ◽  
Target Acquisition ◽  
Ground Vehicles ◽  
Desert Storm ◽  
Highly Effective

One of the lessons learned in Desert Storm is that visual and electro-optical (VISEO) systems are highly effective. Most of us recall seeing CNN footage of EO sensors acquiring targets and guiding weapons to destroy the target. The effectiveness of VISEO systems is the good news. The bad news is that the other side is likely to be equipped with similar VISEO systems in the next war. Our personnel and materiel are therefore likely to be highly vulnerable to such systems in future conflicts. There is an urgent need to make our weapons systems, especially ground vehicles, less conspicuous on the battlefield, i.e., to develop more effective camouflage and signature suppression techniques.

Investigation of the dielectric and thermal properties of sintered Li1−x Ta1−3x Ti4xO3 solid solution ceramics

1987 ◽  
Vol 2 (5) ◽  
pp. 588-594 ◽  
Author(s):  
K. K. Deb
Keyword(s):  
Solid Solution ◽  
Heat Capacity ◽  
Curie Temperature ◽  
Ceramic Materials ◽  
Dielectric Constants ◽  
The Other ◽  
Metal Alkoxide ◽  
Dielectric Losses ◽  
Detector Performance ◽  
Capacity Data

A series of twelve Li1−x Ta1−3x Ti4xO3 solid solution ceramics was sintered following the low-temperature metal alkoxide routes. Measurements of dielectric constants, dielectric losses, and heat capacities as functions of temperature and frequency are presented. The Curie temperature (Tc) in comparison to LiTaO3 was reduced from 620°C to about 358°C in the Li0.91 Ta0.73 Ti0.36O3 ceramics. The heat capacity data showed no dependence on the bulk density or grain size. Also the mechanical properties of the undoped crystals appear to stay undisturbed. On the other hand, an apparently abnormal dependence of the Curie temperature on density was found. Heat capacity and dielectric loss decreased while the dielectric constant increased with the addition of Ti+4 doping in the LiTaO3 structure. Overall, a good detector performance might indeed be obtained from these ceramic materials if they can be poled reproducibly.

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