On the Properties of Weakly Absorbing Highly Conductive SiC Thin Films Prepared in a TCDDC System
Keyword(s):
ABSTRACTp- and n-type weakly absorbing highly conductive (σ>0.1(Ωcm)-1) SiC thin films with similar structural and optoelectronic properties have been prepared in a TCDDC reactor. These films contain Si microcrystals embedded in an amorphous Si:O:C:H matrix. C is preferentially incorporated as stoichiometric SiC, whereas O is present mainly as suboxide. Absorption coefficients smaller than cr-Si are observed for films containing about 20at% C and 25at% O. From diffraction studies there is no evidence for the presence of SiC crystallites. Photoluminescence studies show a peak at about 1.68eV, similar to gd a-SiC:H of comparable optical properties.
2021 ◽
2012 ◽
Vol 38
(3)
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pp. 2261-2267
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2015 ◽
Vol 2
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pp. 046401
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2020 ◽
Vol 12
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pp. 03023-1-03023-6