Molecular Beam Epitaxy on the (NH4)2Sx-Treated Surface of GaAs

1989 ◽  
Vol 148 ◽  
Author(s):  
H. Oigawa ◽  
M. Kawabe ◽  
J.-F. Fan ◽  
Y. Nannichi
Keyword(s):  
Heat Treatment ◽  
Low Temperature ◽  
Molecular Beam ◽  
Schottky Barrier Height ◽  
Surface States ◽  
Monomolecular Layer ◽  
Ammonium Sulfide ◽  
Conventional Heat Treatment ◽  
Low Temperature Gaas ◽  
Excess Sulfur

ABSTRACTWe have found that treatment with a solution of ammonium sulfide containing excess sulfur [(NH4) 2Sx] produced a stabilized surface of GaAs. The treated surface is covered with a monomolecular layer of sulfur, and oxygen atoms are prohibited from adsorbing chemically on this surface. We checked the durability of the treated surface to heat treatment to find that it was stable up to more than 500 °C. Epitaxial growth of an Al film was demonstrated on the (NH4) 2Sx-treated surface. The presence of sulfur atoms at the interface by this treatment was found to suppress the chemical reaction between the metal and GaAs. Low temperature GaAs epitaxy was demonstrated on the sulfide treated surface without conventional heat treatment. The surface treatment correlates with changes in Schottky barrier height with various metals, which suggests that the surface states of GaAs are decreased remarkably.

Electrical Characterization of Low Temperature GaAs Layers, and Observation of the Extremely Large Carrier Concentrations in Undoped Material

1991 ◽  
Vol 241 ◽  
Author(s):  
Bijan Tadayon ◽  
Mohammad Fatemi ◽  
Saied Tadayon ◽  
F. Moore ◽  
Harry Dietrich
Keyword(s):  
Molecular Beam Epitaxy ◽  
Low Temperature ◽  
Substrate Temperature ◽  
Molecular Beam ◽  
Electrical Characterization ◽  
Physical Characteristics ◽  
Hall Measurements ◽  
Undoped Material ◽  
Low Temperature Gaas

ABSTRACTWe present here the results of a study on the effect of substrate temperature, Ts, on the electrical and physical characteristics of low temperature (LT) molecular beam epitaxy GaAs layers. Hall measurements have been performed on the asgrown samples and on samples annealed at 610 °C and 850 °C. Si implantation into these layers has also been investigated.

Laser Quality AlGaAs-GaAs Quantum Wells Grown on Low Temperature GaAs

1991 ◽  
Vol 241 ◽  
Author(s):  
Y. Hwang ◽  
D. Zhang ◽  
T. Zhang ◽  
M. Mytych ◽  
R. M. Kolbas
Keyword(s):  
Molecular Beam Epitaxy ◽  
Low Temperature ◽  
Quantum Wells ◽  
Barrier Layer ◽  
Molecular Beam ◽  
Optical Quality ◽  
First Order ◽  
Gaas Buffer Layer ◽  
Low Temperature Gaas ◽  
Lt Gaas

ABSTRACTIn this work we demonstrate that photopumped quantum wellheterostructure lasers with excellent optical quality can be grown ontop of a LT GaAs buffer layer by molecular beam epitaxy. Hightemperature thermal annealing of these lasers blue-shifts the laseremission wavelengths but the presence/absence of a LT GaAs layerhad little effect on the overall laser thresholds. Also, to first order itwas not necessary to include an AlAs barrier layer to preventadverse effects (as has been necessary in the gate stack of MESFETs to prevent carrier compensation).

Photoreflectance study of Si delta‐doped low‐temperature GaAs grown by molecular beam epitaxy

1995 ◽  
Vol 77 (5) ◽  
pp. 2124-2127 ◽  
Author(s):  
T. M. Cheng ◽  
C. Y. Chang ◽  
T. M. Hsu ◽  
W. C. Lee ◽  
J. H. Huang
Keyword(s):  
Molecular Beam Epitaxy ◽  
Low Temperature ◽  
Molecular Beam ◽  
Low Temperature Gaas

Temperature‐dependent transport properties ofn+GaAs/low‐temperature GaAs/n+GaAs structures grown by molecular beam epitaxy

1996 ◽  
Vol 79 (11) ◽  
pp. 8488-8492 ◽  
Author(s):  
Jenn‐Fang Chen ◽  
Nie‐Chuan Chen ◽  
Shih‐Yang Chiu ◽  
Pie‐yong Wang ◽  
Wei‐I Lee ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Low Temperature ◽  
Transport Properties ◽  
Molecular Beam ◽  
Temperature Dependent ◽  
Dependent Transport ◽  
Low Temperature Gaas

Tem Study of the Structure of Mbe GaAs Layers Grown at Low Temperature

1990 ◽  
Vol 198 ◽  
Author(s):  
Zuzanna Liliental-Weber
Keyword(s):  
Electron Microscopy ◽  
Low Temperature ◽  
Molecular Beam ◽  
Critical Thickness ◽  
Stacking Faults ◽  
Structural Quality ◽  
Crystalline Perfection ◽  
Transmission Electron ◽  
Low Temperature Gaas

ABSTRACTThe structural quality of GaAs layers grown at 200°C by molecular beam epitaxy (MBE) was investigated by transmission electron microscopy (TEM). We found that a high crystalline perfection can be achieved in the layers grown at this low temperature for thickness up to 3 μm. In some samples we observed pyramid-shaped defects with polycrystalline cores surrounded by microtwins, stacking faults and dislocations. The size of these cores increased as the growth temperature was decreased and as the layer thickness was increased. The upper surface of layers with pyramidal defects became polycrystalline at a critical thickness of the order of 3μm. We suggested that the low-temperature GaAs becomes polycrystalline at a critical thickness either because of a decrease in substrate temperature during growth or because strain induced by excess As incorporated in these layers leads to the formation of misoriented GaAs nuclei, thereby initiating polycrystalline growth. The pyramidal shape of the defects results from a growth-rate hierarchy of the low index planes in GaAs.

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