Excimer Laser Induced Photochemistry of Silane-Ammonia Mixtures

1988 ◽  
Vol 131 ◽  
Author(s):  
J. M. Jasinski ◽  
D. B. Beach ◽  
R. D. Estes
Keyword(s):  
Mass Spectrometry ◽  
Steady State ◽  
Excimer Laser ◽  
Molecular Beam ◽  
Laser Shot ◽  
Time Resolved ◽  
Single Laser ◽  
Arf Excimer Laser ◽  
193 Nm

ABSTRACTSteady-state and time resolved molecular beam sampling mass spectrometry have been used to study the ArF excimer laser induced photochemistry of silaneammonia mixtures at 193 nm. Under both steady state and single laser shot conditions, products as complicated as tetraaminosilane are formed promptly. A mechanism which accounts for the formation of all observed products is proposed and evaluated.

scholarly journals 193-nm deep-UV lithography system using a line-narrowed ArF excimer laser

1993 ◽  
Author(s):  
Bruce W. Smith ◽  
Malcolm C. Gower ◽  
Mark Westcott ◽  
Lynn F. Fuller
Keyword(s):  
Excimer Laser ◽  
Uv Lithography ◽  
Arf Excimer Laser ◽  
Deep Uv ◽  
193 Nm ◽  
Lithography System

scholarly journals Fabrication of Superhydrophobic Silicone Rubber with Periodic Micro/Nano-Suction Cup Structure by ArF Excimer Laser-Induced Photodissociation

Nanomaterials ◽  
2019 ◽  
Vol 9 (6) ◽  
pp. 870 ◽  
Author(s):  
Masayuki Okoshi
Keyword(s):  
Excimer Laser ◽  
Silicone Rubber ◽  
Focal Point ◽  
Pulse Number ◽  
Entire Surface ◽  
Suction Cup ◽  
Atomic Force ◽  
Superhydrophobic Property ◽  
Arf Excimer Laser ◽  
193 Nm

A 193-nm ArF excimer laser was used to induce the photodissociation of Si–O bonds of silicone rubber in order to fabricate a periodic micro/nano-suction cup silicone structure, approximately 1 μm in diameter and 2 μm in height at regular intervals of 2.5 μm. The laser was focused on Al-coated silicone rubber by each silica glass microsphere 2.5 μm in diameter, which covered the entire surface of the silicone rubber. The silicone rubber underneath each microsphere photochemically swelled after laser-ablating the coated Al to limit the diameter of the swelling. Simultaneously, the coated Al was able to adjust the focal point to the surface of the silicone rubber to form a hole approximately 500 nm in diameter, centered at the swollen silicone. The dependences of the thickness of the coated-Al and the laser pulse number are discussed, based on the observations of a scanning electron microscope (SEM) and an atomic force microscope (AFM). The superhydrophobic property of the fabricated micro/nano-suction cup structure was successfully found.

Efficient Photochemical Conversion of N2O into N2and O2by 193-nm-ArF-excimer Laser in N2or Air at Atmospheric Pressure

2005 ◽  
Vol 34 (6) ◽  
pp. 812-813 ◽  
Author(s):  
Masaharu Tsuji ◽  
Hiroshi Sako ◽  
Kenji Noda ◽  
Makoto Senda ◽  
Taro Hamagami ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Atmospheric Pressure ◽  
Photochemical Conversion ◽  
Arf Excimer Laser ◽  
193 Nm
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