Argon Ion and Excimer Laser Induced Epitaxy of GaP
Keyword(s):
ABSTRACTLaser-induced epitaxial growth of GaP has been achieved using both pyrolytic and photolytic reactions. A focused beam from an argon ion laser operating at 514.5 nm was used to ‘direct-write’ epitaxial microstructures of GaP on silicon using a pyrolytic process. An ArF excimer laser has also been used to demonstrate homoepitaxy utilizing the photolytic process.
2005 ◽
Vol 23
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pp. 43-46
1972 ◽
Vol 5
(10)
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pp. 1807-1814
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Keyword(s):
1972 ◽
Vol 11
(10)
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pp. 1501-1507
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