Study of Conditioner Abrasives in Chemical Mechanical Planarization

2009 ◽  
Vol 1157 ◽  
Author(s):  
Chhavi Manocha ◽  
Ashok Kumar ◽  
Vinay K. Gupta
Keyword(s):  
Manufacturing Industry ◽  
Surface Defects ◽  
Chemical Mechanical Planarization ◽  
Factors Affecting ◽  
Polishing Pad ◽  
Copper Wafers ◽  
Pad Wear ◽  
Polishing Pads

AbstractChemical Mechanical Planarization (CMP) has emerged as the central technology for polishing wafers in the semiconductor manufacturing industry to make integrated multi-level devices. Both chemical and mechanical processes work simultaneously to achieve local and global planarization. Although extensive research has been carried out to understand the various factors affecting the CMP process, many aspects remain unaddressed. One such aspect of CMP is the role of abrasives in the process of conditioning. Abrasives play an important role during conditioning to regenerate the clogged polishing pads. This research is focused on the study of abrasives in the process of conditioning with a focus on the size of abrasives. With diamond being widely used as an abrasive for conditioning the polishing pad, five different sizes of diamonds ranging from 0.25μm to 100μm were selected to condition the commercially available IC 1000 polishing pad. Properties like pad roughness and pad wear were measured to understand the effect of the abrasive size on the pad morphology and pad topography. In-situ ‘coefficient of friction’ was also monitored on the CETR bench top tester. The final impact was seen in the form of surface defects on the polished copper wafers using optical microscopy.

Novel Measurement Technique on 3D Surface Topography of Polishing Pad

2008 ◽  
Vol 53-54 ◽  
pp. 265-272
Author(s):  
Dong Ming Guo ◽  
N. Qin ◽  
Ren Ke Kang ◽  
Zhu Ji Jin
Keyword(s):  
Surface Topography ◽  
Chemical Mechanical Planarization ◽  
Sampling Interval ◽  
3D Measurement ◽  
Sampling Area ◽  
Polishing Pad ◽  
3D Surface ◽  
3D Surface Topography ◽  
Planarization Process ◽  
Polishing Pads

Among the properties of polishing pad, the surface roughness plays a crucial role in CMP (Chemical Mechanical Planarization) process. However, there is no acknowledged standard for measuring and characterizing the roughness of pad surface in 3D measurement. In this paper Talysurf CLI 2000 working on the principle of dynamic confocal measurement was initially suggested to measure the 3D surface topography of polishing pads through theoretical and experimental analysis. In addition, based on the Nyquist folding frequency and the statistical theory, a selection technique for sampling interval and sampling area was proposed and verified through experiments. The results showed that Talysurf CLI 2000 is more suitable than NewView to measure the 3D surface topography of polishing pads. 2μm sampling interval, 0.5×0.5mm2 sampling area and 10μm interval, 1×1mm2 area are respectively recommended for IC1000/SubaIV and SubaIV polishing pad.

scholarly journals In situ imaging of two-dimensional surface growth reveals the prevalence and role of defects in zeolite crystallization

2020 ◽  
Vol 117 (46) ◽  
pp. 28632-28639
Author(s):  
Madhuresh K. Choudhary ◽  
Rishabh Jain ◽  
Jeffrey D. Rimer
Keyword(s):  
Silica Nanoparticles ◽  
Rational Design ◽  
Surface Defects ◽  
Surface Growth ◽  
Two Dimensional ◽  
Crystal Surfaces ◽  
Structure Directing Agent ◽  
Layered Growth

Zeolite crystallization predominantly occurs by nonclassical pathways involving the attachment of complex (alumino)silicate precursors to crystal surfaces, yet recurrent images of fully crystalline materials with layered surfaces are evidence of classical growth by molecule attachment. Here we use in situ atomic force microscopy to monitor three distinct mechanisms of two-dimensional (2D) growth of zeolite A where we show that layer nucleation from surface defects is the most common pathway. Direct observation of defects was made possible by the identification of conditions promoting layered growth, which correlates to the use of sodium as an inorganic structure-directing agent, whereas its replacement with an organic results in a nonclassical mode of growth that obscures 2D layers and markedly slows the rate of crystallization. In situ measurements of layered growth reveal that undissolved silica nanoparticles in the synthesis medium can incorporate into advancing steps on crystal surfaces to generate defects (i.e., amorphous silica occlusions) that largely go undetected in literature. Nanoparticle occlusion in natural and synthetic crystals is a topic of wide-ranging interest owing to its relevance in fields spanning from biomineralization to the rational design of functional nanocomposites. In this study, we provide unprecedented insight into zeolite surface growth by molecule addition through time-resolved microscopy that directly captures the occlusion of silica nanoparticles and highlights the prevalent role of defects in zeolite crystallization.

The Effect of Wafer Shape on Slurry Film Thickness and Friction Coefficients in Chemical Mechanical Planarization

2000 ◽  
Vol 613 ◽  
Author(s):  
Joseph Lu ◽  
Jonathan Coppeta ◽  
Chris Rogers ◽  
Vincent P. Manno ◽  
Livia Racz ◽  
...  
Keyword(s):  
Film Thickness ◽  
Drag Force ◽  
Chemical Mechanical Planarization ◽  
Fluid Film ◽  
Ex Situ ◽  
Local Pressure ◽  
Dual Emission ◽  
Polishing Pad ◽  
Fluid Film Thickness

ABSTRACTThe fluid film thickness and drag during chemical-mechanical polishing are largely dependent on the shape of the wafer polished. In this study we use dual emission laser induced fluorescence to measure the film thickness and a strain gage, mounted on the polishing table, to measure the friction force between the wafer and the pad. All measurements are taken during real polishing processes. The trends indicate that with a convex wafer in contact with the polishing pad, the slurry layer increases with increasing platen speed and decreases with increasing downforce. The drag force decreases with increasing platen speed and increases with increasing downforce. These similarities are observed for both in-situ and ex-situ conditioning. However, these trends are significantly different for the case of a concave wafer in contact with the polishing pad. During ex-situ conditioning the trends are similar as with a convex wafer. However, in-situ conditioning decreases the slurry film layer with increasing platen speed, and increases it with increasing downforce in the case of the concave wafer. The drag force increases with increasing platen speed as well as increasing downforce. Since we are continually polishing, the wafer shape does change over the course of each experiment causing a larger error in repeatability than the measurement error itself. Different wafers are used throughout the experiment and the results are consistent with the variance of the wafer shape. Local pressure measurements on the rotating wafer help explain the variances in fluid film thickness and friction during polishing.

Role Of Surface Defects In Metal-Ceramic Bonding

1991 ◽  
Vol 238 ◽  
Author(s):  
S. M. Mukhopadhyay ◽  
C. S. Chen
Keyword(s):  
Photoelectron Spectroscopy ◽  
Active Sites ◽  
Surface Defects ◽  
Second Phase ◽  
Interfacial Chemistry ◽  
X Ray ◽  
Thin Oxide Film ◽  
Metal Ceramic

ABSTRACTThe interfacial chemistry between Ni and Al2O3 has been studied during the initial stages of bonding. We have evaporated thin films of Ni on different alumina substrates (thin oxide film on metallic Al, polished and scratched sapphire crystals, surface with second phase precipitates) and have analyzed how the interface grows, in situ, using X-ray Photoelectron Spectroscopy. It was found that a certain fraction of the first monolayer of Ni which forms on the alumina surface undergoes charge transfer to form NiO. This is due to oxygen-active sites such as unattached oxygen bonds on the surface. A measure of the concentration of such sites can therefore be obtained from the submonolayer fraction of Ni that gets oxidized. It was found that a rough surface offered less oxidation sites for Ni than a smooth one whereas a surface with second phase MgAI2O4 (spinel) precipitates offered more oxidation sites. Also, there is much less oxidation on a thin film of amorphous alumina grown on metallic Al than on a polished bulk sapphire surface. The implications of these studies to further understanding of the metal-ceramic interface have been discussed.

scholarly journals An experimental study of the behaviour of two rockfills accounting for the effects of degree of saturation

2020 ◽  
Vol 195 ◽  
pp. 03033
Author(s):  
Roberta Ventini ◽  
Alessandro Flora ◽  
Stefania Lirer ◽  
Claudio Mancuso ◽  
Antonio Cammarota
Keyword(s):  
Mechanical Characterization ◽  
Degree Of Saturation ◽  
Size Distributions ◽  
Factors Affecting ◽  
Grain Crushing ◽  
Grain Size Distributions ◽  
Oedometer Tests

Rockfill dams have become more and more recognized for their safety, economy and adaptability to widely varying site conditions. As a contribution to the understanding of the main factors affecting the rockfill behaviour, the paper reports and discusses experimental data on several aspects relevant to the interpretation and analysis of their in-situ response. The experimental programme involved three series of oedometric tests on specimens of two different gravels having the same grading, reconstituted at the same initial relative density. Experimental observations on rockfills compressibility are presented and discussed: attention is paid to the role of degree of saturation (Sr) through the analysis of “driest”, “fully saturated” conditions, and the transition from one to the other. Grain crushing tests on dry and saturated soil particles are also reported. Grain size distributions of the specimens, both after compaction and after the oedometer tests, are compared in the paper. The results show that the effect of Sr cannot be overlooked in the mechanical characterization of the material, especially in rockfill/stress conditions prone to crushing

Researching the factors influencing the satisfaction of master students at VNU School of Interdisciplinary Studies

2019 ◽  
Vol 35 (3) ◽  
Author(s):  
Do Huy Thuong ◽  
Nguyen Thi Phuong Hong
Keyword(s):  
Service Industry ◽  
Interdisciplinary Studies ◽  
Number Of Solutions ◽  
Factors Affecting ◽  
Training Institutions ◽  
Market Needs ◽  
Market Strategies ◽  
Students Satisfaction ◽  
Training Service

Improving the quality in order to keep up with the trend in the world is the vital task of training institutions today. Training institutions need to grasp market needs and satisfy the requirements of customers - learners. Nadiri, H., Kandampully, J & Hussain, K. (2009) argue that the managers in education need to apply market strategies that are being used by manufacturing and business enterprises and need to be aware that the role of training institutions is a service industry which is responsible for satisfying learner needs (Elliott & Shin, 2002). Currently, there have been many researches on students’ satisfaction. However, each research has its own objectives and is conducted on different scales. This study is implemented to provide information about the factors affecting master students’ satisfaction with the training service at VNU School of Interdisciplinary Studies (VNU SIS). Through it, the research offers a number of solutions to improving the satisfaction level of the master students at VNU SIS in the coming time.

Business Aviation in Russia: Specific Features and Prospects of Development

2020 ◽  
Vol 26 (1) ◽  
pp. 86-93
Author(s):  
D. V. Slivinsky ◽  
I. A. Fomina ◽  
D. G. Menshikh
Keyword(s):  
Systems Approach ◽  
National Policy ◽  
Civil Aviation ◽  
Economic Growth Rate ◽  
Factors Affecting ◽  
Organization And Management ◽  
Transport Services ◽  
Business Aviation ◽  
Wide Range

The presented study determines the role of business aviation in the modern economy and examines the specific features of its development in Russia.Aim. The study aims to analyze the development of business aviation in Russia and its correlation with economic development in general.Tasks. The authors determine the benefits of business aviation as a business tool, examine the specific features of the Russian business aviation market and problems of its development, and identify factors that affect the development of business aviation in Russia.Methods. This study uses the methods of comparative and retrospective analysis, cross-country comparison, systems approach, and expert analytics.Results. Business aviation is a new segment of civil aviation for Russia. Therefore, it is advisable to rely on foreign practices in the management of its development. In many countries, business aviation is a separate industry that specializes in providing transport services to a wide range of corporate clients and/or individuals. The development of this industry is associated with the economic growth rate and the development level of the national economy, and also depends on the national institutional specifics. This study describes the specific features of development of business aviation in Russia and problems arising in the organization and management of this type of business.Conclusions. The authors develop a system of factors affecting the development of business aviation in Russia, describe the major problems of this industry, and propose solutions. The results of this study can be used in the development (adjustment) of business aviation development strategies in Russia both at the industrial and corporate level, and in the implementation of the national policy in this field.

The methodology of experimental research of the feed components extrusion process in order to improve its energy performance

2020 ◽  
pp. 147-152
Author(s):  
E. M. Ratnikov ◽  
D. O. Milko
Keyword(s):  
Experimental Studies ◽  
Energy Performance ◽  
Extrusion Process ◽  
Mathematical Methods ◽  
Screw Extruder ◽  
Mathematical Planning ◽  
Factors Affecting ◽  
Extrusion Processing ◽  
Definition Of

Annotation Purpose. Development of a program and methods for conducting experimental studies of the extrusion process with the definition of parameters and modes of operation of the extruder to improve its energy performance. Methods. Methods of mathematical statistics, synthesis, analysis, description and modeling were used. Results. The application of mathematical methods, in particular mathematical planning, reduces the number of experiments several times, and allows to evaluate the role of influencing factors, obtain a mathematical model of the process and determine the optimal conditions for its parameters and modes, etc. Conclusions. The methodology for experimental studies of a screw extruder is presented with the necessary equipment and methodology for processing the obtained experimental data. A mathematical method of planning, which reduces the number of experiments several times, allows us to evaluate the role of factors affecting productivity and energy intensity is presented. Keywords: extruder, auger, nutrients, research methodology, extrusion, processing, feed.

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