Degradation of Micron-Sized Silicide Lines on Polycrystalline Silicon

1987 ◽  
Vol 106 ◽  
Author(s):  
J. Randall Phillips ◽  
Lung-Ru Zheng ◽  
James W. Mayer

ABSTRACTThe thermal stability of silicide fine lines on undoped CVD polycrystalline silicon was investigated. Heat treatments were in vacuum at temperatures up to 950 ° C. We observed that fine silicide lines on undoped polysilicon degrade during vacuum annealing. Voids and hillocks are formed as silicon diffuses out from the fine grained poly-Si, undergoes long-range transport through the silicide, and recrystallizes into large grains. The phenomenon is similar to that seen previously in planar samples, but fine lines were found to degrade at lower temperatures and especially along line edges. Lines of two refractory metal silicides, TiSi2 and CrSi2, and one near-noble silicide, CoSi2 were examined.

2001 ◽  
Vol 40 (Part 1, No. 11) ◽  
pp. 6307-6310
Author(s):  
Jong-Uk Bae ◽  
Dong Kyun Sohn ◽  
Ji-Soo Park ◽  
Chang Hee Han ◽  
Jin Won Park ◽  
...  

Tellus B ◽  
2011 ◽  
Vol 63 (3) ◽  
Author(s):  
Borgar Aamaas ◽  
Carl Egede Bøggild ◽  
Frode Stordal ◽  
Terje Berntsen ◽  
Kim Holmén ◽  
...  

Grana ◽  
1988 ◽  
Vol 27 (3) ◽  
pp. 203-207 ◽  
Author(s):  
Annie Gérard Peeters ◽  
Heinrich Zoller

2008 ◽  
Vol 8 (11) ◽  
pp. 2999-3014 ◽  
Author(s):  
A. van Donkelaar ◽  
R. V. Martin ◽  
W. R. Leaitch ◽  
A. M. Macdonald ◽  
T. W. Walker ◽  
...  

Abstract. We interpret a suite of satellite, aircraft, and ground-based measurements over the North Pacific Ocean and western North America during April–May 2006 as part of the Intercontinental Chemical Transport Experiment Phase B (INTEX-B) campaign to understand the implications of long-range transport of East Asian emissions to North America. The Canadian component of INTEX-B included 33 vertical profiles from a Cessna 207 aircraft equipped with an aerosol mass spectrometer. Long-range transport of organic aerosols was insignificant, contrary to expectations. Measured sulfate plumes in the free troposphere over British Columbia exceeded 2 μg/m3. We update the global anthropogenic emission inventory in a chemical transport model (GEOS-Chem) and use it to interpret the observations. Aerosol Optical Depth (AOD) retrieved from two satellite instruments (MISR and MODIS) for 2000–2006 are analyzed with GEOS-Chem to estimate an annual growth in Chinese sulfur emissions of 6.2% and 9.6%, respectively. Analysis of aircraft sulfate measurements from the NASA DC-8 over the central Pacific, the NSF C-130 over the east Pacific and the Cessna over British Columbia indicates most Asian sulfate over the ocean is in the lower free troposphere (800–600 hPa), with a decrease in pressure toward land due to orographic effects. We calculate that 56% of the measured sulfate between 500–900 hPa over British Columbia is due to East Asian sources. We find evidence of a 72–85% increase in the relative contribution of East Asian sulfate to the total burden in spring off the northwest coast of the United States since 1985. Campaign-average simulations indicate anthropogenic East Asian sulfur emissions increase mean springtime sulfate in Western Canada at the surface by 0.31 μg/m3 (~30%) and account for 50% of the overall regional sulfate burden between 1 and 5 km. Mean measured daily surface sulfate concentrations taken in the Vancouver area increase by 0.32 μg/m3 per 10% increase in the simulated fraction of Asian sulfate, and suggest current East Asian emissions episodically degrade local air quality by more than 1.5 μg/m3.


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