Dopant Diffusion and Grain Growth in Arsenic-Implanted Poly-Si

1987 ◽  
Vol 106 ◽  
Author(s):  
L. R. Zheng ◽  
L. S. Hung ◽  
J. W. Mayer

ABSTRACTThe diffusion behavior of arsenic and the grain growth of Si in arsenic doped poly-Si were investigated by MeV4 He2+ backscattering techniques and transmission electron microscopy. By implanting arsenic ions into poly-Si films the surface portion was made amorphous and crystallized upon annealing. In-situ mssurements showed crystal nucleation and growth at temperatures of 650 – 700° C with a dimension comparable to the thickness of the amorphous layer. Annealing at temperatures up to 850°C increased the number of the large grains, but the average grain size did not change significantly. In the unimplanted region grains retained their initial size until 885°C, although implanted arsenic was found to diffuse into this region along grain boundaries. At 885°C penetration of arsenic into the interior of grains caused significant grain growth. We also found that single implants of boron somewhat increased grain size, whereas boron codoped with arsenic appeared to reduce the effect of arsenic doping. These observations support the hypothesis that the enhanced growth rate and the electrical activity of Si near the grain boundary are closely interrelated.

2010 ◽  
Vol 638-642 ◽  
pp. 1077-1082 ◽  
Author(s):  
Yasuhiro Yogo ◽  
Kouji Tanaka ◽  
Koukichi Nakanishi

An in-situ observation method for structures at high temperature is developed. The new observation device can reveal grain boundaries at high temperature and enables dynamic observation of these boundaries. Grain growth while maintaining microstructure at high temperature is observed by the new observation device with only one specimen for the entire observation, and grain sizes are quantified. The quantifying process reveals two advantages particular to the use of the new observation device: (1) the ability to quantify grain sizes of specified sizes and (2) the results of average grain size for many grains have significantly less errors because the initial structure is the same for the entire observation and the quantifying process. The new observation device has the function to deform a specimen while observing structures at high temperature, so that enables it to observe dynamic recrystallization of steel. The possibility to observe recrystallization is also shown.


1990 ◽  
Vol 187 ◽  
Author(s):  
James S. Im ◽  
Harry A. Atwater

AbstractThe nucleation and transformation kinetics of the amorphous-to-crystal transition in Si films under 1.5 MeV Xe+ irradiation have been investigated by means of in situ transmission electron microscopy in the temperature range T = 480–580°C. After an incubation period during which negligible nucleation occurs, a constant nucleation rate was observed in steady state, suggesting homogeneous nucleation. A significant enhancement in nucleation rate during high energy ion irradiation (6 orders of magnitude) was observed as compared with thermal crystallization, with an apparent activation energy of Qn = 3.9 ± 0.75 eV. Independent analyses of the temperature dependence of the incubation time, the crystal growth rate, and nucleation rate suggest that interface rearrangement kinetics and not the thermodynamic barrier to crystallization, are affected by ion irradiation.


1995 ◽  
Vol 382 ◽  
Author(s):  
Toshio Itoh ◽  
Robert Sinclair

ABSTRACTReactions between Fe and amorphous carbon (a-C) below 600ºC have been investigated. In situ annealing in a transmission electron microscopy (TEM) was performed on a-C/Fe/a-C trilayer films deposited by DC sputtering. As-deposited films showed a well defined tri-layered structure and an average Fe grain size of about 50Å. Cementite (Fe3C) grains appeared in the Fe layer by annealing around 300ºC. As the annealing temperature was raised, the number and size of the cementite grains increased. When the annealing temperature reached 500ºC, the Fe layer completely turned into cementite with an average grain size of 1000Å. At this point the film still kept a well defined tri-layered structure even though some parts of the cementitelayer agglomerated. Above 500ºC, the cementite layer started to “move” into the a-C leaving graphite behind. Graphite formed in this process is strongly textured with the (0002) graphite basal planes parallel to the surface of the moving cementite. This process is concluded to be carbide mediated crystallization of a-C, similar to silicide mediated crystallization of silicon in Ni-Si and Pd-Si systems.


1992 ◽  
Vol 272 ◽  
Author(s):  
J. C. Holzer ◽  
R. Birringer ◽  
J. Eckert ◽  
C.E. Krill ◽  
W.L. Johnson

ABSTRACTNanocrystalline Fe has been prepared by inert gas condensation and ball milling. The kinetics of relaxation and grain growth are investigated by differential scanning calorimetry. The development of the microstructure is monitored by x-ray powder diffraction and transmission electron microscopy. Emphasis is placed on the differences observed for samples prepared by the two different techniques. We find that the kinetics of relaxation and grain growth are very sensitive to the sample preparation method. Samples with the same initial average grain size, as determined by the peak broadening in x-ray diffraction, show very different recovery behavior. The differences are discussed in terms of the estimated grain boundary energies and the initial grain size distribution obtained by the two preparation techniques.


Materials ◽  
2018 ◽  
Vol 11 (10) ◽  
pp. 1862 ◽  
Author(s):  
Rongchuang Chen ◽  
Zhizhen Zheng ◽  
Jianjun Li ◽  
Ning Li ◽  
Fei Feng

The relationships between initial microstructures, process parameters, and grain evolutions in isothermal holdings have drawn wide attention in recent years, but the grain growth behaviors of 300M steel were not well understood, resulting in a failure in precise microstructure controlling in heat treatment. In this work, in situ observations were carried out to characterize the grain evolutions of 300M steel with varying holding time, holding temperatures, and initial microstructures. The intriguing finding was that the grain refinement by austenization of 300M steel was followed by a dramatic grain growth in the initial stage of holding (≤~600 s), and with increasing time (~600–7200 s), the average grain size appeared to have a limit value at specific temperatures. The austenization process accelerated the grain growth by generating large quantity of grain boundaries at the initial stage of holdings, and the growth rate gradually slowed down after holding for ~600 s because the driven force was weakened due to the reduction of grain boundary energy. The initial structure and the initial grain size of 300M steel had no obvious influences on the grain size evolutions. The mechanisms of grain growth were analyzed based on in situ observations and transmission electron microscope (TEM) characterizations. A grain evolution model considering the grain boundary migration of 300M steel was established for the isothermal holding process. Good agreement was obtained between the in situ observation results and the model calculation results. This investigation aimed to understand fundamentally the grain evolutions of 300M steel in the isothermal holding process.


2008 ◽  
Vol 587-588 ◽  
pp. 483-487 ◽  
Author(s):  
Sonia Simões ◽  
Rosa Calinas ◽  
P.J. Ferreira ◽  
M. Teresa Vieira ◽  
Filomena Viana ◽  
...  

Nanocrystalline metals demonstrate a broad range of fascinating mechanical properties at the nanoscale, namely a significant increase in hardness and superior yield stress. In this regard, understanding grain growth in nanocrystalline metals is crucial, particularly because nano size grains are characterized by a high curvature, which results in a high driving force for grain growth. In this work, the effect of annealing conditions on grain size of copper nanocrystalline thin films was investigated. The nanocrystalline copper thin films were first deposited by d.c. magnetron sputtering on a copper substrate. The specimens were then annealed in vacuum at 100, 300 and 500°C from 10 minutes to 5 hours. Transmission electron microscopy observations revealed that the as-deposited thin films have a bimodal grain size distribution; an average grain size of 43±2nm and the presence of nanotwins. Abnormal grain growth was observed for some samples annealed. Increasing the annealing time induced significant grain growth and promoted twin formation in the larger grains. Finally, the hardness of these nanocrystalline Cu thin films was determined using atomic force microscope. The relation between mechanical properties, annealing conditions and grain size was analyzed.


2007 ◽  
Vol 551-552 ◽  
pp. 387-392 ◽  
Author(s):  
Wen Juan Zhao ◽  
Hua Ding ◽  
D. Song ◽  
F.R. Cao ◽  
Hong Liang Hou

In this study, superplastic tensile tests were carried out for Ti-6Al-4V alloy using different initial grain sizes (2.6 μm, 6.5μm and 16.2 μm) at a temperature of 920°C with an initial strain rate of 1×10-3 s-1. To get an insight into the effect of grain size on the superplastic deformation mechanisms, the microstructures of deformed alloy were investigated by using an optical microscope and transmission electron microscope (TEM). The results indicate that there is dramatic difference in the superplastic deformation mode of fine and coarse grained Ti-6Al-4V alloy. Meanwhile, grain growth induced by superplastic deformation has also been clearly observed during deformation process, and the grain growth model including the static and strain induced part during superplastic deformation was utilized to analyze the data of Ti-6Al-4V alloy.


2007 ◽  
Vol 29-30 ◽  
pp. 143-146 ◽  
Author(s):  
Aamir Mukhtar ◽  
De Liang Zhang ◽  
C. Kong ◽  
P. R. Munroe

Cu-(2.5 or 5.0vol.%)Al2O3 nanocomposite balls and granules and Cu-(2.5vol.% or 5.0vol.%)Pb alloy powder were prepared by high energy mechanical milling (HEMM) of mixtures of Cu and either Al2O3 or Pb powders. It was observed that with the increase of the content of Al2O3 nanoparticles from 2.5vol.% to 5vol.% in the powder mixture, the product of HEMM changed from hollow balls into granules and the average grain size and microhardness changed from approximately 130nm and 185HV to 100nm and 224HV, respectively. On the other hand, HEMM of Cu–(2.5 or 5.0vol.%) Pb powder mixtures under the same milling conditions failed to consolidate the powder in-situ. Instead, it led to formation of nanostructured fine powders with an average grain size of less than 50nm. Energy dispersive X-ray mapping showed homogenous distribution of Pb in the powder particles in Cu–5vol.%Pb alloy powder produced after 12 hours of milling. With the increase of the Pb content from 2.5 to 5.0 vol.%, the average microhardness of the Cu-Pb alloy powder particles increases from 270 to 285 HV. The mechanisms of the effects are briefly discussed.


2005 ◽  
Vol 907 ◽  
Author(s):  
J. A. Gregg ◽  
K Hattar ◽  
C H Lei ◽  
I M Robertson

AbstractRetention of the enhanced properties reported for nanograined metallic systems requires that the nanostructure be insensitive to temperature and deformation. In situ transmission electron microscopy annealing experiments were employed to investigate the structural changes associated with the formation of micron-sized grains in nanograined evaporated gold thin films. This abnormal grain growth occurs randomly throughout the film. Twinning but not dislocation slip occurs in the growing grains until the grain size is in the hundreds of nanometer range. The twins appear to hinder growth and for grain growth to continue the twins must either be annihilated or be able to grow with the grain concurrently.


1988 ◽  
Vol 128 ◽  
Author(s):  
Joyce C. Liu ◽  
Jian Li ◽  
J. W. Mayer ◽  
Charles W. Allen ◽  
Lynn E. Rehn

ABSTRACTIn situ observations of 1.5 MeV Xe+ ion irradiated Au films at room temperature and at 150°C reveal the evolution of grain growth: the average grain size increases by the mechanisms of grain boundary migration and grain coalescence.


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