Enhanced Interdiffusion Effects in Compound Semiconductors
Keyword(s):
ABSTRACTThis paper reviews the principal processes involved in the enhanced interdiffusion of elements across interfaces between two III-V compound semiconductors. Implantation enhanced interdiffusion effects in GaAs-Gal−xAlxAs are compared for single Quantum Well structures and Superlattice structures. Measurements indicate a marked difference in the annealing and enhanced interdiffusion kinetics between these 2 types of structures.
2015 ◽
Vol 30
(9)
◽
pp. 094016
◽
Keyword(s):
Keyword(s):
Keyword(s):
1993 ◽
Vol 8
(1S)
◽
pp. S296-S299
◽
Keyword(s):
1996 ◽
Vol 11
(8)
◽
pp. 1185-1188
◽
Keyword(s):
2006 ◽
Vol 35
(4)
◽
pp. 733-737
◽
Keyword(s):
2003 ◽
Vol 240
(2)
◽
pp. 344-347
◽
Keyword(s):
2004 ◽
Vol 108
(40)
◽
pp. 15457-15460
◽