Laser-Stimulated Noble Metal Deposition From Gaseous and Condensed Acetylacetonates. Photoreactions in the Supersonic Jet and Above Silicon

ABSTRACTLaser-stimulated deposition from the acetylacetonates of Pt and Ir has been found to take place on silicon surfaces. The gas phase photoreactions have been observed in a supersonic free jet TOF mass spectrometer and above silicon. The bare metal ions and metal cluster ions are formed from the complexes in the gas by multiphoton excitation. On the substrates deposits are detected by microprobe analysis with a metal content higher than 95 %. Also from condensed complexes laser-induced metal deposition, and as competitive process photodesorption, takes place.