Post-Irradiation Annealing of Laser-Formed Silicide Layers
Keyword(s):
X Ray
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ABSTRACTWe have investigated the post-irradiation annealing effects of laser-formed Pt, Pd, Rh and Ni-silicides. It was found from Rutherford backscattering and x-ray analysis that compositional changes occur during subsequent high temperature annealing in a vacuum furnace. Generally, a single silicide phase tends to form at the expense of the other phases present following laser irradiation. The surviving phase is not necessarily identical to the end-phase found in a binary solid-state reaction couple of the same system.