High quality and high speed cutting of 4H-SiC JFET wafers including PCM structures by using Thermal Laser Separation

2014 ◽  
Vol 1693 ◽  
Author(s):  
Dirk Lewke ◽  
Matthias Koitzsch ◽  
Karl Otto Dohnke ◽  
Martin Schellenberger ◽  
Hans-Ulrich Zuehlke ◽  
...  
Keyword(s):  
High Speed ◽  
Metal Layer ◽  
Back Side ◽  
The Novel ◽  
Metal Structures ◽  
High Speed Cutting ◽  
Current State ◽  
Current Transition ◽  
First Time ◽  
Laser Separation

ABSTRACTThe silicon carbide (SiC) market is gaining momentum hence productivity in device manufacturing has to be improved. The current transition from 100 mm SiC-wafers to 150 mm SiC-wafers requires novel processes in the front-end as well as the back-end of SiC-chip production. Dicing of fully processed SiC-wafers is becoming a bottleneck process since current state-of-the-art mechanical blade dicing faces heavy tool wear and achieves low throughput due to low feed rates in the range of only a few mm/s. This paper presents latest results of the novel dicing technology Thermal Laser Separation (TLS) applied for separating SiC-JFETs. We demonstrate for the first time that TLS is capable of dicing fully processed 4H-SiC wafers, including back side metal layer stacks, process control monitoring (PCM), and metal structures inside the dicing streets with feed rates up to 200 mm/s. TLS thus paves the way to efficient dicing of 150 mm SiC-wafers.

Ablation Free Dicing of 4H-SiC Wafers with Feed Rates up to 200 mm/s by Using Thermal Laser Separation

2012 ◽  
Vol 1433 ◽  
Author(s):  
Dirk Lewke ◽  
Matthias Koitzsch ◽  
Martin Schellenberger ◽  
Lothar Pfitzner ◽  
Heiner Ryssel ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
State Of The Art ◽  
Separation Process ◽  
Back Side ◽  
Current State ◽  
Edge Quality ◽  
First Time ◽  
Metal Layers ◽  
Laser Separation ◽  
Street Width

ABSTRACTThis paper presents Thermal Laser Separation (TLS) as a novel dicing technology for silicon carbide (SiC) wafers. Results of this work will play an important role in improving the SiC dicing process regarding throughput and edge quality. TLS process parameters were developed for separating 4H-SiC wafers. Separated SiC dies were analyzed and compared with results produced with current state of the art blade dicing technology. For the first time, fully processed 100 mm 4H-SiC wafers with a thickness of 450 μm, including epi-layer and back side metal layers, could be separated with feed rates up to 200 mm/s. Besides the vastly improved dicing speed, the TLS separation process results in two important features of the separated SiC devices: First, edges are free of chipping and therefore of higher quality than the edges produced by blade dicing. Second, the TLS process is kerf free, which allows for reducing the necessary dicing street width and hence increasing the number of devices per wafer.

Tool Wear by Solution: A Quantitative Understanding

1980 ◽  
Vol 102 (4) ◽  
pp. 303-309 ◽  
Author(s):  
B. M. Kramer ◽  
N. P. Suh
Keyword(s):  
High Speed ◽  
Future Research ◽  
Wear Process ◽  
Wear Rates ◽  
High Speed Cutting ◽  
Tool Materials ◽  
Relative Wear ◽  
Quantitative Calculation ◽  
Quantitative Understanding ◽  
First Time

The mechanism controlling the crater wear of single phase carbide cutting tool materials in the high speed cutting of steel has been identified. A simple model has been developed to describe the wear process. Cutting tests employing inserts coated with Group IVB and VB carbides show excellent agreement with the relative wear rates predicted from the thermodynamic properties of the tool-work system. Thus, for the first time, quantitative calculation of the relative wear rates of various potential tool materials from thermodynamic data is possible. The technique is believed to have broad application to other tool-work combinations. Implications for future research are discussed.

RANCANG BANGUN MESIN PEMOTONG RUMPUT TENAGA SURYA UNTUK NAVIGASI

2015 ◽  
Vol 1 (1) ◽  
pp. 5-16
Author(s):  
John Ohoiwutun
Keyword(s):  
High Speed ◽  
Solar Power ◽  
Human Life ◽  
Operating Cost ◽  
Fuel Oil ◽  
Kinematics And Dynamics ◽  
Control Input ◽  
High Speed Cutting ◽  
Lawn Mower ◽  
Coal Fuel

Utilization of conventional energy sources such as coal, fuel oil, natural gas and others on the one hand has a low operating cost, but on the other side of the barriers is the greater source of diminishing returns and, more importantly, the emergence of environmental pollution problems dangerous to human life. This study aims to formulate the kinematics and dynamics to determine the movement of Solar Power Mower. In this study, using solar power as an energy source to charge the battery which then runs the robot. Design and research was conducted in the Department of Mechanical Workshop Faculty of Engineering, University of Hasanuddin of Gowa. Control system used is a manual system using radio wave transmitter and receiver which in turn drive the robot in the direction intended. Experimental results showed that treatment with three variations of the speed of 6.63 m / s, 8.84 m / s and 15.89 m / sec then obtained the best results occur in grass cutting 15.89 sec and high-speed cutting grass 5 cm. Formulation of kinematics and dynamics for lawn mowers, there are 2 control input variables, x and y ̇ ̇ 3 to control the output variables x, y and θ so that there is one variable redudant. Keywords: mobile robots, lawn mower, solar power

Buried Narratives: Exhuming the Mother's Story in Oliver Twist

2018 ◽  
Vol 8 (3) ◽  
pp. 247-266
Author(s):  
Michelle L. Wilson
Keyword(s):  
Social Change ◽  
Maternal Inheritance ◽  
The Novel ◽  
Poor Law ◽  
The Family ◽  
The Law ◽  
First Time ◽  
Critical Consideration

Initially, Oliver Twist (1839) might seem representative of the archetypal male social plot, following an orphan and finding him a place by discovering the father and settling the boy within his inheritance. But Agnes Fleming haunts this narrative, undoing its neat, linear transmission. This reconsideration of maternal inheritance and plot in the novel occurs against the backdrop of legal and social change. I extend the critical consideration of the novel's relationship to the New Poor Law by thinking about its reflection on the bastardy clauses. And here, of course, is where the mother enters. Under the bastardy clauses, the responsibility for economic maintenance of bastard children was, for the first time, legally assigned to the mother, relieving the father of any and all obligation. Oliver Twist manages to critique the bastardy clauses for their release of the father, while simultaneously embracing the placement of the mother at the head of the family line. Both Oliver and the novel thus suggest that it is the mother's story that matters, her name through which we find our own. And by containing both plots – that of the father and the mother – Oliver Twist reveals the violence implicit in traditional modes of inheritance in the novel and under the law.

Application of Novel Low Current OBIRCH Amplifier and Nanoprobing to Identify Subtle Leakages in Advanced Node Technologies

2018 ◽  
Author(s):  
Satish Kodali ◽  
Liangshan Chen ◽  
Yuting Wei ◽  
Tanya Schaeffer ◽  
Chong Khiam Oh
Keyword(s):  
Signal To Noise Ratio ◽  
Semiconductor Industry ◽  
Fault Isolation ◽  
Ring Oscillator ◽  
High Signal ◽  
The Novel ◽  
Resistance Change ◽  
Three Samples ◽  
Relative Threshold ◽  
First Time

Abstract Optical beam induced resistance change (OBIRCH) is a very well-adapted technique for static fault isolation in the semiconductor industry. Novel low current OBIRCH amplifier is used to facilitate safe test condition requirements for advanced nodes. This paper shows the differences between the earlier and novel generation OBIRCH amplifiers. Ring oscillator high standby leakage samples are analyzed using the novel generation amplifier. High signal to noise ratio at applied low bias and current levels on device under test are shown on various samples. Further, a metric to demonstrate the SNR to device performance is also discussed. OBIRCH analysis is performed on all the three samples for nanoprobing of, and physical characterization on, the leakage. The resulting spots were calibrated and classified. It is noted that the calibration metric can be successfully used for the first time to estimate the relative threshold voltage of individual transistors in advanced process nodes.

Disability as a social phenomenon

2020 ◽  
pp. 22-38
Author(s):  
Natalia Guseva ◽  
Vitaliy Berdutin
Keyword(s):  
Social Protection ◽  
Russian Society ◽  
Stage Model ◽  
High Quality ◽  
Rehabilitation Programs ◽  
Current State ◽  
The Social ◽  
Consistent Solution ◽  
First Time

At present, the problem of establishing disability is a point at issue in Russia. Despite the fact that medical criteria for disability are being developed very actively, high-quality methods for assessing social hallmarks are still lacking. Since disability is a phenomenon inherent in any society, each state forms a social and economic policy for people with disabilities in accordance with its level of development, priorities and opportunities. We have proposed a three-stage model, which includes a system for the consistent solution of the main tasks aimed at studying the causes and consequences of the problems encountered today in the social protection of citizens with health problems. The article shows why the existing approaches to the determination of disability and rehabilitation programs do not correspond to the current state of Russian society and why a decrease in the rate of persons recognized as disabled for the first time does not indicate an improvement in the health of the population. The authors proposed a number of measures with a view to correcting the situation according to the results of the study.

Isolation and HPLC Determination of the Chemical Components of Gentianella acuta (Michx.) Hulten

2018 ◽  
Vol 15 (1) ◽  
pp. 21-33
Author(s):  
Ying Wei ◽  
Yongqiao Liu ◽  
Yifan Hele ◽  
Weiwei Sun ◽  
Yang Wang ◽  
...  
Keyword(s):  
Medicinal Plant ◽  
High Speed ◽  
Chemical Constituents ◽  
Folk Medicine ◽  
Gradient Elution ◽  
Chemical Components ◽  
Isolation And Characterization ◽  
Major Chemical ◽  
Main Components ◽  
First Time

Background: Gentianella acuta (Michx.) Hulten is an important type of medicinal plant found in several Chinese provinces. It has been widely used in folk medicine to treat various illnesses. However, there is not enough detailed information about the chemical constituents of this plant or methods for their content determination. Objective: The focus of this work is the isolation and characterization of the major chemical constituents of Gentianella acuta, and developing an analytical method for their determination. Methods: The components of Gentianella acuta were isolated using (1) ethanol extraction and adsorption on macroporous resin. (2) and ethyl acetate extraction and high speed countercurrent chromatography. A HPLC-DAD method was developed using a C18 column and water-acetonitrile as the mobile phase. Based on compound polarities, both isocratic and gradient elution methods were developed. Results: A total of 29 compounds were isolated from this plant, of which 17 compounds were isolated from this genus for the first time. The main components in this plant were found to be xanthones. The HPLC-DAD method was developed and validated for their determination, and found to show good sensitivity and reliability. Conclusion: The results of this work add to the limited body of work available on this important medicinal plant. The findings will be useful for further investigation and development of Gentianella acuta for its valuable medicinal properties.

Recent Patents on the Angular Contact Ball Bearing of High-Speed Motorized Spindle

2020 ◽  
Vol 13 ◽  
Author(s):  
Yudong Bao ◽  
Linkai Wu ◽  
Yanling Zhao ◽  
Chengyi Pan
Keyword(s):  
High Speed ◽  
Ball Bearing ◽  
Rapid Development ◽  
Ceramic Materials ◽  
Development Trend ◽  
Numerical Control ◽  
Angular Contact Ball Bearing ◽  
Practical Applications ◽  
High Speed Cutting ◽  
Advantages And Disadvantages

Background:: Angular contact ball bearings are the most popular bearing type used in the high speed spindle for machining centers, The performance of the bearing directly affects the machining efficiency of the machine tool, Obtaining a higher value is the direction of its research and development. Objective:: By analyzing the research achievements and patents of electric spindle angular contact bearings, summarizing the development trend provides a reference for the development of electric spindle bearings. Methods:: Through the analysis of the relevant technology of the electric spindle angular contact ball bearing, the advantages and disadvantages of the angular contact ball bearing are introduced, and the research results are combined with the patent analysis. Results:: With the rapid development of high-speed cutting and numerical control technology and the needs of practical applications, the spindle requires higher and higher speeds for bearings. In order to meet the requirements of use, it is necessary to improve the bearing performance by optimizing the structure size and improving the lubrication conditions. Meanwhile, reasonable processing and assembly methods will also have a beneficial effect on bearing performance. Conclusion:: With the continuous deepening of bearing technology research and the use of new structures and ceramic materials has made the bearing's limit speed repeatedly reach new highs. The future development trend of high-speed bearings for electric spindles is environmental protection, intelligence, high speed, high precision and long life.

Rhythmic Prose in Imperial Greek Literature

2018 ◽  
Author(s):  
G. O. Hutchinson
Keyword(s):  
The Novel ◽  
Greek Literature ◽  
System A ◽  
First Time

The chapter looks at the division between poetry and prose in ancient and other literatures, and shows the importance of rhythmic patterning in ancient prose. The development of rhythmic prose in Greek and Latin is sketched, the system explained and illustrated (from Latin). It is firmly established, for the first time, which of the main Greek non-Christian authors 31 BC–AD 300 write rhythmically. The method takes a substantial sample of random sentence-endings (usually 400) from each of a large number of Imperial authors; it compares that sample with one sample of the same size (400) drawn randomly from a range of authors earlier than the invention of this rhythmic system. A particular sort of X2-test is applied. Many Imperial authors, it emerges, write rhythmically; many do not. The genres most likely to offer rhythmic writing are, unexpectedly, narrative: historiography and the novel.

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