Progress and Challenges for Chemical Mechanical Polishing of Gallium Nitride

2013 ◽  
Vol 1560 ◽  
Author(s):  
Hideo Aida ◽  
Toshiro Doi ◽  
Tsutomu Yamazaki ◽  
Hidetoshi Takeda ◽  
Koji Koyama

ABSTRACTProgress and challenges for chemical mechanical polishing (CMP) of GaN are discussed in detail by focusing on the importance of GaN surface oxidation during CMP. We report on the significant difference in the removal rates between Ga2O3 and GaN, suggesting that the surface oxidation reaction is the rate-limiting step for CMP of Ga-faced GaN. This is actually proved by the fact that ex-situ surface oxidation by annealing in air prior to CMP exhibits a marked reduction in the required CMP time to produce a damage-free surface. As a future challenge, we outline two of our recent developments, ultraviolet-assisted CMP and atmosphere-controlled CMP, that enable in-situ oxidation, since ex-situ oxidation must be modified to in-situ to further advance CMP.

Molecules ◽  
2021 ◽  
Vol 26 (9) ◽  
pp. 2497
Author(s):  
Xinxin Long ◽  
Huanyu Chen ◽  
Tijun Huang ◽  
Yajing Zhang ◽  
Yifeng Lu ◽  
...  

A novel core-shell magnetic Prussian blue-coated Fe3O4 composites (Fe3O4@PB) were designed and synthesized by in-situ replication and controlled etching of iron oxide (Fe3O4) to eliminate Cd (II) from micro-polluted water. The core-shell structure was confirmed by TEM, and the composites were characterized by XRD and FTIR. The pore diameter distribution from BET measurement revealed the micropore-dominated structure of Fe3O4@PB. The effects of adsorbents dosage, pH, and co-existing ions were investigated. Batch results revealed that the Cd (II) adsorption was very fast initially and reached equilibrium after 4 h. A pH of 6 was favorable for Cd (II) adsorption on Fe3O4@PB. The adsorption rate reached 98.78% at an initial Cd (II) concentration of 100 μg/L. The adsorption kinetics indicated that the pseudo-first-order and Elovich models could best describe the Cd (II) adsorption onto Fe3O4@PB, indicating that the sorption of Cd (II) ions on the binding sites of Fe3O4@PB was the main rate-limiting step of adsorption. The adsorption isotherm well fitted the Freundlich model with a maximum capacity of 9.25 mg·g−1 of Cd (II). The adsorption of Cd (II) on the Fe3O4@PB was affected by co-existing ions, including Cu (II), Ni (II), and Zn (II), due to the competitive effect of the co-adsorption of Cd (II) with other co-existing ions.


2021 ◽  
Vol 9 (1) ◽  
Author(s):  
Scott Allan Orr

AbstractCarillons are a diverse and global form of musical and civic heritage: musical instruments comprised of a series of 23 or more bells, typically hung in a tower-like structure, tuned chromatically and played from a touch-sensitive manual and pedal console using an elaborate mechanical action. Carillon bells have a distinct series of musical overtones which should be accurately tuned to one another and with other bells they sound alongside. Although these overtones have been previously studied ex situ, this study assesses the acoustic characteristics of two early-twentieth century carillons in Toronto, Canada as a combination of structure, bells, and mechanical action. Thus, the instrument and its context are considered holistically, more accurately reflecting the musical sensitivity of a carillonist. Spectral analysis of audio samples of each bell at different musical dynamic levels enabled the analysis of the acoustic qualities of the bells and the mechanical action of the instruments. The tuning of bells in the instruments varied; most importantly, there was a significant difference between the audial intensity of the bell tones produced by the instruments, demonstrating the importance of the mechanical action as part of the ‘carillon system’. This was represented with a resistive power-law model, that represents the sensitivity of intensity to carillonist musical dynamic level. A discussion of the implications for artistic and heritage practice follows. Understanding the in situ physical acoustics of the carillon as a holistic instrument in its context informs performers, arrangers, and composers of how they can best embrace the instrument’s unique qualities to improve artistic pursuits and support the appreciation of carillons as heritage instruments and function as civic voices.


Author(s):  
Estefania Isaza Ferro ◽  
Jordan Perrin ◽  
Owain George John Dawson ◽  
Tapani Vuorinen

AbstractThe reaction between hypochlorous acid and chlorite ions is the rate limiting step for in situ chlorine dioxide regeneration. The possibility of increasing the speed of this reaction was analyzed by the addition of tertiary amine catalysts in the system at pH 5. Two amines were tested, DABCO (1,4-diazabicyclo[2.2.2]octane) and its derivative CEM-DABCO (1-carboethoxymethyl-1-azonia-4-aza-bicyclo[2.2.2]octane chloride). The stability of the catalysts in the presence of both reagents and chlorine dioxide was measured, with CEM-DABCO showing to be highly stable with the mentioned chlorine species, whereas DABCO was rapidly degraded by chlorine dioxide. Hence, CEM-DABCO was chosen as a suitable candidate to catalyze the reaction of hypochlorous acid with chlorite ions and it significantly increased the speed of this reaction even at low catalyst dosages. This research opens the door to a faster regeneration of chlorine dioxide and an improved efficiency in chlorine dioxide treatments.


2005 ◽  
Vol 20 (5) ◽  
pp. 1139-1145 ◽  
Author(s):  
Jeremiah T. Abiade ◽  
Wonseop Choi ◽  
Rajiv K. Singh

To understand the ceria–silica chemical mechanical polishing (CMP) mechanisms, we studied the effect of ceria slurry pH on silica removal and surface morphology. Also, in situ friction force measurements were conducted. After polishing; atomic force microscopy, x-ray photoelectron spectroscopy, and scanning electron microscopy were used to quantify the extent of the particle–substrate interaction during CMP. Our results indicate the silica removal by ceria slurries is strongly pH dependent, with the maximum occurring near the isoelectric point of the ceria slurry.


Soil Systems ◽  
2021 ◽  
Vol 5 (3) ◽  
pp. 48
Author(s):  
Nandkishor M. Dhawale ◽  
Viacheslav I. Adamchuk ◽  
Shiv O. Prasher ◽  
Raphael A. Viscarra Rossel

Measuring soil texture and soil organic matter (SOM) is essential given the way they affect the availability of crop nutrients and water during the growing season. Among the different proximal soil sensing (PSS) technologies, diffuse reflectance spectroscopy (DRS) has been deployed to conduct rapid soil measurements in situ. This technique is indirect and, therefore, requires site- and data-specific calibration. The quality of soil spectra is affected by the level of soil preparation and can be accessed through the repeatability (precision) and predictability (accuracy) of unbiased measurements and their combinations. The aim of this research was twofold: First, to develop a novel method to improve data processing, focusing on the reproducibility of individual soil reflectance spectral elements of the visible and near-infrared (vis–NIR) kind, obtained using a commercial portable soil profiling tool, and their direct link with a selected set of soil attributes. Second, to assess both the precision and accuracy of the vis–NIR hyperspectral soil reflectance measurements and their derivatives, while predicting the percentages of sand, clay and SOM content, in situ as well as in laboratory conditions. Nineteen locations in three agricultural fields were identified to represent an extensive range of soils, varying from sand to clay loam. All measurements were repeated three times and a ratio spread over error (RSE) was used as the main indicator of the ability of each spectral parameter to distinguish among field locations with different soil attributes. Both simple linear regression (SLR) and partial least squares regression (PLSR) models were used to define the predictability of % SOM, % sand, and % clay. The results indicated that when using a SLR, the standard error of prediction (SEP) for sand was about 10–12%, with no significant difference between in situ and ex situ measurements. The percentage of clay, on the other hand, had 3–4% SEP and 1–2% measurement precision (MP), indicating both the reproducibility of the spectra and the ability of a SLR to accurately predict clay. The SEP for SOM was only a quarter lower than the standard deviation of laboratory measurements, indicating that SLR is not an appropriate model for this soil property for the given set of soils. In addition, the MPs of around 2–4% indicated relatively strong spectra reproducibility, which indicated the need for more expanded models. This was apparent since the SEP of PLSR was always 2–3 times smaller than that of SLR. However, the relatively small number of test locations limited the ability to develop widely applicable calibration models. The most important finding in this study is that the majority of vis–NIR spectral measurements were sufficiently reproducible to be considered for distinguishing among diverse soil samples, while certain parts of the spectra indicate the capability to achieve this at α = 0.05. Therefore, the innovative methodology of evaluating both the precision and accuracy of DRS measurements will help future developers evaluate the robustness and applicability of any PSS instrument.


2020 ◽  
Author(s):  
Scott Allan Orr

Abstract Carillons are a diverse and global form of musical and civic heritage: musical instruments comprised of a series of 23 or more bells, typically hung in a tower-like structure, tuned chromatically and played from a touch-sensitive manual and pedal console using an elaborate mechanical action. Carillon bells have a distinct series of musical overtones which need to be accurately tuned to one another and with other bells they sound alongside. Although these overtones have been previously studied ex situ, this study assesses the acoustic characteristics of two early-20th century carillons in Toronto, Canada as a combination of structure, bells, and mechanical action. Thus, the instrument and its context are considered holistically, more accurately reflecting the musical sensitivity of a carillonist. Spectral and Fourier analysis of audio samples of each bell at different musical dynamic levels enabled the analysis of the acoustic qualities of the bells and the mechanical action of the instruments. The tuning of bells in the instruments varied; most importantly, there was a significant difference between the audial intensity of the bell tones produced by the instruments, demonstrating the importance of the mechanical action as part of the ‘carillon system’. This was represented with a resistive power-law model, that represents the sensitivity of intensity to carillonist musical dynamic level. A discussion of the implications for artistic and heritage practice follows. Understanding the in situ physical acoustics of the carillon as a holistic instrument in its context informs performers, arrangers, and composers of how they can best embrace the instrument’s unique qualities to improve artistic pursuits and support the appreciation of carillons as heritage instruments and function as civic voices.


2011 ◽  
Vol 189-193 ◽  
pp. 4112-4115 ◽  
Author(s):  
Yong Chang Guo ◽  
Young Kyun Lee ◽  
Hyun Seop Lee ◽  
Hae Do Jeong

Groove pads are used quite widely in chemical mechanical polishing (CMP), and groove size plays an important role in CMP characteristics. This study focuses on the investigation of the groove size effect using X-Y groove pads which are different with pitch and width. The first experiment shows the size effect on the polishing characteristics including material removal rate (MRR), within wafer non-uniformity (WIWNU) on 4 inch oxide blanket wafers for 60 seconds. The second experiment verifies the reason why MRR and WIWNU are different, by the calculation of slurry duration time (SDT) resulting from the change of friction force. All experimental results indicated that a significant difference of slurry flow attributed to groove width and pitch has an impressive influence on friction force, finally the MRR and WIWNU are affected by the groove size.


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