Mechanical characterization of “blister” defects on optical oxide multilayers using nanoindentation
Keyword(s):
ABSTRACTWe characterize “blisters”, defects observed in multilayer dielectric (MLD) coatings after exposure to acid cleaning procedures. Nanoindentation is used to make site-specific indentations across blisters to measure the mechanical response, especially their compliance under different conditions of loading. Two regions of statistically different mechanical response are identified within a blister defect and compared to the undisturbed regions of the MLD coating. The indentation response of blisters can vary across samples, and we suggest reasons for this variation.
2022 ◽
Vol 119
(3)
◽
pp. e2117232119
1996 ◽
Vol 54
◽
pp. 636-637