Large-Scale Deposition of Transparent Conducting Oxides by Hollow Cathode Sputtering

2011 ◽  
Vol 1323 ◽  
Author(s):  
Alan E. Delahoy ◽  
Kai Jansen ◽  
Chris Robinson ◽  
Anthony Varvar ◽  
Paul Fabiano ◽  
...  
Keyword(s):  
Thin Film ◽  
Hollow Cathode ◽  
Large Scale ◽  
Low Cost ◽  
Stable Process ◽  
Transparent Conducting Oxides ◽  
Deposition Process ◽  
Cathode Sputtering ◽  
Conducting Oxides ◽  
Transparent Conducting

ABSTRACTThis paper reviews the status of hollow cathode sputtering as an evolving technology for production of thin-film transparent conducting oxides for PV applications. A large market segment for PV TCOs is represented by thin-film a-Si:H and tandem a-Si:H/nc-Si:H modules. For superstrate devices, textured SnO2:F produced on-line by APCVD is currently the market leader, although alternative off-line methods and materials are now emerging. In particular, zinc oxide can be produced by LPCVD, APCVD, magnetron sputtering, and hollow cathode sputtering (HCS). HCS is a stable process featuring low-cost metal targets and a soft deposition process. We discuss the deposition principles and the film results obtained using linear hollow cathodes 0.5 m and 1.0 m in length. We report the direct deposition of highly textured doped ZnO having an electron mobility in excess of 50 cm2/Vs. The production cost of textured ZnO is estimated for several competing techniques.

Transparent Conducting Oxides for Photovoltaics

MRS Bulletin ◽  
2007 ◽  
Vol 32 (3) ◽  
pp. 242-247 ◽  
Author(s):  
Elvira Fortunato ◽  
David Ginley ◽  
Hideo Hosono ◽  
David C. Paine
Keyword(s):  
Wide Spectrum ◽  
Polymer Solar Cells ◽  
Low Cost ◽  
Transparent Conducting Oxides ◽  
Open Circuit ◽  
Flat Panel Display ◽  
Conducting Oxides ◽  
Transparent Conducting ◽  
The Matrix ◽  
Organic Pv

AbstractTransparent conducting oxides (TCOs) are an increasingly important component of photovoltaic (PV) devices, where they act as electrode elements, structural templates, and diffusion barriers, and their work function controls the open-circuit device voltage. They are employed in applications that range from crystalline-Si heterojunction with intrinsic thin layer (HIT) cells to organic PV polymer solar cells. The desirable characteristics of TCO materials that are common to all PV technologies are similar to the requirements for TCOs for flat-panel display applications and include high optical transmissivity across a wide spectrum and low resistivity. Additionally, TCOs for terrestrial PV applications must use low-cost materials, and some may require device-technology-specific properties. We review the fundamentals of TCOs and the matrix of TCO properties and processing as they apply to current and future PV technologies.

Novel Texture Etch Chemistry for Transparent Conducting Oxides Used in Photovoltaic Cells

2012 ◽  
Vol 187 ◽  
pp. 329-332 ◽  
Author(s):  
Steven Verhaverbeke ◽  
Roman Gouk ◽  
Kurtis Leschkies ◽  
Robert Visser
Keyword(s):  
Thin Film ◽  
Acetic Acid ◽  
Metal Oxides ◽  
Light Trapping ◽  
Photovoltaic Cells ◽  
Transparent Conducting Oxides ◽  
The Sun ◽  
Conducting Oxides ◽  
Transparent Conducting ◽  
Acid Etch

In thin film photovoltaic silicon stacks, the sun facing contact needs to be transparent and textured. Typically transparent metal oxides are used for this purpose. When using sputtered ZnO as the transparent conducting contact typically an acid etch is used to texture etch the surface. This texturing enables light trapping in the cell and greatly enhances the photoresponse. Traditionally dilute HCl has been used for this purpose. In this paper we present the work on a novel etchant for this purpose consisting of HNO3 and Acetic Acid. This greatly enhances the texturing and hence the light trapping in the cell.

Chemical and Thin-Film Strategies for New Transparent Conducting Oxides

MRS Bulletin ◽  
2000 ◽  
Vol 25 (8) ◽  
pp. 45-51 ◽  
Author(s):  
A. J. Freeman ◽  
K. R. Poeppelmeier ◽  
T. O. Mason ◽  
R. P. H. Chang ◽  
T. J. Marks
Keyword(s):  
Thin Film ◽  
Research Effort ◽  
Transparent Conducting Oxides ◽  
Important Class ◽  
Film Research ◽  
Conducting Oxides ◽  
Transparent Conducting ◽  
Northwestern University ◽  
Fundamental Understanding ◽  
Technological Interest

Transparent conducting oxides (TCOs) have been known and employed technologically for more than 50 years, primarily in the form of doped single-cation oxides such as In2O3 and SnO2. Beginning in the 1990s, however, multi-cation oxide TCOs began to be developed in Japan (see the article by Minami in this issue and the references therein) and at the former Bell Laboratories. Since then, new TCO phases are being reported with increasing frequency as technological interest in this area heightens. At the same time, our fundamental understanding of the chemical and structural origins of transparent conductivity continues to expand and promises a pathway to dramatically improved materials for a host of applications. This article describes a collaborative, multi-investigator bulk an d thin-film research effort at Northwestern University aimed at the synthesis, characterization, and enhanced understanding of multi-cation (compound and solidsolution) TCOs, and provides a brief account of what we are discovering about this important class of materials.

Next-Generation Transparent Conducting Oxides for Photovoltaic Cells: an Overview

2001 ◽  
Vol 668 ◽  
Author(s):  
David Ginley ◽  
Tim Coutts ◽  
John Perkins ◽  
David Young ◽  
Xiaonan Li ◽  
...  
Keyword(s):  
Thin Film ◽  
Transparent Conducting Oxides ◽  
Transparent Conductors ◽  
Critical Element ◽  
Antireflection Coatings ◽  
Photovoltaic Devices ◽  
Materials Properties ◽  
Conducting Oxides ◽  
Transparent Conducting ◽  
P Type

ABSTRACTTransparent conducting oxides (TCOs) are becoming a more critical element in thin-film photovoltaic devices. In the continued drive to increase efficiency and stability while reducing cost and optimizing performance, the optical, electrical, and materials properties of TCOs gain increasing importance. TCOs can perform a variety of important functions, including contacts, antireflection coatings, and chemical barriers. In this paper, we will review some of the current advances in the field of transparent conductors and, where possible, will relate these advances to thin-film photovoltaic devices. Highlights will be on the rapidly growing collection of new n- and p-type materials; the implications of these materials on PV have not been fully assessed.

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