The Role of H-Plasma in Aluminum Induced Crystallization of Amorphous Silicon

2011 ◽  
Vol 1321 ◽  
Author(s):  
Chong Luo ◽  
Juan Li ◽  
He Li ◽  
Zhiguo Meng ◽  
Qian Huang ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Raman Spectroscopy ◽  
Secondary Ion Mass Spectrometry ◽  
Hydrogen Plasma ◽  
Crystallization Time ◽  
Hydrogen Radicals ◽  
Secondary Ion ◽  
Induced Crystallization ◽  
Aluminum Induced Crystallization

ABSTRACTA technique to improve and accelerate aluminum induced crystallization (AIC) by hydrogen plasma is proposed in this paper. Raman spectroscopy and Secondary Ion Mass Spectrometry of crystallized poly-Si thin films show that hydrogen plasma radicals reduce the crystallization time of AIC. This technique shortens the annealing time from 10 hours to 4 hours and increases the Hall mobility from 22.1 cm2/V·s to 42.5 cm2/V·s. The possible mechanism of AIC assisted by hydrogen radicals will also be discussed.

Hydrogen Dynamics and Tee Distribution of H Sites in Undoped a-Si:H and a-Ge:H

1991 ◽  
Vol 219 ◽  
Author(s):  
R. Shinar ◽  
X.-L. Wu ◽  
S. Mitra ◽  
J. Shinar
Keyword(s):  
Mass Spectrometry ◽  
Activation Energy ◽  
Long Range ◽  
Secondary Ion Mass Spectrometry ◽  
Ir Studies ◽  
Multiple Trapping ◽  
Ion Mass Spectrometry ◽  
Secondary Ion ◽  
Trapping Sites

ABSTRACTSecondary ion mass spectrometry and IR studies of long-range hydrogen motion in undoped a-Si:H and a-Ge:H of varying H content and microstructure are reviewed and discussed. In particular, their relation to the multiple trapping (MT) model, the role of microvoids, the significance of the Meyer-Neldel relation (MNR), and the nature of H sites is addressed. It is suggested that while the MT mechanism may be significant in a-Si:H of low H content Cfj, it is largely marginal in films where CH ≥ 10 at.% H and in a-Ge:H. Mono Si-H bonds on microvoid surfaces are apparently deep H trapping sites up to ∼ 400°C, but H is desorbed from such sites in a-Ge:H above 180°C. The MNR between the diffusional activation energy and prefactor is observed among the various a-Si:H and a-Ge:H, but its significance is questionable, and may be due to the MT mechanism only in low H content a-Si:H. The nature of the distribution of H sites is also discussed.

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