The DMDTM Projection Display Chip: A MEMS-Based Technology

MRS Bulletin ◽  
2001 ◽  
Vol 26 (4) ◽  
pp. 325-327 ◽  
Author(s):  
Larry J. Hornbeck
Keyword(s):  
Microelectromechanical Systems ◽  
Digital Micromirror Device ◽  
Digital Light Processing ◽  
Memory Chip ◽  
Monolithically Integrated ◽  
Image Fidelity ◽  
Projection Display ◽  
Digital Micromirrors

The possibility of an all-digital (sourceto-eye) projection display was realized in 1987 with the invention of the Digital Micromirror Device™ projection display chip at Texas Instruments (TI). The DMD™ chip is a microelectromechanical systems (MEMS) array of fast digital micromirrors, monolithically integrated onto and controlled by an underlying silicon memory chip. Digital Light Processing™ projection displays are based on the DMD chip. DLP™ projection displays present bright, seamless images to the eye that have high image fidelity, and stability.

The digital micromirror device for projection display

1995 ◽  
Vol 27 (1-4) ◽  
pp. 489-493 ◽  
Author(s):  
David W. Monk ◽  
Richard O. Gale
Keyword(s):  
Digital Micromirror Device ◽  
Projection Display

EHMP-DLP: multi-projector DLP with energy homogenization for large-size 3D printing

2018 ◽  
Vol 24 (9) ◽  
pp. 1500-1510 ◽  
Author(s):  
Lifang Wu ◽  
Lidong Zhao ◽  
Meng Jian ◽  
Yuxin Mao ◽  
Miao Yu ◽  
...  
Keyword(s):  
3D Printing ◽  
Three Dimensional ◽  
Digital Micromirror Device ◽  
Large Area ◽  
Digital Light Processing ◽  
Content Type ◽  
Large Size ◽  
Multiple Projectors ◽  
Ultraviolet Energy ◽  
Practical Implications

Purpose In some three-dimensional (3D) printing application scenarios, e.g., model manufacture, it is necessary to print large-sized objects. However, it is impossible to implement large-size 3D printing using a single projector in digital light processing (DLP)-based mask projection 3D printing because of the limitations of the digital micromirror device chips. Design/methodology/approach A multi-projector DLP with energy homogenization (EHMP-DLP) scheme is proposed for large-size 3D printing. First, a large-area printing plane is established by tiling multiple projectors. Second, the projector set’s tiling pattern is obtained automatically, and the maximum printable plane is determined. Third, the energy is homogenized across the entire printable plane by adjusting gray levels of the images input into the projectors. Finally, slices are automatically segmented based on the tiling pattern of the projector set, and the gray levels of these slices are reassigned based on the images of the corresponding projectors. Findings Large-area high-intensity projection for mask projection 3D printing can be performed by tiling multiple DLP projectors. The tiled projector output energies can be homogenized by adjusting the images of the projectors. Uniform ultraviolet energy is important for high-quality printing. Practical implications A prototype device is constructed using two projectors. The printable area becomes 140 × 210 mm from the original 140 × 110 mm. Originality/value The proposed EHMP-DLP scheme enables 3D printing of large-size objects with linearly increasing printing times and high printing precision. A device was established using two projectors to practice the scheme and can easily be extended to larger sizes by using more projectors.

scholarly journals Characterization of a Custom-Made Digital Light Processing Stereolithographic Printer Based on a Slanted Groove Micromixer Geometry

2020 ◽  
Vol 8 (1) ◽  
Author(s):  
Joško Valentinčič ◽  
Miha Prijatelj ◽  
Marko Jerman ◽  
Andrej Lebar ◽  
Izidor Sabotin
Keyword(s):  
Microfluidic Devices ◽  
Digital Micromirror Device ◽  
Digital Light Processing ◽  
Custom Made ◽  
Related Feature

Abstract A custom-made stereolithographic printer using a digital light processing optical (DLP) system based on a digital micromirror device (DMD) was characterized. Several sizes of slanted grooved micromixers (SGM) were produced and typical dimensions were measured and compared to nominal values. The results show that the developed SLA printer is precise enough to be used for prototyping of larger microfluidic devices. The lateral geometries of the smallest printed micromixer designs deviated less than 20 μm from the nominal values and related feature depths deviated for less than 15 μm. However, further modifications are needed in order to improve the repeatability, accuracy, and printing resolution.

Monolithically Integrated Microelectromechanical Systems for On-Chip Strain Engineering of Quantum Dots

Nano Letters ◽  
2016 ◽  
Vol 16 (9) ◽  
pp. 5785-5791 ◽  
Author(s):  
Yang Zhang ◽  
Yan Chen ◽  
Michael Mietschke ◽  
Long Zhang ◽  
Feifei Yuan ◽  
...  
Keyword(s):  
Quantum Dots ◽  
Microelectromechanical Systems ◽  
Strain Engineering ◽  
Monolithically Integrated ◽  
On Chip

Charge Trapping and Degradation Properties of PZT Thin Films for MEMS

1996 ◽  
Vol 444 ◽  
Author(s):  
Hyeon-Seag Kim ◽  
D. L. Polla ◽  
S. A. Campbell
Keyword(s):  
Thin Films ◽  
Loss Factor ◽  
High Field ◽  
Microelectromechanical Systems ◽  
Charge Trapping ◽  
Metal Organic ◽  
Electrical Reliability ◽  
Silicon Based ◽  
Degradation Properties ◽  
Organic Decomposition

AbstractThe electrical reliability properties of PZT (54/46) thin films have been measured for the purpose of integrating this material with silicon-based microelectromechanical systems. Ferroelectric thin films of PZT were prepared by metal organic decomposition. The charge trapping and degradation properties of these thin films were studied through device characteristics such as hysteresis loop, leakage current, fatigue, dielectric constant, capacitancevoltage, and loss factor measurements. Several unique experimental results have been found. Different degradation processes were verified through fatigue (bipolar stress), low and high charge injection (unipolar stress), and high field stressing (unipolar stress).

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