Fabricating high refractive index titanium dioxide film using electron beam evaporation for all-dielectric metasurfaces

2016 ◽  
Vol 6 (2) ◽  
pp. 77-83 ◽  
Author(s):  
Ning An ◽  
Kaiyang Wang ◽  
Haohan Wei ◽  
Qinghai Song ◽  
Shumin Xiao

Abstract

2018 ◽  
Vol 36 (22) ◽  
pp. 5285-5297 ◽  
Author(s):  
Zhihong Li ◽  
Qianqian Luo ◽  
Boteng Yan ◽  
Xiukai Ruan ◽  
Yaoju Zhang ◽  
...  

2009 ◽  
Vol 25 (3) ◽  
pp. 257-260 ◽  
Author(s):  
J. K. Yao ◽  
H. L. Huang ◽  
J. Y. Ma ◽  
Y. X. Jin ◽  
Y. A. Zhao ◽  
...  

2010 ◽  
Vol 93-94 ◽  
pp. 545-548
Author(s):  
B. Saekow ◽  
S. Porntheeraphat ◽  
Sakon Rahong ◽  
S. Jaruvanawat ◽  
J. Nukeaw

The fabricated photonic crystal biosensor device consists of SOG material and titanium dioxide (TiO2) thin films as low and high refractive indexes dielectric layers, respectively. Nano-Imprinting Lithography (NIL) process was used to duplicate periodic line as grating structure from Ni-master mold onto SOG/glass. High refractive index dielectric thin film layer was deposited by using electron beam evaporation system. The surface morphology and thickness of thin film are characterized by atomic force microscope (AFM) and field emission scanning electron microscope (FE-SEM), respectively. The optical measurement system is set up to observed the sensitivity of fabricated device. A shift of reflected peak wavelength observed from DI-water and IPA was tested. The morphology and the thickness of the prepared dielectric thin films are affected to the efficiency of fabricated device.


2017 ◽  
Vol 59 (1) ◽  
pp. 81-85
Author(s):  
Jianjun Zhang ◽  
Hao Zeng ◽  
Chun Liu ◽  
Chao Li ◽  
Sude Ma ◽  
...  

2016 ◽  
Vol 65 ◽  
pp. 5-8 ◽  
Author(s):  
Takuma Hachisu ◽  
Kazuaki Shi ◽  
Tokihiko Yokoshima ◽  
Atsushi Sugiyama ◽  
Shigeki Kuroiwa ◽  
...  

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