Compensation effect of boron and nitrogen codoping on the hardness and electrical resistivity of diamond-like carbon films prepared by magnetron sputtering deposition

2012 ◽  
Vol 27 (23) ◽  
pp. 3027-3032 ◽  
Author(s):  
Chang-Sun Park ◽  
Sun Gyu Choi ◽  
Hyung-Ho Park ◽  
Jin-Nyoung Jang ◽  
MunPyo Hong ◽  
...  
Keyword(s):  
Electrical Resistivity ◽  
Magnetron Sputtering ◽  
Compensation Effect ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Sputtering Deposition ◽  
Image Position

Abstract

The Structure and Electrical Property of sp2 Rich Carbon Films by Magnetron Sputtering

2014 ◽  
Vol 998-999 ◽  
pp. 120-123
Author(s):  
Jun Du ◽  
Xiao Ying Zhu ◽  
Yan Zang ◽  
Lei Guo
Keyword(s):  
Electrical Resistivity ◽  
Magnetron Sputtering ◽  
Carbon Films ◽  
Wear Volume ◽  
Chemical Bonds ◽  
Micro Hardness ◽  
X Ray Diffraction ◽  
Sputtering Deposition ◽  
X Ray ◽  
Pin On Disk

sp2 rich carbon films were produced by using magnetron sputtering deposition. The hardness, friction coefficient and wear volume were elevated by Knoop micro-hardness and pin-on-disk tester; The composition and microstructure of the carbon films have been characterized in detail by combining the techniques of Rutherford Backscattering Spectrum (RBS), X-Ray Photoelectron Spectrum (XPS) and X-Ray Diffraction (XRD); the electrical resistivity was measured by Four Probe Methods (FPM). It is found that: the films hardness are 11~17GPa (HK0.05), the friction coefficients are 0.1-0.2, the wear rate is 10-15m3/Nm; The maximum intensity position in the C1s indicates the chemical bonds are mainly sp2; the electrical resistivity is 1~2×10-4Ω·m. XRD proves these carbon films are amorphous.

Analysis of Surface Properties of Diamond-Like Carbon Films by a Sputtering Deposition

2013 ◽  
Vol 662 ◽  
pp. 505-510 ◽  
Author(s):  
Jium Fang ◽  
Maw Tyan Sheen ◽  
Ming Der Jean
Keyword(s):  
Photoelectron Spectroscopy ◽  
Fuzzy Inference ◽  
Carbon Films ◽  
Experimental Results ◽  
Wear Volume ◽  
Diamond Like Carbon ◽  
Sputtering Deposition ◽  
Tribological Behaviors ◽  
Predicted Values ◽  
Inference Systems

A new approach with adaptive network-based fuzzy inference systems (ANFIS) based on experimental designs was used to model and characterize the tribological behaviors of diamond-like carbon (DLC) films deposited by a magnetron sputtering system. An orthogonal array experiment was introduced and the effects of deposited parameters on the films were systematically explored. The films were analyzed by X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). In this study, a group of highly developed hillock-like textures appeared and a lower wear volume loss became visible in the DLC films. Furthermore, the predicted values and experimental results, in which the ANFIS effectively predicts the tribological behaviors of the DLC films, are similar. It was experimentally confirmed the ANFIS predictions agreed with the experiments. Therefore, the experimental results demonstrate the tribological properties on DLC multilayer films are accurately predicted by ANFIS, thereby justifying the reliability and feasibility of the approach.

scholarly journals Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering

2005 ◽  
Vol 54 (10) ◽  
pp. 4944
Author(s):  
Yang Wu-Bao ◽  
Fan Song-Hua ◽  
Zhang Gu-Ling ◽  
Ma Pei-Ning ◽  
Zhang Shou-Zhong ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

scholarly journals Preparation of Aniline-Based Nitrogen-Containing Diamond-Like Carbon Films with Low Electrical Resistivity

Coatings ◽  
2020 ◽  
Vol 10 (1) ◽  
pp. 54 ◽  
Author(s):  
Ruriko Hatada ◽  
Stefan Flege ◽  
Wolfgang Ensinger ◽  
Sabine Hesse ◽  
Shuji Tanabe ◽  
...  
Keyword(s):  
Electrical Resistivity ◽  
Reference Sample ◽  
Plasma Source ◽  
Carbon Films ◽  
Limited Area ◽  
Diamond Like Carbon ◽  
Film Properties ◽  
High Electrical Resistivity ◽  
Plasma Source Ion Implantation ◽  
Lower Resistivity

The intrinsic high electrical resistivity of diamond-like carbon (DLC) films prevents their use in certain applications. The addition of metal or nitrogen during the preparation of the DLC films leads to a lower resistivity of the films, but it is usually accompanied by several disadvantages, such as a potential contamination risk for surfaces in contact with the film, a limited area that can be coated, deteriorated mechanical properties or low deposition rates of the films. To avoid these problems, DLC films have been prepared by plasma source ion implantation using aniline as a precursor gas, either in pure form or mixed with acetylene. The nitrogen from the precursor aniline is incorporated into the DLC films, leading to a reduced electrical resistivity. Film properties such as hardness, surface roughness and friction coefficient are nearly unchanged as compared to an additionally prepared reference sample, which was deposited using only pure acetylene as precursor gas.

Sign in / Sign up

Export Citation Format

Share Document