Influence of nitrogen implantation on the properties of Ti and substoichiometric TiNx films deposited on high speed steel
1998 ◽
Vol 13
(8)
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pp. 2117-2122
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Keyword(s):
Ti and TiNx (x < 1) thin films have been deposited on high speed steel (HSS) substrates by reactive sputtering and then N+ implanted. The increase of the N/Ti ratio of the films during deposition is related to a decrease in their roughness, and N+ implantation produces another additional slight decrease of the roughness. The hardness of samples increases with the nitrogen content in the as-deposited samples; nevertheless, N+-implanted Ti coatings show lower values of hardness than reactive sputtered TiNx films. α–Ti, ε–Ti2N, and δ–TiN phases were identified by grazing x-ray diffraction.
2013 ◽
Vol 791-793
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pp. 407-410
Keyword(s):
2005 ◽
Vol 190
(2-3)
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pp. 238-243
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Keyword(s):
2005 ◽
Vol 22
(6)
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pp. 407-417
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2006 ◽
Vol 530-531
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pp. 48-52
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Keyword(s):
2011 ◽
Vol 25
(22)
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pp. 2983-2990
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