Reliability of the Properties of (Pb,La)(Zr,Ti)O3 Capacitors with Non–noble Metal Oxide Electrodes stored in an H2 Atmosphere

MRS Advances ◽  
2016 ◽  
Vol 1 (5) ◽  
pp. 369-374 ◽  
Author(s):  
Yoko Takada ◽  
Naoki Okamoto ◽  
Takeyasu Saito ◽  
Kazuo Kondo ◽  
Takeshi Yoshimura ◽  
...  

ABSTRACTWe fabricated ferroelectric (Pb,La)(Zr,Ti)O3 (PLZT) capacitors with Sn:In2O3 (ITO) or Pt top electrodes and investigated the ferroelectric properties of these PLZT capacitors. The shape of polarization–voltage hysteresis loops was essentially unchanged and the decrease in the remnant polarization of the ITO/PLZT/Pt capacitors was smaller than that of the Pt/PLZT/Pt capacitors after annealing with 3% D2 (in N2) at 200°C and 1 Torr (i.e., FGAD). Time of flight secondary mass spectrometry revealed that the D atoms were incorporated into the PLZT film of the Pt/PLZT/Pt capacitors after 3% D2 annealing, resulting in a decrease in the ferroelectric properties. In comparison, no D ion signal was detected in the PLZT film after FGAD for ITO/PLZT/Pt capacitors.

2011 ◽  
Vol 687 ◽  
pp. 359-365
Author(s):  
G. Cao ◽  
Xiao Qing Zhang ◽  
Z. Sun ◽  
Ke Xing Lou ◽  
Z. Xia

Laminated fluoropolymer films with regular void structure, fabricated by using a process consisting of the patterning and fusion bonding steps, are polarized to be piezoelectric. The influence of the applied voltage on the piezoelectric d33 coefficient is investigated. The measurements of ferroelectric-like polarization-voltage hysteresis loops are taken to further understand the capability of polarization in the laminated films. The compressive Young’s moduli of the films are determined from the dielectric resonance spectra. The results show that the laminated fluoropolymer films are piezoelectric after proper charging. The maximum d33 coefficients of the five-layer laminated piezoelectrets are achieved at the applied voltage of 5 kV. The remnant charge density of 0.3 mC/m2 is obtained from the polarization-voltage hysteresis loop at a bias voltage of 4 kV. The measured anti-resonance frequency and calculated compressive Young’s modulus for the five-layer laminated films are 112 kHz and 0.48 MPa, respectively.


2009 ◽  
Vol 60-61 ◽  
pp. 256-259 ◽  
Author(s):  
Ya Feng Luo ◽  
Dan Xie ◽  
Yong Yuan Zang ◽  
Rui Song ◽  
Tian Ling Ren ◽  
...  

Multifunctional BiFeO3 (BFO) thin films were deposited on Bi3.15Nd0.85Ti3O12 (BNdT)/Pt and Pb(Zr1−x,Tix)O3 (PZT)/Pt substrates respectively by sol-gel process. The ferroelectric properties were studied for Metal-Ferroelectric-Mental (MFM) capacitors. The MFM structure exhibited well clockwise capacitance-voltage hysteresis loops due to the ferroelectric polarization of multilayer thin films achieved. The remnant polarization (2Pr) of the BFO/PZT and BFO/PZT multilayer capacitors were 45.1μC/cm2 and 23.2μC/cm2, respectively at the applied voltage of 8V. The leakage current of Pt/BFO/BNdT/Pt is about 3×10-5A/㎝2 at applied voltage of 4V, one order smaller than Pt/BFO/PZT/Pt capacitor. For the BFO/BNdT/Pt, it exhibited a weak saturated ferromagnetic response at room temperature and the multilayer was anti-ferromagnetic. However, for the BFO/PZT/Pt, well-developed M-H loops together with remnant magnetizations can be observed in at room temperature. The highest saturation magnetizations (Ms) of both capacitors were measured to be 2.47emu/cm3.


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