Metallic films for triggering vacuum-arc plasma sources

Yu.A. Sysoiev;  ;  ;

doi:10.15407/fm21.01.047

Metallic films for triggering vacuum-arc plasma sources

Functional materials ◽

10.15407/fm21.01.047 ◽

2014 ◽

Vol 21 (1) ◽

pp. 47-51

Author(s):

Yu.A. Sysoiev ◽

◽

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Metallic Films ◽

Plasma Sources

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Investigation of the erosion characteristics of cathodes with poor conductivity in cathodic vacuum arc plasma sources

The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2003.1229979 ◽

2003 ◽

Author(s):

R.K.Y. Fu ◽

D.L. Tang ◽

P. Chen ◽

L.R. Shen ◽

X.B. Tian ◽

...

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Plasma Sources

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Ion deposition in a crossed E×B field system with vacuum arc plasma sources

Vacuum ◽

10.1016/j.vacuum.2003.09.002 ◽

2003 ◽

Vol 72 (3) ◽

pp. 335-344 ◽

Cited By ~ 11

Author(s):

I. Levchenko ◽

M. Romanov ◽

O. Baranov ◽

M. Keidar

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Plasma Sources ◽

Field System ◽

Ion Deposition

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Measurement of total ion current from vacuum arc plasma sources

Review of Scientific Instruments ◽

10.1063/1.2164967 ◽

2006 ◽

Vol 77 (3) ◽

pp. 03B504 ◽

Cited By ~ 14

Author(s):

E. M. Oks ◽

K. P. Savkin ◽

G. Yu. Yushkov ◽

A. G. Nikolaev ◽

A. Anders ◽

...

Keyword(s):

Ion Current ◽

Vacuum Arc ◽

Arc Plasma ◽

Plasma Sources

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VACUUM ARC PLASMA SOURCES

High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes ◽

10.1615/hightempmatproc.v5.i3.100 ◽

2001 ◽

Vol 5 (3) ◽

pp. 5

Author(s):

Krzysztof Miernik

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Plasma Sources

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Technological Capabilities of Vacuum Arc Plasma Sources

Vakuum in Forschung und Praxis ◽

10.1002/vipr.201400563 ◽

2014 ◽

Vol 26 (5) ◽

pp. 19-23 ◽

Cited By ~ 24

Author(s):

Yu. A. Bystrov ◽

N. Z. Vetrov ◽

A. A. Lisenkov ◽

D. K. Kostrin

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Technological Capabilities ◽

Plasma Sources

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Pinch effect in vacuum arc plasma sources under moderate discharge currents

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/35/6/310 ◽

2002 ◽

Vol 35 (6) ◽

pp. 549-562 ◽

Cited By ~ 27

Author(s):

I A Krinberg ◽

V L Paperny

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Plasma Sources ◽

Pinch Effect

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Vacuum Arc Plasma Sources. Thin Film Deposition

Plasma and Spot Phenomena in Electrical Arcs - Springer Series on Atomic, Optical, and Plasma Physics ◽

10.1007/978-3-030-44747-2_22 ◽

2020 ◽

pp. 933-1001

Author(s):

Isak Beilis

Keyword(s):

Thin Film ◽

Thin Film Deposition ◽

Film Deposition ◽

Vacuum Arc ◽

Arc Plasma ◽

Plasma Sources

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Metal plasma immersion ion implantation and deposition using vacuum arc plasma sources

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587351 ◽

1994 ◽

Vol 12 (2) ◽

pp. 815 ◽

Cited By ~ 143

Author(s):

André Anders

Keyword(s):

Ion Implantation ◽

Vacuum Arc ◽

Arc Plasma ◽

Plasma Sources ◽

Metal Plasma ◽

Plasma Immersion Ion Implantation

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Current–voltage characteristics of a substrate in a crossed E×B field system exposed to plasma flux from vacuum arc plasma sources

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2003.11.011 ◽

2004 ◽

Vol 184 (2-3) ◽

pp. 356-360 ◽

Cited By ~ 8

Author(s):

I. Levchenko ◽

M. Romanov ◽

M. Korobov

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Plasma Flux ◽

Plasma Sources ◽

Field System ◽

Current Voltage ◽

Current Voltage Characteristics

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Wall sheath and optimal bias in magnetic filters for vacuum arc plasma sources

Applied Physics Letters ◽

10.1063/1.1431690 ◽

2002 ◽

Vol 80 (3) ◽

pp. 365-367 ◽

Cited By ~ 20

Author(s):

T. Zhang ◽

Y. C. Zhang ◽

P. K. Chu ◽

I. G. Brown

Keyword(s):

Vacuum Arc ◽

Arc Plasma ◽

Plasma Sources ◽

Optimal Bias

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