DETERMINATION AND CORRECTION OF ERRORS IN SIGNALS QUADRATURE DETECTORS OF LASER INTERFEROMETERS

2019 ◽  
Keyword(s):  
Laser Interferometers

scholarly journals A network of heterodyne laser interferometers for monitoring and control of large ring-lasers

2016 ◽  
Author(s):  
Alberto Donazzan ◽  
Giampiero Naletto ◽  
Maria G. Pelizzo ◽  
Davide Cuccato ◽  
Alessandro Beghi ◽  
...  
Keyword(s):  
Monitoring And Control ◽  
Large Ring ◽  
Ring Lasers ◽  
And Control ◽  
Laser Interferometers

scholarly journals A Low-Power, Low-Noise 37-MHz Photoreceiver for Intersatellite Laser Interferometers Using Discrete Heterojunction Bipolar Transistors

2018 ◽  
Vol 18 (18) ◽  
pp. 7414-7420 ◽  
Author(s):  
German Fernandez Barranco ◽  
Benjamin S. Sheard ◽  
Christian Dahl ◽  
Wolfgang Mathis ◽  
Gerhard Heinzel
Keyword(s):  
Low Power ◽  
Heterojunction Bipolar Transistors ◽  
Low Noise ◽  
Bipolar Transistors ◽  
Laser Interferometers

Compensation for the temperature effect on operation of laser interferometers

2016 ◽  
Vol 59 (3) ◽  
pp. 481-482 ◽  
Author(s):  
S. G. Dolgikh ◽  
S. S. Budrin ◽  
A. A. Plotnikov
Keyword(s):  
Temperature Effect ◽  
Laser Interferometers

A Measurement System for Step Imprint Lithography

2005 ◽  
Vol 295-296 ◽  
pp. 107-112 ◽  
Author(s):  
H.Z. Liu ◽  
Bing Heng Lu ◽  
Y.C. Ding ◽  
D.C. Li ◽  
Yi Ping Tang ◽  
...  
Keyword(s):  
Measurement System ◽  
Special Structure ◽  
Nanometer Scale ◽  
Pattern Transfer ◽  
Imprint Lithography ◽  
Line Position ◽  
Measuring Range ◽  
Optical Reflection ◽  
On Line ◽  
Laser Interferometers

A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of imprint lithography stage. To successfully accomplish nanometer-scale pattern transfer from mold to resist film on the wafer, two types of positioning methods, static and dynamic, are used in this system. Two laser interferometers, two optical reflection mirrors and special structure on the stage with 3 elastic tracks are employed in this system to detect the positions and rotations of the stage. Through an algorithm, measurements of pitch, yaw and roll motions can be achieved. This system can realize on-line position detecting. Based on adjusting of PZTs, the detecting precision can reach 10nm and ±3 milli-arcsec, respectively. The measuring range can reach 100mm and ±10 arcsec, respectively.

scholarly journals High-Sensitivity Fiber-Optic Ultrasound Sensors for Medical Imaging Applications

1998 ◽  
Vol 20 (2) ◽  
pp. 103-112 ◽  
Author(s):  
H. Wen ◽  
D.G. Wiesler ◽  
A. Tveten ◽  
B. Danver ◽  
A. Dandridge
Keyword(s):  
Medical Imaging ◽  
Optical Fibers ◽  
Electromagnetic Interference ◽  
Fiber Optic ◽  
High Sensitivity ◽  
Single Mode ◽  
Piezoelectric Sensors ◽  
Single Element ◽  
Bending Radius ◽  
Laser Interferometers

This paper presents several designs of high-sensitivity, compact fiber-optic ultrasound sensors that may be used for medical imaging applications. These sensors translate ultrasonic pulses into strains in single-mode optical fibers, which are measured with fiber-based laser interferometers at high precision. The sensors are simpler and less expensive to make than piezoelectric sensors, and are not susceptible to electromagnetic interference. It is possible to make focal sensors with these designs, and several schemes are discussed. Because of the minimum bending radius of optical fibers, the designs are suitable for single element sensors rather than for arrays.

scholarly journals Finding the chiral gravitational wave background of an axion- SU(2) inflationary model using CMB observations and laser interferometers

2018 ◽  
Vol 97 (4) ◽  
Author(s):  
Ben Thorne ◽  
Tomohiro Fujita ◽  
Masashi Hazumi ◽  
Nobuhiko Katayama ◽  
Eiichiro Komatsu ◽  
...  
Keyword(s):  
Gravitational Wave ◽  
Inflationary Model ◽  
Laser Interferometers ◽  
Gravitational Wave Background

scholarly journals A New Measuring Method for Spindle Error Motion Using a Cube-corner Prism and Laser Interferometers (1st Report)

1990 ◽  
Vol 56 (2) ◽  
pp. 381-387
Author(s):  
Norimitsu OZAWA ◽  
Yutaka KITAMURA ◽  
Tsuguo KOHNO ◽  
Kimiyuki MITSUI ◽  
Yuichi OKAZAKI
Keyword(s):  
Measuring Method ◽  
Cube Corner ◽  
Error Motion ◽  
Laser Interferometers

Wafer Scale Factories Using Assembled MEMS Robots

2010 ◽  
Author(s):  
Rakesh Murthy ◽  
Dan O. Popa
Keyword(s):  
High Precision ◽  
Recent Progress ◽  
Research Progress ◽  
Dexterous Manipulation ◽  
Nano Indentation ◽  
Work Volume ◽  
Precision Evaluation ◽  
Sem Imaging ◽  
Laser Interferometers ◽  
Application Specific

This paper presents recent research progress in the manufacturing of MEMS based robotic positioning technology. The goal is to configure a nanofactory consisting of multiple microrobots that combine high precision with high throughput along with other application-specific requirements such as strength, dexterity, and work volume. This requires design to satisfy part mobility and dexterous manipulation with high precision. The first microrobot called the Articulated Four Axes Microrobot (AFAM) is a 3D dexterous micromanipulator robot, and we describe nano indentation experiments using AFM tips mounted on the microrobot. By combining positioning data obtained using laser interferometers and SEM imaging of nano indentation data, precision metrics such as accuracy, repeatability and resolution of the AFAM robot are determined. Preliminary reliability findings are presented. The second robot type is the ARRIpede microcrawler, and we present recent progress in microrobot precision evaluation including motion resolution and repeatability. Using these two microrobots as basic positioning and manipulation units, a nanoassembly module concept for hybrid nano assembly applications is proposed. In this paper we present recent progress in fabricating, assembling and evaluating the basic microfactory modules.

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