X-RAY TOPO-TOMOGRAPHY USING LABORATORY SOURCES FOR STUDYING SINGLE DISLOCATIONS IN LOW ABSORBING SILICON SINGLE CRYSTAL

X-ray Radiographs Taken with Silicon Single Crystal Wafers by Divergent X-ray Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.3.129 ◽

1964 ◽

Vol 3 (3) ◽

pp. 129-131 ◽

Cited By ~ 7

Author(s):

Takeo Fujiwara ◽

Shoso Dohi ◽

Junji Sunada

Keyword(s):

Single Crystal ◽

Silicon Single Crystal ◽

Ray Method ◽

X Ray

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Measurement of Distorted Layer Thickness of Silicon Single Crystal by X-Ray Anomalous Transmission Method

Journal of the Physical Society of Japan ◽

10.1143/jpsj.20.1731 ◽

1965 ◽

Vol 20 (9) ◽

pp. 1731-1731

Author(s):

Hiroyuki Aoki ◽

Susumu Maruyama

Keyword(s):

Single Crystal ◽

Layer Thickness ◽

Silicon Single Crystal ◽

Transmission Method ◽

X Ray ◽

Anomalous Transmission ◽

Distorted Layer

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Effect on the Asymmetric Bragg-Case Diffraction of X-Rays on the Yield of X-Ray Photoelectrons from a Silicon Single Crystal

Journal of the Physical Society of Japan ◽

10.1143/jpsj.42.1433 ◽

1977 ◽

Vol 42 (4) ◽

pp. 1433-1434 ◽

Cited By ~ 5

Author(s):

Toshio Takahashi ◽

Seishi Kikuta

Keyword(s):

Single Crystal ◽

Silicon Single Crystal ◽

X Rays ◽

X Ray

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X-Ray Residual Stress Measurement of Silicon Single Crystal

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A ◽

10.1299/kikaia.69.1482 ◽

2003 ◽

Vol 69 (686) ◽

pp. 1482-1489 ◽

Cited By ~ 1

Author(s):

Yuji SAITO ◽

Masanori KURITA ◽

Yoshiro SAWAGUTI

Keyword(s):

Residual Stress ◽

Single Crystal ◽

Stress Measurement ◽

Silicon Single Crystal ◽

Residual Stress Measurement ◽

X Ray

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Modeling of polygonal half–loops dislocations in silicon single crystal using X–ray diffraction topo–tomography data

Journal of Physics Conference Series ◽

10.1088/1742-6596/2036/1/012015 ◽

2021 ◽

Vol 2036 (1) ◽

pp. 012015

Author(s):

V A Grigorev ◽

P V Konarev ◽

D A Zolotov ◽

A V Buzmakov

Keyword(s):

Single Crystal ◽

Silicon Single Crystal ◽

X Ray Diffraction ◽

X Ray ◽

Tomography Data

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Analysis of microdefects in a silicon single crystal by diffuse X-ray scattering using synchrotron radiation

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment ◽

10.1016/0168-9002(86)90199-3 ◽

1986 ◽

Vol 246 (1-3) ◽

pp. 810-813 ◽

Cited By ~ 2

Author(s):

Hante Kim ◽

Shun Ji Gotoh ◽

Toshio Takahashi ◽

Tetsuya Ishikawa ◽

Seishi Kikuta

Keyword(s):

Synchrotron Radiation ◽

Single Crystal ◽

Silicon Single Crystal ◽

X Ray ◽

X Ray Scattering ◽

Ray Scattering

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X-Ray Stress Measurement of Silicon Single Crystal Using Multiple Regression Analysis

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A ◽

10.1299/kikaia.72.765 ◽

2006 ◽

Vol 72 (717) ◽

pp. 765-771 ◽

Cited By ~ 2

Author(s):

Keisuke TANAKA ◽

Kenichi MIZUNO ◽

Shutaro MACHIYA ◽

Yoshiaki AKINIWA

Keyword(s):

Regression Analysis ◽

Single Crystal ◽

Multiple Regression Analysis ◽

Multiple Regression ◽

Stress Measurement ◽

Silicon Single Crystal ◽

X Ray

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A double-line image of a dislocation in a silicon single crystal observed by X-ray plane wave topography

Philosophical Magazine A ◽

10.1080/01418618108239503 ◽

1981 ◽

Vol 43 (4) ◽

pp. 935-944 ◽

Cited By ~ 5

Author(s):

Kohtaro Ishida ◽

Akio Ootuka ◽

Satio Takagi

Keyword(s):

Plane Wave ◽

Single Crystal ◽

Silicon Single Crystal ◽

Double Line ◽

X Ray ◽

Line Image

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Observation of Dislocation in a Silicon Single Crystal by X-Ray Plane Wave Topography

Journal of the Physical Society of Japan ◽

10.1143/jpsj.45.1067 ◽

1978 ◽

Vol 45 (3) ◽

pp. 1067-1068 ◽

Cited By ~ 5

Author(s):

Satio Takagi ◽

Kohtaro Ishida ◽

Akio Ootuka

Keyword(s):

Plane Wave ◽

Single Crystal ◽

Silicon Single Crystal ◽

X Ray

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X-ray Diffraction Tomography Using Laboratory Sources for Studying Single Dislocations in a Low Absorbing Silicon Single Crystal

Optoelectronics Instrumentation and Data Processing ◽

10.3103/s8756699019020031 ◽

2019 ◽

Vol 55 (2) ◽

pp. 126-132 ◽

Cited By ~ 1

Author(s):

D. A. Zolotov ◽

V. E. Asadchikov ◽

A. V. Buzmakov ◽

I. G. D’yachkova ◽

Yu. S. Krivonosov ◽

...

Keyword(s):

Single Crystal ◽

Silicon Single Crystal ◽

Diffraction Tomography ◽

X Ray Diffraction ◽

X Ray

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